Browse > Article

Design and Control of Nano-Precision Machine Systems  

Kim, Seung-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Publication Information
Keywords
Nanotechnology; Precision Engineering; Relative Uncertainty; Machine System;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 P. McKeown, 'Manufacturing - how small can we go? The challenge and opportunities of the nanometre age,' The British Association Lecture, 1996
2 N. Taniguchi, current status in the future trends of ultra precision machining and ultrafine materials processing,' Annals of CIRP 32/2, 573, 1983   DOI   ScienceOn
3 http://www.mel.nist.gov
4 http://www.npl.co.uk
5 E. Teague, 'Generating and measuring displacements up to 0.1 m to an accuracy of 0.1 nm: Is it possible?,' SPIE Handbook-The Technology of Proximal Probe Lithography, Edited by C. Marrian, 1993
6 http://me.kaist.ac.kr/~pem/
7 D. Swyt, 'Uncertainties in dimensional measurements at nonstandard temperatures,' J. of Res. NIST , 1993. Thermacore Inc, 'Heat pipe design guide,' 1994
8 http://www.sematech.org
9 http://ligo.caltech.edu