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Creation of Electron Beam Probe in Scanning Electron Microscopy  

Lim, Sun-Jong (한국기계연구원, 지능형 생산시스템 연구 본부)
Lee, Chan-Hong (한국기계연구원, 지능형 생산시스템 연구 본부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.17, no.5, 2008 , pp. 52-57 More about this Journal
Abstract
Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.
Keywords
Scanning Electron Microscopy; Electron beam; Beam current; Electron beam probe; Back scatter electron; Secondary electron; Condenser lens; Objective lens; Faraday cup; High voltage generator;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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