• Title/Summary/Keyword: plasma zinc

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Influence of in-situ remote plasma treatment on characteristics of amorphous indium gallium zinc oxide thin film-based transistors

  • Gang, Tae-Seong;Gu, Ja-Hyeon;Hong, Jin-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.257-257
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    • 2011
  • The amorphous indium-gallium-zinc-oxide (a-IGZO) materials for use in high performance display research fields are strongly investigated due to its good performance, such as high mobility and better transparency. However, the stability of a-IGZO materials is increasingly becoming one of critical issues due to the sub-gap electron trap sites induced by rough interfaces during deposition processing. It is well-known that the threshold voltage shift is related to interface roughness and oxygen vacancy formed by breaking weak chemical bonds. Here, we report the better properties of transparent oxide transistors by reducing the threshold voltage shift with an external rf plasma supported magnetron sputtering system. Mainly, our sputtering method causes the surface of sample to be sleek, so that it prevents the formation of various defects, such as shallow electron trap sites in the interface. External rf power was applied from 0 to 50W during RF sputtering process to enhance the stability of our oxide transistor without having a large voltage shift. To observe the effects of external rf-plasma source on the properties of our devices, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM) are carried out to observe surface roughness and morphology of sputtered thin film. In addition, typical electrical properties, such as I-V characteristics are analyzed.

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Atmospheric Pressure Plasma를 이용한 Oxide Thin Film Transistor의 특성 개선 연구

  • Mun, Mu-Gyeom;Kim, Ga-Yeong;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.582-582
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    • 2013
  • Oxide TFT (thin film transistor) active channel layer에 대한 저온 열처리 공정은 투명하고 flexibility을 기반으로하는 display 산업과 AMOLED (active matrix organic light emitting diode) 분야 등 다양한 분야에서 필요로 하는 기술로서 많은 연구가 이루어지고 있다. 과거 active layer는 ALD (atomic layer deposition), CVD (chemical vapor deposition), pulse laser deposition, radio frequency-dc (RF-dc) magnetron sputtering 등과 같은 고가의 진공 장비를 이용하여 증착 되어져 왔으나 현재에는 진공 장비 없이 spin-coating 후 열처리 하는 저가의 공정이 주로 연구되어 지고 있다. Flexible 기판들은 일반적인 OTFT (oxide thin films Transistor)에 적용되는 열처리 온도로 공정 진행시 열에 의한 기판의 손상이 발생한다. Flexible substrate의 열에 의한 기판 손상을 막기 위해 저온 열처리 공정이 연구되고 있지만 기존 열처리와 비교하여 소자의 특성 저하가 동반 되었다. 본 연구에서는 Si 기판위에 SiO2 (100)를 절연층으로 증착하고 그 위에 IZO (indium zinc oxide) solution을 spin-coating 한뒤 $250^{\circ}C$ 이하의 온도에서 열처리하였다. 저온 공정으로 인하여 소자의 특성 저하가 동반 되었으므로 소자의 저하된 특성 복원하고자 post-treatment로 고가의 진공장비가 필요 없고 roll-to roll system 적용이 수월한 remote-type의 APP (atmospheric pressure plasma) 처리를 하였다. Post-treatment로 APP를 이용하여 $250^{\circ}C$ 이하에서 소자에 적용 가능한 on/off ratio를 얻을 수 있었다.

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Performance of Al-Zn Coating by Arc Thermal and Plasma arc Thermal Spray Processes in 3.5% NaCl Solution (3.5% NaCl에서 Arc Thermal and Plasma Arc Spray 공법이 적용된 Al- Zn 코팅 강재의 내 식 성능 평가에 관한 연구)

  • Jannat, Adnin Raihana;Lee, Han-Seung
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2021.11a
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    • pp.17-18
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    • 2021
  • In the present study, Al-Zn coating was deposited by Arc thermal (AT) and plasma arc thermal (PAT) spray processes, and their corrosion characteristics were studied in 3.5% NaCl through electrochemical impedance spectroscopy (EIS), scanning electron microscope (SEM) and mechanical tests. The bond adhesion result showed that plasma arc sprayed coating had a higher value attributed to compact, dense, and less porous coating compared to arc thermal spray coating which contains defects/pores and uneven morphology as revealed by scanning electron microscope analysis. Electrochemical results revealed that the plasma arc sprayed coating had a high polarization resistance at early stage of immersion, suggesting its excellent corrosion protection performance.

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Effects of Indomethacin on the Production of Cytokines in Mice Exposed to Excessive Zinc (과량의 아연에 노출된 생쥐의 사이토카인 생산에 미치는 인도메타신의 영향)

  • 채병숙;신태용
    • YAKHAK HOEJI
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    • v.46 no.4
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    • pp.258-264
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    • 2002
  • Zinc plays an important role in immunobiological responses, while excessive zinc attenuates immune functions in a dose-dependent manner. Zinc excess has been reported to increase levels of plasma prostaglandin E$_2$ (PGE$_2$), which is known to inhibit production of Th (helper T) 1-associated cytokines and to induce inflammatory responses. Thus, this study was investigated the effects of indomethacin, a potent inhibitor of PGE$_2$ synthesis, on the proinflammatory cytokine and lymphokine production in ICR mice exposed to excessive zinc. Indomethacin at doses of 5 mg/kg was administered i.p. 30 minutes before zinc chloride (Zn) 30 mg/kg orally daily for 10 days. Excessive Zn remarkedly increased tumor necrosis factor (TNF)-$\alpha$ and interleukin (IL)-1$\beta$ levels in both serum and splenic supernatants compared with those in controls, while indomethacin significantly reduced the excessive Zn-induced levels of IL-1$\beta$. In serum, excessive Zn significantly decreased the levels of IL-2 and interferon (IFN)-${\gamma}$ compared with those in controls, whereas indomethacin significantly enhanced the excessive Zn-decreased levels of IFN-${\gamma}$ but did not affect the Zn-decreased levels of serum IL-2. In splenic supernatants, All of excessive Zn, indomethacin, and combination of Zn and indomethacin significantly enhanced IL-2 levels compared with those in controls, but indomethacin didn't affect the Zn-induced production of IL-2. These data, therefore, suggest that indomethacin significantly attenuated the in vivo and ex vivo IL-1$\beta$ production increased by excessive zinc and remarkedly enhanced the in vivo excessive zinc-suppressed production of IFN-${\gamma}$ but not IL-2.

Composite of Indium and Polysorbate 20 as Inhibitor for Zinc Corrosion in Alkaline Solution

  • Li, Xiaoping;Liang, Man;Zhou, Hebing;Huang, Qiming;Lv, Dongsheng;Li, Weishan
    • Bulletin of the Korean Chemical Society
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    • v.33 no.5
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    • pp.1566-1570
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    • 2012
  • The combined use of indium and polysorbate 20 (Tween 20) was considered as a new inhibition technique for zinc corrosion. Zn and Zn-In alloy coatings were prepared by electrodeposition and their morphology and composition were characterized by scanning electron microscopy (SEM) and inductively coupled plasma atomic emission spectrometry (ICP-AES). The corrosion inhibition effect of indium and Tween 20 on zinc was investigated by polarization curves and electrochemical impedance spectroscopy (EIS). The corrosion inhibition efficiencies obtained from Tafel and EIS analyses are well in agreement. Zinc corrosion can be inhibited to some extent by the individual use of indium and Tween 20 and higher corrosion inhibition efficiency can be obtained by the combined use of indium and Tween 20.

A study on dielectric characteristic of phosphate glass-ceramic for AC-PDP (AC-PDP용 인산염 결정화 유리의 유전적 특성에 관한 연구)

  • Kim, Joon-Hyung;Yon, Seog-Joo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.3
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    • pp.102-107
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    • 2007
  • Dielectric layer of phosphate glass for plasma display panel (PDP) device made by silk screen printing on soda-lime glass. For regulate thermal expansion coefficient (CTE) of between substrate glass and dielectric layer use addition of $Al_2O_3$ and $TiO_2$. The crystallization process of glass-ceramics for dielectric layer have been examined by DTA, XRD some of optical, electrical properties of the dielectric layer were evaluated by UV-spectrometer, dilatometer, impedance analyser. The principal crystalline phase was identified as zinc metaphosphate [$Zn(PO_3)_2$] and zinc pyrophosphate [$Zn_2P_2O_7$]. Reflectance and dielectric constance increased with the addition of $TiO_2$ filler, dielectric constant lower the out side reflectance unchanging of the adding of $Al_2O_3$ filler. Besides CTE was at about $62{\times}10^{-7}/^{\circ}C$.

The effect of plasma damage on electrical properties of amorphous GaInZnO film

  • Kim, Min-Kyu;Park, Jin-Seong;Jeong, Jae-Kyeong;Jeong, Jong-Han;Ahn, Tae-Kyung;Yang, Hui-Won;Lee, Hun-Jung;Chung, Hyun-Joong;Mo, Yeon-Gon;Kim, Hye-Dong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.640-643
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    • 2007
  • The effect of plasma damage was investigated on amorphous gallium-indium-zinc oxide (a-GIZO) films and transistors. Ion-bombardment by plasma process affects to turn semiconductor to conductor materials and plasma radiation may degrade to transistor electrical properties. All damages are easily recovered with a $350^{\circ}C$ thermal annealing.

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The Effect of Atmospheric Plasma Parameters on Cleansing the Electronic-Industrial Parts (상압 플라즈마 매개변수들이 산업용 전자부품의 세척공정(cleansing)에 미치는 효과)

  • Ri, Eui-Jae
    • Journal of the Korean institute of surface engineering
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    • v.42 no.5
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    • pp.208-215
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    • 2009
  • We employed atmospheric plasma to reactively remove the lubricant sprayed onto such industrial electronic parts as LCD chassis during sheet-metal forming processes and investigated basically the effect of plasma parameters on cleansing the surfaces of zinc-electroplated steel plates (EGI). Specimen prepared with some controlled amount of lubricant sprayed on their surfaces beforehand were subjected to two different kinds of atmospheric plasma, one being generated by using air and the other generated by using nitrogen (99.9% purity). Locating the plasma beams at the height range between 3.5 and 13.5 mm from the surface of each specimen and radiating for 5 to 30 seconds resulted out that the cases with a position of 3.5 mm and a duration of 5 seconds or longer showed the surfaces completely cleansed without a trace of lubricant. Furthermore we found out that the plasma generated by using simple air depicted higher cleansing ability than the other one generated by using expensive nitrogen, interestingly useful very much for industrial purposes. On another aspect, we confirmed that the drilled or cut surfaces of Zn-plated steel substrate would not be oxidized even under the influence of plasma during its cleansing process. Therefore, we could probably conclude from this fore-survey that a dry process adopting atmospheric plasma for cleansing industrial parts might be determined to become successful in terms of commercialization, cautiously.

Dietary Copper Intake and Effect of Zinc Supplementation on Plasma Copper Level in Korean Adults (한국성인의 구리 섭취 및 아연 보충에 의한 혈장구리 농도 변화)

  • 천종희
    • Journal of Nutrition and Health
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    • v.29 no.5
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    • pp.528-532
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    • 1996
  • The purpose of this study was to analyse copper intake and effect ofZn(30mg ZnSO4/d) supplementation on plasma copper level of Korean adults. Daily Cu intakes were studied in ninety subjects aging 20-20 years. Among them twenty four subjects participated in 6 weeks Zn supplementation study. The men consumed 1.47($\pm$0.64)mg of Cu and the women consumed 0.98($\pm$0.43)mg of Cu daily. the most abundant sources of Cu was meat, fish, egg and soybean group, the second was cereal and grain group and the third was vegetable group. These three groups supplied about 90% of copper in the subjects. The plasma copper level of the subjects was not changed much until two weeks of Zn supplementation. However, after two weeks of Zn supplementation plasma copper level was reduced continuously during the experiment. There was no significant difference in plasma Cu level between control and supplement group of the men, while the supplemented women showed significantly lower plasma Cu level than control group at week 4(p<0.01) and week 6(p<0.05). Although plasma Cu level of the subjects was slightly changed, its concentration in plasma was still in normal range in all groups and no one showed clinical Cu deficiency. Therefore the Zn supplementation of RDA level doesn't seem to cause any adverse effect on Cu status.

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Determination of Iron, Copper, and Zinc in Rainwater by Ion Chromatography (이온 크로마토그래피법에 의한 강수 중 철, 구리, 아연의 정량)

  • 이용근;이계형;이동수
    • Journal of Korean Society for Atmospheric Environment
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    • v.7 no.2
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    • pp.137-142
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    • 1991
  • A method is developed for the simultaneous determination of dissolved iron, copper, and zinc in rainwater. The method involves 25-fold evaporative concentration, ion chromatographic separation and subsequent spectrophotometric detection after post-column reaction with 4-(2-pyridylazo) resorcinol. Analytical sensitivities, being defined by the slopes of calibration curves, are 0.93, 0.54, and 0.11 Abs/ $\mu$g/ml for iron, copper, zinc, respectively. Detection limits render around a few tenth of one ng/ml. Precisions evaluated by replicate analysis of real sample are better than 10% RSD. Due to the lack of certified standards for rainwater, the accuracy of the method could not be assessed directly. However, the results of this method agree well with those by inductively coupled plasma mass spectrometry. Analytical results for a suite of Seoul rainwaters are presented herein.

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