• 한국해안해양공학회지
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• 제2권2호
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• pp.59-66
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• 1990

극지방의 해양 환경은 낮은 온도와 함께 여러 가지 형태로 존재하는 얼음의 분포에 의해 큰 영향을 받는다. 빙하와 빙산, 해빙 등 빙역학의 기초적인 이해를 위하여 본 연구는 polycrystalline ice의 재료적 특성과 파괴기구 등을 파악하고 극지 방하유동시 관측되는 creep 변경을 기술하기 위한 constitutive 모델을 제시하였다. 빙변형에 관여되는 여러 가지 물리적 변화 중 microcracking에 의한 재료의 손상을 주요인으로 간주하여 파손역학의 이론을 적용한 3차원 수치모델을 개발하였으며 기발표된 실험 결과와 비교하였다. 1축 균일압축을 받는 경우 실험 데이타와 수치모델은 유사한 거동을 보이고 있으며, 빙변형에 있어서 1, 2기 creep의 소성적 변형특성 뿐 아니라 microcracking에 의한3기(tertiary) creep의 특징까지도 잘 기술해 주고 있다.

• 센서학회지
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• 제15권6호
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• pp.386-390
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• 2006

This paper describes the ohmic contact formation of polycrystalline 3C-SiC films deposited on thermally grown Si wafers. In this work, a TiW (titanium tungsten) film as a contact material was deposited by RF magnetron sputter and annealed with the vacuum process. The specific contact resistance (${\rho}_{c}$) of the TiW contact was measured by using the C-TLM (circular transmission line method). The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature as also analyzed by XRD (X-ray diffraction) and SEM (scanning electron microscope). All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30 min., the lowest contact resistivity of $2.90{\times}10{\Omega}cm^{2}$ was obtained due to the improved interfacial adhesion. Therefore, the good ohmic contact of polycrystalline 3C-SiC films using the TiW film is very suitable for high-temperature MEMS applications.

• 한국전기전자재료학회논문지
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• 제19권8호
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• pp.732-736
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• 2006

This paper describes the physical characterizations of polycrystalline 3C-SiC thin films heteroepitaxially grown on Si wafers with thermal oxide, In this work, the 3C-SiC film was deposited by LPCVD (low pressure chemical vapor deposition) method using single precursor 1, 3-disilabutane $(DSB:\;H_3Si-CH_2-SiH_2-CH_3)\;at\;850^{\circ}C$. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_2$ were measured by SEM (scanning electron microscope). Finally, residual strain was investigated by Raman scattering and a peak of the energy level was less than other type SiC films, From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror, and low defect and strain. Therefore, the polycrystalline 3C-SiC is suitable for harsh environment MEMS (Micro-Electro-Mechanical-Systems) applications.

• 한국세라믹학회지
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• 제53권6호
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• pp.610-614
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• 2016

Tyranno SA (SiC-polycrystalline fiber, Ube Industries Ltd.) shows excellent heat-resistance up to $2000^{\circ}C$ with relatively high mechanical strength. This fiber is produced by the conversion process from a raw material (amorphous Si-Al-C-O fiber) into SiC-polycrystalline fiber at very high temperatures over $1500^{\circ}C$ in argon. In this conversion process, the degradation reaction of the amorphous Si-Al-C-O fiber accompanied by a release of CO gas for obtaining a stoichiometric composition and the subsequent sintering of the degraded fiber proceed. Furthermore, vaporization of gaseous SiO, phase transformation and active diffusion of the components of the Si-Al-C-O fiber competitively occur. Of these changes, vaporization of the gaseous SiO during the conversion process results in an abnormal SiC-grain growth and also leads to the non-stoichiometric composition. However, using a modified Si-Al-C-O fiber with an oxygen-rich surface, vaporization of the gaseous SiO was effectively prevented, and then consequently a nearly stoichiometric SiC composition could be obtained.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.121-126
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• 2004

In this paper, the effects of the ozone oxidation of the landing polycrystalline silicon on the cell contact resistance of the DRAM device were studied. For this study, the ozone oxidation of the landing polycrystalline silicon layer was performed under various conditions, which was followed by the normal DRAM processes. Then, the cell contact resistance and $t_{WR}$ (write recovery time) of the devices were measured and analyzed. The experimental results showed that the cell contact resistance was more significantly increased for higher temperature of oxidation, longer time of oxidation, and higher concentration of ozone in the oxidation furnace. In addition, the TEM cross-sectional micrographs clearly showed that the oxide layer at the interface between the landing polycrystalline silicon layer and the plug polycrystalline silicon layer was increased by the ozone oxidation. Furthermore, the rate of the device failure due to too large write recovery time was also found to be well correlated with the increase of the cell contact resistance.

• 한국결정성장학회지
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• 제18권1호
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• pp.45-49
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• 2008

태양광 산업의 성장에 따른 개선된 실리콘 잉곳 제조 방법의 개발은 중요한 이슈 중 하나이다. 단결정 실리콘 웨이퍼에 비해 가격 변에서의 유리함으로 인해 현재 다결정 실리콘 웨이퍼가 태양광 시장의 60% 이상을 점유하고 있으며 주조법, 열교환법, 전자기 주조법 등을 포함한 몇 가지 응고 공정들이 개발되어 오고 있다. 이 논문에서는 ADS 법을 이용하여 대형 다결정 실리콘을 성장하기 위한 공정모사를 수행하였다. ADS 법은 적은 열 손실, 짧은 공정 시간 및 효율적인 방향성 응고가 가능하다는 장점을 가지고 있다. ADS 공정의 수치해석은 온도 분포를 확인하기 위해 유체역학을 적용하였고, 공정모사 결과 240 kg 이상의 대형 다결정 실리콘 잉곳의 효율적인 방향성 응고가 가능함을 확인하였다.

• 한국세라믹학회지
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• 제54권6호
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• pp.506-510
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• 2017

One of the characteristics of polycrystalline graphene that determines its material properties is grain size. Mechanical properties such as Young's modulus, yield strain and tensile strength depend on the grain size and show a reverse Hall-Petch effect at small grain size limit for some properties under certain conditions. While there is agreement on the grain size effect for Young's modulus and yield strain, certain MD simulations have led to disagreement for tensile strength. Song et al. showed a decreasing behavior for tensile strength, that is, a pseudo Hall-Petch effect for the small grain size domain up to 5 nm. On the other hand, Sha et al. showed an increasing behavior, a reverse Hall-Petch effect, for grain size domain up to 10 nm. Mortazavi et al. also showed results similar to those of Sha et al. We suspect that the main difference of these two inconsistent results is due to the different modeling. The modeling of polycrystalline graphene with regular size and (hexagonal) shape shows the pseudo Hall-Petch effect, while the modeling with random size and shape shows the reverse Hall-Petch effect. Therefore, this study is conducted to confirm that different modeling is the main reason for the different behavior of tensile strength of the polycrystalline structures. We conducted MD simulations with models derived from the Voronoi tessellation for two types of grain size distributions. One type is grains of relatively similar sizes; the other is grains of random sizes. We found that the pseudo Hall-Petch effect and the reverse Hall-Petch effect of tensile strength were consistently shown for the two different models. We suspect that this result comes from the different crack paths, which are related to the grain patterns in the models.

• 한국기계가공학회지
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• 제7권3호
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• pp.67-74
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• 2008

Polycrystalline diamonds(PCD) tools are widely used in machining a large variety of advanced materials. However, the manufacture of PCD tool blanks is not an economical process. The shaping of PCD blanks with conventional machining methods(such a grinding) is long, labor-intensive process. This paper reports experimental investigation of the influence of electrical machining conditions on the metal removal rate of WEDM of PCD. Experimental results show that the longer pulse-on time and the shorter pulse-off time increase the metal removal rate and worsen the surface quality. The smaller grain size of diamond yields the metal removal rate and shows the better surface quality. Higher electrical conductivity of water yields worse surface roughness.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.96.2-96.2
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• 2010

The surface morphology and structural properties of polycrystalline silicon (poly-Si) films made in-situ aluminum induced crystallization at various substrate temperature (300~600) was investigated. Silicon films were deposited by hot-wire chemical vapor deposition (HWCVD), as the catalytic or pyrolytic decomposition of precursor gases SiH4 occurs only on the surface of the heated wire. Aluminum films were deposited by DC magnetron sputtering at room temperature. continuous poly-Si films were achieved at low temperature. from cross-section TEM analyses, It was confirmed that poly-Si above $450^{\circ}C$ was successfully grown on and poly-Si films had (111) preferred orientation. As substrate temperature increases, Si(111)/Si(220) ratio was decreased. The electrical properties of poly-Si film were investigated by Hall effect measurement. Poly-Si film was p-type by Al and resistivity and hall effect mobility was affected by substrate temperature.

• Corrosion Science and Technology
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• 제3권2호
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• pp.54-58
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• 2004

Effects of texture on the electrochemical behaviors of single grains in polycrystalline zinc were investigated using a capillary-based micro-droplet cell. Pontiodynamic sweeps and capacity measurements were carried out in pH 9 borate buffer solution. The cyclic voltammograms and the capacity measurements on single grains with different crystallographic orientations in polycrystalline Zn showed a strong dependence of oxide growth on crystallographic grain orientation. The total charge consumed for oxide formation and the inverse capacity increased with an increase of surface packing density of grain. suggesting the oxide formation was greater on grains with higher surface packing density.