• Title/Summary/Keyword: plasma treatments

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The effect of plamsa treatment on superconformal copper gap-fill

  • Mun, Hak-Gi;Kim, Seon-Il;Park, Yeong-Rok;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.249-249
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    • 2010
  • The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

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Effect of atmospheric plasma versus conventional surface treatments on the adhesion capability between self-adhesive resin cement and titanium surface

  • Seker, Emre;Kilicarslan, Mehmet Ali;Deniz, Sule Tugba;Mumcu, Emre;Ozkan, Pelin
    • The Journal of Advanced Prosthodontics
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    • v.7 no.3
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    • pp.249-256
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    • 2015
  • PURPOSE. The aim of this study was to evaluate the effects of atmospheric plasma (APL) versus conventional surface treatments on the adhesion of self-adhesive resin cement to Ti-6Al-4V alloy. MATERIALS AND METHODS. Sixty plates of machined titanium (Ti) discs were divided into five groups (n=12): 1) Untreated (CNT); 2) Sandblasted (SAB); 3) Tribochemically treated (ROC); 4) Tungsten CarbideBur (TCB); 5) APL treated (APL). SEM analysis and surface roughness (Ra) measurements were performed. Self-adhesive resin cement was bonded to the Ti surfaces and shear bond strength (SBS) tests, Ra and failure mode examinations were carried out. Data were analyzed by one-way analysis of variance and chi-squared test. RESULTS. The lowest SBS value was obtained with CNT and was significantly different from all other groups except for APL. The ROC showed the highest SBS and Ra values of all the groups. CONCLUSION. It was concluded that the effect of APL on SBS and Ra was not sufficient and it may not be a potential for promoting adhesion to titanium.

Effect of Hydrophobizing Method on Corrosion Resistance of Magnesium Alloy with Plasma Electrolytic Oxidation (소수성 처리 방법에 따른 플라즈마 전해 산화 처리된 마그네슘 합금의 내식성)

  • Joo, Jaehoon;Kim, Donghyun;Jeong, Chanyoung;Lee, Junghoon
    • Journal of the Korean institute of surface engineering
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    • v.52 no.2
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    • pp.96-102
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    • 2019
  • Magnesium and its alloys are prone to be corroded, thus surface treatments improving corrosion resistance are always required for practical applications. As a surface treatment of magnesium alloys, plasma electrolytic oxidation (PEO), creating porous stable oxide layer by a high voltage discharge in electrolyte, enhances the corrosion resistance. However, due to superhydrophilicity of the porous oxide layer, which easily allow the penetration of corrosive media toward magnesium alloys substrate, post-treatments inhibiting the transfer of corrosive media in porous oxide layer are required. In this work, we employed a hydrophobizing method to enhance the corrosion resistance of PEO treated Mg alloy. Three types of hydrophobizing techniques were used for PEO layer. Thin Teflon coating with solvent evaporation, self-assembled monolayer (SAM) coating of octadecyltrichlorosilane (OTS) based on solution method and SAM coating of perfluorodecyltrichlorosilane (FDTS) based on vacuum method significantly enhances corrosion resistance of PEO treated Mg alloy with reducing the contact of water on the surface. In particular, the vacuum based FDTS coating on PEO layer shows the most effective hydrophobicity with the highest corrosion resistance.

Cell-compatibility of physicochemically and biologically modified polymer surfaces (물리화학적 및 생물학적으로 표면개질된 고분자의 세포 적합성 연구)

  • Lee, J.H.;Park, K.H.;Khang, G.S.;Lee, H.B.;Andrade, J.D.
    • Proceedings of the KOSOMBE Conference
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    • v.1989 no.05
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    • pp.1-3
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    • 1989
  • We have treated polymer surfaces such as polyethylene, polystyrene and polyester by various physicochemical and biological surface modification methods to be suitable for cell adhesion. The physicochemical methods we used were $O_2$ plasma discharge, corona discharge, sulfuric acid and chloric acid treatments. For the biological treatments, blood proteins such as plasma protein, serum protein and fibronectin were adsorbed onto the polymer surfaces. Chinese Hamster Ovary (CHO) cells were cultured on the surface-modified polymers and the cell-compatibility of those surfaces were compared. The chloric acid and fibronectin treatments were found to be the best methods of rendering the polymer surfaces adhesive for CHO cells.

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Effects of Intermittent Operation of Plasma and Electrolysis Processes on Lettuce Growth and Nutrient Solution Components (플라즈마 공정과 전기분해 공정의 간헐 운전이 상추성장과 양액 성분에 미치는 영향)

  • Kim, Dong-Seog;Park, Young-Seek
    • Journal of Environmental Science International
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    • v.26 no.1
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    • pp.109-118
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    • 2017
  • This study was conducted to investigate the effects of intermittent plasma and electrolysis treatments on lettuce (Lactuca sativa var. oak-leaf.), nutrient solution components ($NO_3{^-}-N$, $NH_4{^+}-N$, $PO{_4}^{3-}-P$, $K^+$, $Ca^{2+}$ and $Mg^{2+}$) and environmental parameters (electrical conductivity, total dissolved solids and pH). The recirculating hydroponic cultivation system consisted of planting port, LED lamp, water reservoir and circulating pump. Nutrient solution was circulated in the following order: reservoir ${\rightarrow}$ filtration-plasma or filtration-electrolysis ${\rightarrow}$ planting port ${\rightarrow}$ reservoir. The results showed that nutrient solution components and environmental parameters were changed by plasma or electrolysis treatment. Lettuce growth was not affected by the intermittent plasma or electrolysis treatment with 30 minutes or 90 minutes, respectively. The roots of the lettuce was damaged by excessive plasma and electrolysis treatment. Electrolysis treatment had greater effect on than plasma treatment because of the accumulation of high levels of TRO (Total Residual Oxidants).

Relationships between Methionine Supply, Nitrogen Retention and Plasma Insulin-like Growth Factor-I in Growing Sheep Nourished by Total Intragastric Infusions

  • Li, Chong;Zhao, Guangyong
    • Asian-Australasian Journal of Animal Sciences
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    • v.24 no.10
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    • pp.1393-1398
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    • 2011
  • Four 4-month old Charolais${\times}$Dorset male sheep (initial liveweight $25.0{\pm}1.1\;kg$), fitted with rumen and abomasal fistulas and nourished by total intragastric infusions, were used to study the relationships between methionine (Met) supply, nitrogen (N) retention and plasma insulin-like growth factor-I (IGF-I). Four graded levels of Met, i.e. 0 g/16 g N, 1.76 g/16 g N, 3.52 g/16 g N and 7.04 g/16 g N, were infused into abomasums as experimental treatments. The sheep and treatments were allocated in a $4{\times}3$ incomplete Latin square design (Yudon square design). The experiment lasted 3 periods and each period was 10 days. Quadratic correlations were found between Met level (x, g/16 g N) and N retention (y, g/d): y = $-0.03x^2$+0.41x+2.62, $r^2$ = 0.66, n = 12, p = 0.008, and between methionine level (x, g/16 g N) and plasma IGF-I concentration (y, ng/ml): y = $0.80x^2$-4.53x+190.24, $r^2$ = 0.51, n = 12, p = 0.009. No significant correlation was found between plasma IGF-I (x, ng/ml) and N retention (y, g/d) (p>0.05). It was concluded that Met level had a significant influence on N retention and plasma IGF-I concentration whereas IGF-I might not be an important mediator in the regulation of N metabolism by Met in growing sheep nourished by total intragastric infusions.