• Title/Summary/Keyword: probe beam

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Creation of Electron Beam Probe in Scanning Electron Microscopy (주사 전자 현미경에서 전자빔 프르브 생성)

  • Lim, Sun-Jong;Lee, Chan-Hong
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.17 no.5
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    • pp.52-57
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    • 2008
  • Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.

Silicon Micro-probe Card Using Porous Silicon Micromachining Technology

  • Kim, Young-Min;Yoon, Ho-Cheol;Lee, Jong-Hyun
    • ETRI Journal
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    • v.27 no.4
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    • pp.433-438
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    • 2005
  • We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

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Optimum Angle between Pump Beam and Probe Beam in the Differential-Velocity-Selective Saturation Absorption Spectroscopy (차동속도선택 포화흡수분광법에서 펌프광과 조사광의 최적 각도)

  • Cho, Chang-Ho;Park, Jong-Dae
    • The Journal of Natural Sciences
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    • v.12 no.1
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    • pp.49-59
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    • 2002
  • Exponential decrease of saturation absorption signal was reported in pump beam spacially keeping off from probe beam. Optimum angle between pump beam and probe beam in the differential-velocity-selective saturation absorption spectroscopy was computed theoretically, $1.33^{\circ}$ in cesium atoms and $1.08^{\circ}$ in Rb 87 atoms, and was good agreement with the experimental results.

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Ultrasonic Sensors for Steel Structure Inspection (강구조물(鋼構造物) 진단(診斷)을 위한 초음파(超音波) 센서)

  • Shin, Byoung-Churl
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.2 no.2
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    • pp.170-176
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    • 1998
  • The team mixed PbO, $ZrO_2$, $TiO_2$, $Nb_2O_5$ and $MnCO_3$, to make $Pb[(Zr_{0.54}\;Ti_{0.46})\;Nb_{0.005}]O_3+4%MnCO_3$. The electroded PZT ceramics were poled by 3 kV/mm at $110^{\circ}C$ for 600 s. We assembled the 0.4mm thick PZT slices into ultrasonic transducers. Central frequency of the probe is 5 MHz, which is proper to the thickness gauge for steel pipes and for flaw detector. The probe can detect a disk shape defect of 1mm diameter at 15cm deep in steel block. The new probe's Fresnel zone that the ultrasonic beam do not broaden is 13mm. Over the Fresnel zone, the ultrasonic beam spreads. Half of the beam spread angle of the probe is $4.3^{\circ}-4.6^{\circ}$. This probe can be used for the ultrasonic transducers for non-destructive testing of steel bridges.

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Atom Probe Tomography: A Characterization Method for Three-dimensional Elemental Mapping at the Atomic Scale

  • Choi, Pyuck-Pa;Povstugar, Ivan
    • Journal of Powder Materials
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    • v.19 no.1
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    • pp.67-71
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    • 2012
  • The present paper gives an overview about the Atom Probe Tomography technique and its application to powder materials. The preparation of needle-shaped Atom Probe specimens from a single powder particle using focused-ion-beam milling is described. Selected experimental data on mechanically alloyed (and sintered) powder materials are presented, giving insight into the atomic-scale elemental redistribution occurring under powder metallurgical processing.

Fabrication of Probe Beam by Using Joule Heating and Fusing (절연절단법을 이용한 프로브 빔의 제작)

  • Hong, Pyo-Hwan;Kong, Dae-Young;Lee, Dong-In;Kim, Bonghwan;Cho, Chan-Seob;Lee, Jong-Hyun
    • Journal of Sensor Science and Technology
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    • v.22 no.1
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    • pp.89-94
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    • 2013
  • In this paper, we developed a beam of MEMS probe card using a BeCu sheet. Silicon wafer thickness of $400{\mu}m$ was fabricated by using deep reactive ion etching (RIE) process. After forming through silicon via (TSV), the silicon wafer was bonded with BeCu sheet by soldering process. We made BeCu beam stress-free owing to removing internal stress by using joule heating. BeCu beam was fused by using joule heating caused by high current. The fabricated BeCu beam measured length of 1.75 mm and width of 0.44 mm, and thickness of $15{\mu}m$. We measured fusing current as a function of the cutting planes. Maximum current was 5.98 A at cutting plane of $150{\mu}m^2$. The proposed low-cost and simple fabrication process is applicable for producing MEMS probe beam.

A Unidirectional Beam Antenna using a Probe Excited Circular Ring near the Reflector

  • Phongcharoenpanich, Chuwong;Lamultree, Suthasinee;Kosulvit, Sompol;Krairiksh, Monai
    • Proceedings of the IEEK Conference
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    • 2002.07a
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    • pp.545-548
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    • 2002
  • This paper proposes a unidirectional beam antenna using a probe excited circular ring near the reflector. The antenna structure is simple. The radiation characteristics of the antenna fur various spacing between a probe excited circular ring and the reflector are analyzed. These characteristics are also compared with the conventional single aperture near the reflector. It is found that the proposed structure yields better characteristics than the conventional structure. The numerical results of the radiation pattern, elevational beam peak, beamwidth, and maximum directivity are investigated. The result of the analysis is very useful to design the antenna of the high directivity with unidirectional beam.

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The Optical Design of Probe-type Microscope Objective for Intravital Laser Scanning CARS Microendoscopy

  • Rim, Cheon-Seog
    • Journal of the Optical Society of Korea
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    • v.14 no.4
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    • pp.431-437
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    • 2010
  • A stack of gradient-index (GRIN) rod lenses cannot be used for coherent anti-Stokes Raman scattering (CARS) microendoscopy for insertion to internal organs through a surgical keyhole with minimal invasiveness. That's because GRIN lens has large amount of inherent chromatic aberrations in spite of absolutely requiring a common focus for pump and Stokes beam with each frequency of ${\omega}_p$ and ${\omega}_S$. For this endoscopic purpose, we need to develop a long slender probe-type objective, namely probe-type microscope objective (PMO). In this paper, we introduce the structure, the working principle, and the design techniques of PMO which is composed of a probe-type lens module (PLM) and an adaptor lens module (ALM). PLM is first designed for a long slender type and ALM is successively designed by using several design parameters from PLM for eliminating optical discords between scanning unit and PLM. A combined module is optimized again to eliminate some coupling disparities between PLM and ALM for the best PMO. As a result, we can obtain a long slender PMO with perfectly diffraction-limited performance for pump beam of 817 nm and Stokes beam of 1064 nm.

Beam-scanning Imaging Needle for Endoscopic Optical Coherence Tomography

  • Yang, Woohyeok;Hwang, Junyoung;Moon, Sucbei
    • Current Optics and Photonics
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    • v.5 no.5
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    • pp.532-537
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    • 2021
  • We present a compact endoscopic probe in a needle form which has a fast beam-scanning capability for optical coherence tomography (OCT). In our study, a beam-scanning OCT imaging needle was fabricated with a 26G syringe needle (0.46 mm in outer diameter) and a thin OCT imaging probe based on the stepwise transitional core (STC) fiber. The imaging probe could freely rotate inside the needle for beam scans. Hence, OCT imaging could be performed without rotation or translation of the needle body. In our design, the structural integrity of the needle's steel tubing was preserved for mechanical robustness. Probing the optical signal was performed through the needle's own window formed at the end. For hand-held operation of our imaging needle, a light and compact scanner module (130 g and 45 × 53 × 60 mm3) was devised. Connected to the imaging needle, it could provide rotational actuation driven by a galvanometer. Because of its finite actuation range, our scanner module did not need a fiber rotary joint which might add undesirable complexity. The beam scan speed was 20 Hz and supported 20 frames per second at the maximum for endoscopic OCT imaging.