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상압 플라즈마 매개변수들이 산업용 전자부품의 세척공정(cleansing)에 미치는 효과

The Effect of Atmospheric Plasma Parameters on Cleansing the Electronic-Industrial Parts

  • 리의재 ((주)동원 이엠 환경기술 연구실)
  • Ri, Eui-Jae (Enviro-Technical Lab, DongWon EM Co., Ltd.)
  • 발행 : 2009.10.31

초록

We employed atmospheric plasma to reactively remove the lubricant sprayed onto such industrial electronic parts as LCD chassis during sheet-metal forming processes and investigated basically the effect of plasma parameters on cleansing the surfaces of zinc-electroplated steel plates (EGI). Specimen prepared with some controlled amount of lubricant sprayed on their surfaces beforehand were subjected to two different kinds of atmospheric plasma, one being generated by using air and the other generated by using nitrogen (99.9% purity). Locating the plasma beams at the height range between 3.5 and 13.5 mm from the surface of each specimen and radiating for 5 to 30 seconds resulted out that the cases with a position of 3.5 mm and a duration of 5 seconds or longer showed the surfaces completely cleansed without a trace of lubricant. Furthermore we found out that the plasma generated by using simple air depicted higher cleansing ability than the other one generated by using expensive nitrogen, interestingly useful very much for industrial purposes. On another aspect, we confirmed that the drilled or cut surfaces of Zn-plated steel substrate would not be oxidized even under the influence of plasma during its cleansing process. Therefore, we could probably conclude from this fore-survey that a dry process adopting atmospheric plasma for cleansing industrial parts might be determined to become successful in terms of commercialization, cautiously.

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참고문헌

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피인용 문헌

  1. Global Modeling of Atmospheric Pressure Oxygen Plasmas vol.20, pp.4, 2011, https://doi.org/10.5757/JKVS.2011.20.4.258