• 제목/요약/키워드: power spectra

검색결과 636건 처리시간 0.032초

유도 결합 플라즈마를 이용한 TiN 박막의 식각 특성 (Etch Characteristics of TiN Thin Films in the Inductively Coupled Plasma System)

  • 엄두승;강찬민;양성;김동표;김창일
    • 한국표면공학회지
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    • 제41권3호
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    • pp.83-87
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    • 2008
  • This study described the effects of RF power, DC bias voltage, chamber pressure and gas mixing ratio on the etch rates of TiN thin film and selectivity of TiN thin film to $SiO_2$ with $BCl_3$/Ar gas mixture. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) with other conditions were fixed, the maximum etch rate of TiN thin film was 170.6 nm/min. When the DC bias voltage increased from -50 V to -200 V, the etch rate of TiN thin film increased from 15 nm/min to 452 nm/min. As the RF power increased and chamber pressure decreased, the etch rate of TiN thin film showed an increasing tendency. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) under others conditions were fixed, the intensity of optical emission spectra from radical or ion such as Ar(750.4 nm), $Cl^+$(481.9 nm) and $Cl^{2+}$(460.8 nm) was highest. The TiN thin film was effectively removed by the chemically assisted physical etching in $BCl_3$/Ar ICP plasma.

저밀도 폴리에틸렌을 위한 고전계 파형의 필름 두께의존성에 관한 연구 동향 (A Research Trend on Film Thickness Dependence of Ac High Feld for Low Density Polyethylene)

  • 정성찬;노정현;이주홍;황종선;최용성;이경섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1988-1989
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    • 2007
  • Polyethylene is widely used as the insulator for power cable. To investigate the conduction mechanism for power cable insulation under ac high field, it is very important to acquire the dissipation current under actual running field. Recently, we have developed the unique system, which make possible to observe the nonlinear dissipation current waveform. In this system, to observe the nonlinear properties with high accuracy, capacitive current component is canceled by using inverse capacitive current signal instead of using the bridge circuit for canceling it. We have already reported that the dissipation currents of $40\;{\mu}m$ thick LDPE film at 10 kV/mm and over 140 Hz, it starts to show nonlinearity and odd number's harmonics were getting large. To investigate the conduction mechanis ms in this region, especially space charge effect, various kinds of estimation, such as time variations of instantaneous resistivity for one cycle, FFT spectra of dissipation current waveforms and so on, has been examined. As the results of these estimations, it was found that the dissipation current will depend on not only the instantaneous value of electric field but also the time differential of applied electric field due to taking a balance between applied field and internal field. Furthermore, two large peaks of dissipation current for each half cycle were observed under certain condition. In this paper, to clarify the reason why it shows two peaks for each half cycle, the film thickness dependences of dissipation current waveforms were observed by using the three different thickness LDPE films.

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Luminescence Properties of Ba3Si6O12N2:Eu2+ Green Phosphor

  • Luong, Van Duong;Doan, Dinh Phuong;Lee, Hong-Ro
    • 한국표면공학회지
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    • 제48권5호
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    • pp.211-217
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    • 2015
  • To fabricate white LED having a high color rendering index value, red color phosphor mixed with the green color phosphor together in the blue chip, namely the blue chips with RG phosphors packaging is most favorable for high power white LEDs. In our previous papers, we reported on successful syntheses of $Sr_{2-}$ $Si_5N_8:Eu^{2+}$ and $CaAlSiN_3$ phosphors for red phosphor. In this work, for high power green phosphor, greenemitting ternary nitride $Ba_3Si_6O_{12}N_2:Eu^{2+}$ phosphor was synthesized in a high frequency induction furnace under $N_2$ gas atmosphere at temperatures up to $1400^{\circ}C$ using $EuF_3$ as a raw material for $Eu^{2+}$ dopant. The effects of molar ratio of component and experimental conditions on luminescence property of prepared phosphors have been investigated. The structure and luminescence properties of prepared $Ba_3Si_6O_{12}N_2:Eu^{2+}$ phosphors were investigated by XRD and photoluminescence spectroscopy. The excitation spectra of $Ba_3Si_6O_{12}N_2:Eu^{2+}$ phosphors indicated broad excitation wavelength range of 250 - 500 nm, namely from UV to blue region with distinct enhanced emission spectrum peaking at ${\approx}530nm$.

고출력 백색 광원용 Y3Al5O12;Ce3+,Pr3+ 투명 세라믹 형광체의 광학특성 (Optical Properties of Y3Al5O12;Ce3+,Pr3+ Transparent Ceramic Phosphor for High Power White Lighting)

  • 강태욱;임석규;김종수;정용석
    • 한국재료학회지
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    • 제29권2호
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    • pp.116-120
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    • 2019
  • We prepared $Y_3Al_5O_{12};Ce^{3+},Pr3^{+}$ transparent ceramic phosphor using a solid state reaction method. By XRD pattern analysis and SEM measurement, our phosphors reveal an Ia-3d(230) space group of cubic structure, and the transparent ceramic phosphor has a polycrystal state with some internal cracks and pores. In the Raman scattering measurement with an increasing temperature, lattice vibrations of the transparent ceramic phosphor decrease due to its more perfect crystal structure and symmetry. Thus, low phonon generation is possible at high temperature. Optical properties of the transparent ceramic phosphor have broader excitation spectra due to a large internal reflection. There is a wide emission band from the green to yellow region, and the red color emission between 610 nm and 640 nm is also observed. The red-yellow phosphor optical characteristics enable a high Color Rendering Index (CRI) in combination with blue emitting LED or LD. Due to its good thermal properties of low phonon generation at high temperature and a wide emission range for high CRI characteristics, the transparent ceramic phosphor is shown to be a good candidate for high power solid state white lighting.

Validation of a Model for Estimating Individual External Dose Based on Ambient Dose Equivalent and Life Patterns

  • Sato, Rina;Yoshimura, Kazuya;Sanada, Yukihisa;Sato, Tetsuro
    • Journal of Radiation Protection and Research
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    • 제47권2호
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    • pp.77-85
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    • 2022
  • Background: After the Fukushima Daiichi Nuclear Power Station (FDNPS) accident, a model was developed to estimate the external exposure doses for residents who were expected to return to their homes after evacuation orders were lifted. However, the model's accuracy and uncertainties in parameters used to estimate external doses have not been evaluated. Materials and Methods: The model estimates effective doses based on the integrated ambient dose equivalent (H*(10)) and life patterns, considering a dose reduction factor to estimate the indoor H*(10) and a conversion factor from H*(10) to the effective dose. Because personal dose equivalent (Hp(10)) has been reported to agree well with the effective dose after the FDNPS accident, this study validates the model's accuracy by comparing the estimated effective doses with Hp(10). The Hp(10) and life pattern data were collected for 36 adult participants who lived or worked near the FDNPS in 2019. Results and Discussion: The estimated effective doses correlated significantly with Hp(10); however, the estimated effective doses were lower than Hp(10) for indoor sites. A comparison with the measured indoor H*(10) showed that the estimated indoor H*(10) was not underestimated. However, the Hp(10) to H*(10) ratio indoors, which corresponds to the practical conversion factor from H*(10) to the effective dose, was significantly larger than the same ratio outdoors, meaning that the conversion factor of 0.6 is not appropriate for indoors due to the changes in irradiation geometry and gamma spectra. This could have led to a lower effective dose than Hp(10). Conclusion: The estimated effective doses correlated significantly with Hp(10), demonstrating the model's applicability for effective dose estimation. However, the lower value of the effective dose indoors could be because the conversion factor did not reflect the actual environment.

Azimuthal Angle Scan Distribution, Third Order Response, and Optical Limiting Threshold of the Bismarck Brown Y:PMMA Film

  • Fadhil Abass Tuma;Hussain Ali Badran;Harith Abdulrazzaq Hasan;Riyadh Chassib Abul-Hail
    • Current Optics and Photonics
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    • 제7권6호
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    • pp.721-731
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    • 2023
  • This paper studies various roughness parameters, besides waviness, texture, and nonlinear parameters of Bismarck brown Y (BBY)-doped Poly(methyl methacrylate) (PMMA) films based on the computed values of optical limiting (OL) threshold power and nonlinear refractive index. The films' morphology, grain size, and absorption spectra were investigated using atomic force microscopy in conjunction with ultraviolet-visible (UV-Vis) spectrophotometer. The particle size of the films ranged between 4.11-4.51 mm and polymer films showed good homogeneity and medium roughness, ranging from 1.11-4.58 mm. A polymer film's third-order nonlinear optical features were carried out using the Z-scan methodology. The measurements were obtained by a continuous wave produced from a solid-state laser with a 532 nm wavelength. According to the results, BBY has a nonlinear refractive index of 10-6 cm2/W that is significantly negative and nonlinear. The optical limiting thresholds are roughly 10.29, 13.52, and 18.71 mW, respectively. The shift of nonlinear optical features with the film's concentration was found throughout the experiment Additionally, we found that the polymer samples have outstanding capabilities for restricting the amount of optical power that may be transmitted through them. We propose that these films have the potential to be used in a wide variety of optoelectronic applications, including optical photodetectors and optical switching.

레이저 유도 플라즈마에 대한 자기장 감금의 영향 연구 (Research on the magnetic confinement of laser-induced plasma)

  • 현은주;김용현
    • 전기전자학회논문지
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    • 제28권1호
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    • pp.38-45
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    • 2024
  • 간단한 자기장 감금이 레이저 유도 플라즈마의 전하 입자들에 미치는 영향이 논의 되었다. 자기장 영향에 대한 이전 연구들은 주로 플라즈마 방전 세기의 향상이나 수명시간 연장에 집중되었다. 이와 대조적으로, 본 개발은 과거에 거의 다뤄지지 않았던, 플라즈마 소멸에 대해 연구하였다. 이는 플라즈마를 활용한 기술개발에 혁신적인 도움이 될 것으로 기대한다. Nd:YAG 레이저(1064 nm, 6 ns)가 3가지 타입의 금속 물질(Al, Ti, STS)과 공기 중에 집광되었다. Nd2Fe14B 자석으로 0.4T 크기의 자기장을 만들었고, 이를 레이저 유도 플라즈마에 관통시켰다. 플라즈마 스펙트럼은 레이저 파워와 분광기의 딜레이 타임을 조정해 가면서 자기장 여부에 따른 수치가 측정되었다. O I(777.42 nm), Fe I (520.447 nm), Ti I (503.649 nm), Al I (396.147 nm) 스펙트럼 분석을 통해 자기장에 의한 플라즈마의 소멸이 특정 조건에 상관없이 항상 촉진됨을 독점적으로 발견하였다.

$C_{x}F_{y}$ Polymer Film Deposition in rf and dc $C_{7}F_{16}$ Vapor Plasmas

  • Sakai, Y.;Akazawa, M.;Sakai, Yosuke;Sugawara, H.;Tabata, M.;Lungu, C.P.;Lungu, A.M.
    • Transactions on Electrical and Electronic Materials
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    • 제2권1호
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    • pp.1-6
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    • 2001
  • $C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.

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Analysis of Tsunami Resonance and Impact in Coastal Waters

  • Lee, Joong-Woo;Kim, Kyu-Kwang;Yamazaki, Yoshiki;Cheung, Kwok Fai;Yamanaka, Ryoichi
    • 한국항해항만학회지
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    • 제35권9호
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    • pp.755-763
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    • 2011
  • Recently, extreme tsunami waves generated by submarine earthquake have caused tremendous damages to the coastal cities and ports. Strong seiche oscillations and runups are observed in specific sea areas around the world. Although no frequent impacts to the coast of Korean peninsula, there exist some important events in the east of Korea in the past. This study focuses on two historical events and recalculate with different fault and rupture mechanism for prediction considering the recent trend of submarine earthquake. The present study of the 1983 Akita tsunamis demonstrates the multi-scale resonance along continental coasts. Together with the Nankai tsunami for inland sea, we have confirmed the inland sea resonance surrounded by islands in defining the impact along the coast. Coherence and wavelet analyses for deducing a predominant period and time frequency are useful in reasoning the inundation. The resonance modes, which are largely independent of the tsunami source, allow identification of at-risk communities and infrastructure for mitigation of tsunami hazards. Furthermore, understanding of the resonance and the predicted runups for the site of power plant and industrial complex in the east coast of Korea would allow better preparation for the future disasters.

Photochemical Kinetics of Maleic to Fumaric Acid on Silver Nanoparticle Surfaces

  • Jang, Nak-Han;Jeong, Dae-Hong;Suh, Jung-Sang
    • Bulletin of the Korean Chemical Society
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    • 제26권5호
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    • pp.791-794
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    • 2005
  • A visible photochemistry of maleic to fumaric acid adsorbed on silver nanoparticle surfaces was investigated as probed by SERS using a simple flow method. Photoisomerization of maleic to fumaric acid was consecutively observed in the condition of various flow rates, which varied the exposure time of laser beam. The sequential SERS spectra of maleic acid indicated that the photochemical isomerization and desorption took place simultaneously on silver nanoparticle surfaces as a function of laser fluency and wavelength. For 530.9nm laser line excitation, the rate constant coefficients were obtained with a = 5.9 $sec^{-1}$ mW for isomerization and b = 13.9 $sec^{-1}$ mW for desorption, which $k_1\;=\;aI^n\;and\;k_2\;=\;bI^m$. Both reactions were one photon process (n = 1, m = 1) of a visible light and relatively fast process whose decay time was in the range of milli-second for 50 mW laser power. The rate of photochemical reaction increased on going toward the blue and photodesorption was a dominant process. A simple flow method used in this study was very useful to study a relatively fast photochemical reaction of molecules adsorbed on silver nanoparticle surfaces.