• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.515-520
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• 2005

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

• 한국통신학회논문지
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• 제33권1C호
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• pp.94-101
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• 2008

본 논문에서는 실시간으로 빛의 편광상태(SOP)를 파악할 수 있는 장치를 소개한다. 소개하는 장치는 광파를 수평 선형편광과 수직 선형편광 성분으로 분리하고, 각각을 기준 광원의 수평 선형편광 및 수직 선형편광 성분들과 중첩시키고 이로부터 발생한 비트신호들을 시간 영역에서 측정하여 비교함으로써 광파의 SOP를 파악해 내는 순방향(feed-forward) 측정 시스템으로서 귀환(feedback) 방식을 이용하는 기존의 방식들에 비해 SOP 측정시간을 실시간으로 단축시키는 장점을 갖고 있다. 본 논문에서는 또한 SOP 측정 과정에서 수반될 수 있는 광소자의 복굴절 변화에 의한 측정 오차를 매우 간편하고 정확하게 제거할 수 있는 새로운 오차 보정 방식을 소개한다. 제안하는 시스템의 동작과 성능을 모의실험 및 광학 실험을 통해 입증하였다.

• 대한전자공학회논문지SD
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• 제38권3호
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• pp.166-173
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• 2001

PLZT(10/30/70), PLT(10) 및 PZT(30/70) 와 같은 강유전체 박막의 이력곡선을 field-dependent polarization 모델을 이용하여 시뮬레이션하고, 측정한 실험적 결과와 비교, 분석하였다. PZT(30/70) 박막의 경우, 5V 이상의 인가전압에서 분극의 포화현상이 둔감하게 나타나고 시뮬레이션 값과의 차이도 심해 강유전체 분극이 순수한 dipole 외에도 다양한 전하의 영향을 받아 형성된다는 사실을 알 수 있다. 또, quasi-MFISFET 소자의 드레인 전류는 field-dependent polarization 모델의 강유전체 이력곡선에서 얻은 파라미터를 square-law FET 모델에 적용시켜 효과적으로 추출하였고, 모델링 결과는 실험값과 유사하였다. 그리고, quasi-MFISFET 소자의 gate 에 -10V의 'write' 전압을 인가한 상태에서 PZT(30/70) 박막을 사용한 경우, PLZT(10/30/70), PLT(10) 박막 보다 빨리 채널이 형성되었는데, 그 원인은 강유전체 박막에 따른 retention 특성에서 PZT(30/70) 박막의 분극 감소가 PLZT(10/30/70), PLT(10) 박막의 분극 감소 보다 약 3∼4 배 이상 크다는 점에서 찾을 수 있다.

• 한국전자파학회논문지
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• 제15권12호
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• pp.1178-1183
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• 2004

본 논문에서는 정사각형 패치 안테나에 핀 다이오드(PIN diode)를 사용하여 편파변환 특성을 갖는 새로운 형태의 안테나를 제안하였다. 제안된 안테나는 정사각형 패치면 위에 한 쌍의 스퍼라인(spur-line)과 스퍼라인 위에 핀 다이오드를 삽입한 구조이다. 스퍼라인은 핀 다이오드의 on/off특성에 의해 I형 슬롯라인(slot-line)과 L형 스퍼라인의 형태로 변환되어 편파 변환 특성을 나타내었다. 안테나의 측정 결과 선형편파로 동작할 때에는 -15 dB 이상의 낮은 교차 편파 특성을 나타내었고, 원형편파로 동작할 때에는 0.83 dB의 좋은 축비 특성을 나타내었다. 안테나의 -10 dB대역폭은 on/off상태에 따라 각각 $2.1\%$와 $4.1\%$의 특성을 나타내었다. 또한, 원형편파로 동작하는 안테나의 축비 대역폭은 $3.5\%$의 비교적 넓은 대역폭의 특성을 나타내었다. 따라서 제안된 안테나는 동일한 대역폭 안에서 편파 변환 특성을 나타낼 수 있기 때문에 단일 안테나를 이용하여 주파수를 재사용하는 시스템에서 사용할 수 있다.

• 전자공학회논문지A
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• 제33A권7호
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• pp.1-14
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• 1996

Effects of the external optical feedback on the optical transmission characteristics were evaluated for 3 kinds of commercialized DFB-LD modules for 2.5Gbps optical communication systems. As a result, intensity noise induced by external optical feedback via generating the external cavity modes deteriorated the transmission performances of sthe DFB-LD modules as much as 1.5dB, 1.2dB, and 1.0dB for the maximum feedback ratio of -8.8dB which corresponds to the worst reflection along the fiber transmission line. Additional penalty of 0.5dB was occurrred when state of polarization of feedback light was adjusted. From the experiments evaluating the isolation ratio of the single polarization optical isolator, decrease of the polarization dependent isolation ratio as much as 10dB from that of specification and the effective isolation ratio as much as 20dB from that of specification was mjor cause of high sensitivity of DFB-LD modules to external feedback. It was suggested that polarization independent optical isolator or single polarization optical isolator with isolation ratio specification of more than 40dB is required for 2.5Gbps DFB-LD modules with complete suppression of external feedback effects.

• Current Optics and Photonics
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• 제5권4호
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• pp.351-361
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• 2021

Speckle imaging is capable of dynamic data acquisition at high spatiotemporal resolution, and has played a vital role in the functional study of biological specimens. The presence of various optical scatterers within the tissue causes alteration of speckle contrast. Thus structures like blood vessels can be delineated and quantified. Although laser speckle imaging is frequently used, an optimization process to ensure the maximum speckle contrast has not been available. In this respect, we here report an experimental procedure to optimize speckle contrast via applying different combinations of varying polarization of the illuminating laser light and multiple analyzer angles. Specifically, samples were illuminated by the p-polarization, 45°-polarization, and s-polarization of the incident laser, and speckle images were recorded without and with the analyzer rotated from 0° to 180° (Δ = 30°). Following the baseline imaging of a solid diffuser and a fixed brain sample, laser speckle contrast imaging (LSCI) was successfully performed to visualize in vivo mouse-brain blood flow. For oblique laser illumination, the maximum contrast achieved with p-polarized and s-polarized light was perpendicular to the analyzer's axis. This study demonstrates the optimization process for maximizing the speckle contrast, which can improve blood-flow estimation in vivo.

• International Journal of Computer Science & Network Security
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• 제22권8호
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• pp.87-96
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• 2022

This paper employs a computer-aided text analysis (CATA) and a Critical Discourse Analysis (CDA) to explore the strategies of recruitment and intellectual polarization in ISIS (Islamic State in Iraq and Syria) media. The paper's main objective is to shed light on the efficacy of employing computer software in the linguistic analysis of texts, and the extent to which CATA software contribute to deciphering hidden meanings of texts as well as to arrive at concise and authentic results from these texts. More specifically, this paper attempts to demonstrate the contribution of CATA software represented in the two variables of Frequency Distribution Analysis (FDA) and Content Analysis (CA) in decoding the strategies of recruitment and intellectual polarization in one of ISIS 's digital publication: Rumiyah (a digital magazine published by ISIS). The analytical focus is on three strategies of recruitment and intellectual polarization: (i) lexicalization, (ii) intertextual religionisation, and (iii) justification. Two main findings are revealed in this study. First, the application of CATA software into the linguistic investigation of texts contributes effectively to the understanding of the thematic and ideological messages pertaining to the analyzed text. Second, the computational analysis guarantees concise, credible, authentic and ample results than is the case if the analysis is conducted without the work of computer software. The paper, therefore, recommends the integration of CATA software into the linguistic analysis of the various types of texts.

• Current Optics and Photonics
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• 제8권4호
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• pp.416-420
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• 2024

A high-power Yb:YAG thin-disc laser with radial or azimuthal polarization incorporating an intracavity S-waveplate is reported. Depending on the rotational angle of the S-waveplate placed in the cavity, a Yb:YAG thin-disc laser yields 10.8 W and 10.2 W of continuous-wave outputs with radial and azimuthal polarization for an incident pump power of 131 W, corresponding to slope efficiencies of 22.9% and 23.7%, respectively. The output characteristics for each polarization state were investigated in detail by analyzing the insertion loss and the mode overlap efficiency due to the S-waveplate. Further prospects for power scaling will be discussed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1278-1280
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• 1995

A probe type fiber-optic sensing techique for electric current measurement is applied in this paper. The technique is based on the Faraday effect which meaning is that polarization state of light is rotated by magnetic field. In experiment, test wire is located at inside and outside of the probe to be measured. The experimental results prove not only linear property, but also polarization rotation property according to the distance from outside of probe.

• 자연과학논문집
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• 제17권1호
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• pp.31-37
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• 2006

We have found that the polarization mode coupling between the orthogonally linearly polarized dual mode laser results from the anisotropy of dipole moments. Rate equation analysis demonstrated that high anisotropy in dipole moment components can give rise to law intrinsic mode coupling constants while isotropic dipole moment components give high intrinsic mode coupling constant. The populations at active ion sites are shown to self-organize the populations such that laser mode gain is constant adove threshold while the gain contributions from the each site adjust themselves with pump power.