• 한국정밀공학회지
• /
• 제14권3호
• /
• pp.82-88
• /
• 1997

In this paper, the development of a precision CNC lathe prototype for mirror surface machining is presented. To obtain high precision machining accuracy, a hydrostatically supported precision spindle and a sliding guideway with turcite pad are adopted as the motion elements. The machining accuracy of the prototype machine, and the motional accuracy of its motion elements are tested and evaluated to confirm the validity of the application of these elements on the prototype. The hydrostatic spindle shows 0.09 .mu. m of rotational accuracy and the guideway shows about 0.8 .mu. m/170mm of horizontal straightness. The sur- face roughness of cupper and aluminium cylinder machined by the prototype machine with diamond tool are 0.07 .mu. m and 0.10 .mu. m Rmax respectively. From these results, it is verified that the prototype lathe is avail- able for high precision machining.

• 한국기계가공학회지
• /
• 제11권4호
• /
• pp.55-61
• /
• 2012

Very important content in performance evaluation of machine tool is positioning accuracy and repeatability precision measurements of feed mechanism. A study analyses the measurement method and uncertainty factors by ISO-based test method. Reliable results can't be derived without the notion of measurement uncertainty. The reason is that the measured value includes a lot of uncertain factors. Finding the factor that affects the measurement of parameter is important for estimation of measurement precision. In this paper, the evaluation of uncertainty analysis about positioning accuracy and repeatability precision measurements of high precision feed mechanism is presented to evaluate the important factors of uncertainty.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2007년도 추계학술대회 논문집
• /
• pp.179-180
• /
• 2007

• 한국정밀공학회지
• /
• 제23권6호
• /
• pp.14-21
• /
• 2006

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2009년도 춘계학술대회 논문집
• /
• pp.619-620
• /
• 2009

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2009년도 춘계학술대회 논문집
• /
• pp.255-256
• /
• 2009

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2009년도 추계학술대회 논문집
• /
• pp.545-546
• /
• 2009

• 한국정밀공학회지
• /
• 제19권1호
• /
• pp.13-17
• /
• 2002

• 한국정밀공학회지
• /
• 제20권12호
• /
• pp.11-18
• /
• 2003

• International Journal of Precision Engineering and Manufacturing
• /
• 제9권3호
• /
• pp.27-32
• /
• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.