• Title/Summary/Keyword: plating process

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High Speed Cu Filling Into TSV by Pulsed Current for 3 Dimensional Chip Stacking (3차원 실장용 TSV의 펄스전류 파형을 이용한 고속 Cu도금 충전)

  • Kim, In Rak;Park, Jun Kyu;Chu, Yong Cheol;Jung, Jae Pil
    • Korean Journal of Metals and Materials
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    • v.48 no.7
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    • pp.667-673
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    • 2010
  • Copper filling into TSV (through-silicon-via) and reduction of the filling time for the three dimensional chip stacking were investigated in this study. A Si wafer with straight vias - $30\;{\mu}m$ in diameter and $60\;{\mu}m$ in depth with $200\;{\mu}m$ pitch - where the vias were drilled by DRIE (Deep Reactive Ion Etching) process, was prepared as a substrate. $SiO_2$, Ti and Au layers were coated as functional layers on the via wall. In order to reduce the time required complete the Cu filling into the TSV, the PPR (periodic pulse reverse) wave current was applied to the cathode of a Si chip during electroplating, and the PR (pulse-reverse) wave current was also applied for a comparison. The experimental results showed 100% filling rate into the TSV in one hour was achieved by the PPR electroplating process. At the interface between the Cu filling and Ti/ Au functional layers, no defect, such as a void, was found. Meanwhile, the electroplating by the PR current showed maximum 43% filling ratio into the TSV in an hour. The applied PPR wave form was confirmed to be effective to fill the TSV in a short time.

Commercialization of Ion Exchange Fiber System for Recovering Valuable Metals in Plating Wastewater (도금 폐수 중 유가 금속 회수를 위한 이온교환섬유의 상용화기술)

  • You, Seong-sik
    • Korean Chemical Engineering Research
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    • v.55 no.4
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    • pp.535-541
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    • 2017
  • On the basis of 200 ppm of Ag and 120 l/h of feed flow rate, we built a pilot plant of an ion exchange fiber system having an double tube type ion exchange chamber with strong base ion exchange fiber (FIVAN A-6) which was designed to replace fibers easily and to eliminate the need for a fixture. The following results were obtained for the double tube type of ion exchange fiber system with an ion exchange capacity of 4.6 meq/g for Ag. The adsorption process was operated in the range of 40~90 l/h after confirming the effect of the flow rate and, pH did not affect formation of complex ion of Ag in the range of pH 7~12. In the case of backwash process, the recovery rate of Ag was tested in the range of 60~120 l/h and comparative experiments were carried out using NaOH, $NH_4Cl$, and NaCl as the chemicals for backwash. Although the desorption time was shortened at higher concentration, the desorption efficiency per mol was lowered. Therefore, it was confirmed that the desorption time and the concentration should be well balanced to operate economically. The desorption pattern of the backwash process is slower than the adsorption process and takes a lot of time. The results showed that the Ag adsorption ratio was 99.5% or more and the Ag recovery ratio was 96% or more, and commercialization was possible.

Fabrication and Characterization of CNFs/Magnesium Composites Prepared by Liquid Pressing Process (액상가압공정을 이용한 CNF/Mg 복합재료의 제조 및 특성평가)

  • Kim, Hee-Bong;Lee, Sang-Bok;Yi, Jin-Woo;Lee, Sang-Kwan;Kim, Yang-Do
    • Composites Research
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    • v.25 no.4
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    • pp.93-97
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    • 2012
  • Carbon nano fibers (CNFs) reinforced magnesium alloy (AZ91) matrix composites have been fabricated by liquid pressing process. In order to improve the dispersibility of CNFs and the wettability with magnesium alloy melt, CNFs were mixed with submicron sized SiC particles ($SiC_p$). Also, the mixture of CNFs and $SiC_p$ were coated with Ni by electroless plating. In liquid pressing process, AZ91 melts have been pressed hydrostatically and infiltrated into three reinforcement preforms of only CNFs, the mixture of CNFs and $SiC_p$ (CNF+$SiC_p$), and Ni coated CNFs and $SiC_p$ ((CNF+$SiC_p$)/Ni). Some CNFs agglomerates were observed in only CNFs reinforced composite. In cases of the composites reinforce with CNF+$SiC_p$ and (CNF+$SiC_p$)/Ni, CNFs were dispersed homogeneously in the matrix, which resulted in the improvement of mechanical properties. The compressive strengths of CNF+$SiC_p$ and (CNF+$SiC_p$)/Ni reinforced composites were 38% and 28% higher than that of only CNFs composite.

Produce of High Purity Tin from Spent Solder by Electro Refining (폐 솔더 잉곳으로부터 전해정련에 의한 고순도 주석 생산)

  • Lee, Ki-Woong;Kim, Hong-In;Ahn, Hyo-Jin;Ahn, Jae-Woo;Son, Seong-Ho
    • Resources Recycling
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    • v.24 no.2
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    • pp.62-68
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    • 2015
  • The high pure tin production was conducted from crude-tin containing waste solder by electro-refining process. The electro-refining process maintained at 0.2V produced tin with purity of 99.98%, whereas a little increase of voltage to 0.3 V resulted tin purity of 99.92%. The high pure tin of 3N in the present process was produced by fixing the voltage at 0.3V. Considering the high pure tin production, the current density was maintained within $100-120A/m^2$ with current efficiency of 94%. Addition of sulfuric acid of 20 ~ 25 g/L to the electrolyte solution was performed in order to keep Pb (lead) concentration below 100 mg/L in the final tin product. The anode slime generated during electro refining process was analyzed by X-ray diffraction (XRD) study to understand the phases of impurities in it. It detected the presence of Cu and Ag in the slime as in the form of $Cu_6Sn_5$, $Ag_3Sn$, whereas Pb occurred as $PbSO_4$ compound.

Peel strengths of the Composite Structure of Metal and Metal Oxide Laminate (Metal과 Metal Oxidefh 구성된 복합구조의 Peel Strength)

  • Shin, Hyeong-Won;Jung, Taek-Kyun;Lee, Hyo-Soo;Jung, Seung-Boo
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.4
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    • pp.13-16
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    • 2013
  • A lot of various researches have been going on to use heat spreader for LED module. Nano porous aluminum anodic oxide (AAO) applied LED, which is produced from anodization, is easy and economically advantageous. Convensional LED module is consist of aluminum/adhesive/copper circuit. The polymer adhesive in this module is used as heat spreader. However the thermal emission of LED component is degraded because of low heat conductivity of polymer and also reliability of LED component is reduced. Therefore, AAO in this work was applied to heat spreader of LED module which has higher heat conductivity compare to polymer. Bonding strength between AAO and copper circuit was improved with Ti/Cu seed layer by copper sputtering process (DBC) before the bonding. And this copper circuit has been fabricated by electro plating method. Peel strength of AAO and copper circuit in this work showed range between 1.18~1.45 kgf/cm with anodizing process which is very suitable for high power LED application.

Dispersion Characteristics of Magnetic Particle/Graphene Hybrid Based on Dispersant and Electromagnetic Interference Shielding Characteristics of Composites (분산제에 따른 자성금속 무전해도금 기반 그래핀 분산 특성 및 복합재의 전자파 차폐 특성 연구)

  • Lee, Kyunbae;Lee, Junsik;Jung, Byung Mun;Lee, Sang Bok;Kim, Taehoon
    • Composites Research
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    • v.31 no.3
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    • pp.111-116
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    • 2018
  • In this paper, magnetic FeCoNi particles have been grown through electroless plating on the surface of graphene, and then this hybrid material has been dispersed by various surfactants to prepare films. The pyridine surfactant shows the highest dispersability and low surface resistance value (351 Ohm/sq) and the electromagnetic shielding ability at the frequency of 10 GHz. Specially, the evaporation of the pyridine during the drying process could be able to form the internal conductive network and high dispersion of FeCoNi on the surface of graphene.

Development of Single-Frame PIV Velocity Field Measurement Technique Using a High Resolution CCD Camera (고해상도 CCD카메라를 이용한 Single-Frame PIV 속도장 측정기법 개발)

  • Lee, Sang-Joon;Shin, Dae-Sig
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.1
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    • pp.21-28
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    • 2000
  • Although commercial PIV systems have been widely used for the non-intrusive velocity field measurement of fluid flows, they are still under development and have considerable room for improvement. In this study, a single-frame double-exposure PIV system using a high-resolution CCD camera was developed. A pulsed Nd:Yag laser and high-resolution CCD camera were synchronized by a home-made control circuit. In order to resolve the directional ambiguity problem encountered in the single-frame PIV technique, the second particle image was genuinely shifted in the CCD sensor array during the time interval dt. The velocity vector field was determined by calculating the displacement vector at each interrogation window using cross-correlation with 50% overlapping. In order to check the effect of spatial resolution of CCD camera on the accuracy of PIV velocity field measurement, the developed PIV system with three different resolution modes of the CCD camera (512 ${\times}$ 512, lK ${\times}$ IK, 2K ${\times}$ 2K) was applied to a turbulent flow which simulate the Zn plating process of a steel strip. The experimental model consists of a snout and a moving belt. Aluminum flakes about $1{\mu}m$ diameter were used as scattering particles for the liquid flow in the zinc pot and the gas flow above the zinc surface was seeded with atomized olive oil with an average diameter of 1-$3{\mu}m$. Velocity field measurements were carried out at the strip speed $V_s$=1.0 m/s. The 2K ${\times}$ 2K high-resolution PIV technique was significantly superior compared to the smaller pixel resolution PIV system. For the cases of 512 ${\times}$ 512 and 1K ${\times}$ 1K pixel resolution PIV system, it was difficult to get accurate flow structure of viscous flow near the wall and small vortex structure in the region of large velocity gradient.

Mask Patterning for Two-Step Metallization Processes of a Solar Cell and Its Impact on Solar Cell Efficiency (태양전지 2 단계 전극형성 공정을 위한 마스크 패턴공정 및 효율에 대한 영향성 연구)

  • Lee, Chang-Joon;Shin, Dong-Youn
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.11
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    • pp.1135-1140
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    • 2012
  • Two-step metallization processes have been proposed to achieve high-efficiency silicon solar cells, where the front-side grids are formed by silver plating after the formation of a nickel seed layer with a mask. Because the conventional mask patterning process is performed by an expensive selective printing method using either UV resist or phase change ink, however, the combination of a simple coating and laser-selective ablation processes is proposed in this study as an alternative means. As a masking material, the solar cell wafer was coated with either inexpensive wax having a low melting temperature or a fluorocarbon solution, and then, an electrode image was patterned by selectively removing the masking material using the laser. It was found that the fluorocarbon coating was not only superior to the wax coating in terms of pattern uniformity but it also increased the efficiency of the solar cell by 0.16%, as confirmed by statistical f and t tests.

Accuracy and Precision of Microwave Oven Digestion/Atomic Absorption Spectrophotometry for Analyzing Airborne Chromium Collected on MCE Filter in Plating Operation (도금공정 크롬시료 분석을 위한 Microwave Oven Digestion/Atomic Absorption Spectrophotometry 방법의 정확도 및 정밀도 평가)

  • Lee, Byung-Kyu;Lee, Ji-Tae;Shin, Yong-Chul
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.11 no.1
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    • pp.48-55
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    • 2001
  • The purpose of this study was to evaluate the analytical accuracy and precision of microwave oven digestion/atomi absorption spectrophotometry (AAS) for analyzing airborne chromium collected on mixed cellulose ester membrane (M filter from the work environment, and to compare the accuracy and the precision with those of the National Institute for Occupational Safety and Health (NIOSH) Method #7024 hot plate digestion/AAS method. For this study, field air sample pairs were collected from a electroplating process, and spiked samples in a laboratory were prepared and using these samples. Two digestion methods were comp; and evaluated in terms of recovery rate and bias as indices of accuracy and coefficient of variation as a index of precision. The results and conclusions are as follows. In spiked samples, the accuracies (% mean recoveries) of hot plate/AAS and microwave oven/AAS method were 97.19%, 97.1%, respectively, and the precisions (pooled respectively, and the precisions (pooled coefficient of variance, $CV_{pooled}$) 6.93% and 3.88%, respectively. The biases of hot plate ani microwave oven methods were 4.56 - 14.7% and 2.22 - 7.42% respectively. There was no statistically significant difference between hot plate and microwave oven methods recovery rates of spiked samples (p>0,05). Also, no statistically significant difference was shown among the concentrations of air samples determined by two method (p>0.05). In conclusion, microwave oven/AAS method h excellent accuracy and precision, and advantages such as time-saving and simple procedure in comparison with the classical NIOSH method. Therefore, this method can be use widely to analyze airborne chromium collected on MCE filter from the work environments.

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Corrosion Analysis of Materials by High Temperature and Zn Fume (고온 및 Zn Fume에 의한 소재들의 부식성 분석)

  • Baek, Min Sook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.5
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    • pp.551-556
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    • 2018
  • The material normally used in hot dip galvanizing facilities is SM45C (carbon steel for mechanical structure, KS standard), mainly because of its price. During this process, the oxidation of the plating facility occurs due to the heat of the Zn fumes coming from the molten zinc. Since the cycle time of the current facilities is 6 months, much time and money are wasted. In this study, the corrosive properties of various materials (Inconel625, STS304, SM45C) were investigated by oxidation in a high temperature and Zn fumes environment. The possibility of applying the hot-dip galvanizing equipment was investigated for each material. The Zn fumes were generated by directly bubbling Ar gas into Zn molten metal in a 650 degree furnace. High-temperature, Zn fumes corrosion was conducted for 30 days. The sample was removed after 30 days and the oxidation of the surface was confirmed with EDS and SEM, and the corrosion properties were examined using potentiodynamic polarization tests.