• 제목/요약/키워드: plasma technique

검색결과 746건 처리시간 0.035초

CHARACTERIXATION OF PLASMA ION IMPLANTED SURFACES USING TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMATRY

  • Lee, Yeon-Hee;Han, Seung-Hee;Lee, Jung-Hye;Yoon, Jung-Hyeon
    • 한국표면공학회지
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    • 제29권6호
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    • pp.880-883
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    • 1996
  • Plasma Source Ion Implantation (PSII) technique was used for the hydrophilization or hydrophobization of polymer surfaces. Polymers were modified with different plasma gases such as oxygen, nitrogen, argon, and tetrafluoromethane, and for varying lengths of treatment time. Plasma ion treatment of oxygen, nitrogen, argon and their mixtures increased significantly the hydrophilic properties of polymer surfaces. More hydrophobic surfaces of polymers were formed after the treatment with tetrafluoromethane. A study of plasma source ion implanted polymers was performed using contact angle measurements and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). The TOF-SIMS spectra and depth profile were used to obtain the information about the treated surfaces of polymers. The permanence of this technique could be evaluated with respect to ageing time. The surfaces treated with PSII gave better stability than other surface modification methods.

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유전체 방전을 이용한 확산화염에서의 매연저감 특성 (Soot Reduction in Diffusion Flames Using Dielectric Barrier Discharge)

  • 차민석;김관태;정석호;이상민
    • 한국연소학회:학술대회논문집
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    • 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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    • pp.27-32
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    • 2003
  • The effect of non-thermal plasma on diffusion flames in co-flow jets has been studied experimentally by adopting a dielectric barrier discharge technique. The generation of streamers was enhanced with a flame due to increased reduced electric fields by high temperature burnt gas and the abundance of ions in the flame region. The effect of streamers on flame behavior reveals that the flame length was significantly decreased as the applied voltage increased and the yellow luminosity by the radiation of soot particles was also significantly reduced. The formation of PAH and soot was influenced appreciably by the non-thermal plasma, while the flame temperature and the concentration of major species were not influence much with the plasma generation. The results demonstrated that the application of non-thermal plasma can be a viable technique in controlling soot generation in flames with low power consumption in the order of 1 W.

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Measurement of characteristics of plasma discharge in liquid

  • Kim, Ju-Sung;Min, Boo-Ki;Kang, Seong-Oun;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.153-153
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    • 2015
  • Application of the plasma is already highlighted as a new technology in the last few years. In these days, there are lots of attempt in various application with plasma in that it is known as an effective treatment to animal, plants, material and so on. Plasma in liquid, one of new plasma applications, has advantages in ability to treat bio-cell or solutions. For example, electro-surgery, water purification, radical generation and so on. Especially, plasma discharge in solutions is very useful technique and difficult to generate due to electrolysis, vaporization and something else. In this study, we have performed plasma discharge and checked sustainability of plasma in solution(saline 0.9%). And we have measured basic characteristics of plasma in liquid. Such as electrical energy and plasma density are calculated from discharging current and voltage. Also, its thermal energy is measured with IR camera.

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Measurement and assessment of imperfections in plasma cut-welded H-shaped steel columns

  • Arasaratnam, P.;Sivakumaran, K.S.;Rasmussen, Kim J.R.
    • Steel and Composite Structures
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    • 제6권6호
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    • pp.531-555
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    • 2006
  • H-shaped welded steel column members are fabricated by welding together pre-cut flanges and the web. Modern fabricators are increasingly using plasma-cutting technique instead of traditional flame cutting. Different fabrication techniques result in different degrees of geometric imperfections and residual stresses, which can have considerable influence on the strength of steel columns. This paper presents the experimental investigation based temperature profiles, geometric imperfections, and built-in residual stresses in plasma cut-welded H-shaped steel column members and in similar flame cut-welded H-shaped steel columns. Temperature measurements were taken during and immediately after the cutting operations and the welding operations. The geometric imperfections were established at closely spaced grid locations on the original plates, after cutting plates into plate strips, and after welding plate strips into columns. Geometric imperfections associated with plasma cut element and members were found to be less than those of the corresponding elements and members made by flame cutting. The "Method of Section" technique was used to establish the residual stresses in the plate, plate strip, and in the welded columns. Higher residual stress values were observed in flame cut-welded columns. Models for idealized residual stress distributions for plasma cut and flame cut welded sections have been proposed.

플라즈마 도핑을 이용한 결정질 태양전지 에미터층 형성 연구 (A Study on Emitter layer by Plasma Doping for Crystalline Silicon Solar Cells)

  • 유동열;노시철;최정호;김정환;서화일;김영철
    • 반도체디스플레이기술학회지
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    • 제10권4호
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    • pp.61-64
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    • 2011
  • In order to grow the crystalline solar cells industry continuously, development of alternate low-cost manufacturing processes is required. Plasma doping system is the technique for introducing dopants into semiconductor wafers in CMOS devices. In photovoltaics, plasma doping system could be an interesting alternative to thermal furnace diffusion processes. In this paper, plasma doping system was applied for phosphorus doping in crystalline solar cells. The Plasma doping was carried out in 1~4 KV bias voltages for four minutes. For removing surface damage and formation of pn junction, annealing steps were carried out in the range of $800{\sim}900^{\circ}C$ with $O_2$ ambient using thermal furnace. The junction depth in about $0.35{\sim}0.6{\mu}m$ range have been achieved and the doping profiles were very similar to emitter by thermal diffusion. So, It could be confirmed that plasma doping technique can be used for emitter formation in crystalline solar cells.

Comparative simulation of microwave probes for plasma density measurement and its application

  • 김대웅;유신재;김시준;이장재;김광기;이영석;염희중;이바다;김정형;오왕열
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.185.2-185.2
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    • 2016
  • The plasma density is an essential plasma parameter describing plasma physics. Furthermore, it affects the throughput and uniformity of plasma processing (etching, deposition, ashing, etc). Therefore, a novel technique for plasma density measurement has been attracting considerable attention. Microwave probe is a promising diagnostic technique. Various type of cutoff, hairpin, impedance, transmission, and absorption probes have been developed and investigated. Recently, based on the basic type of probes, modified flat probe (curling and multipole probes), have been developing for in situ processing plasma monitoring. There is a need for comparative study between the probes. It can give some hints on choosing the reliable probe and application of the probes. In this presentation, we make attempt of numerical study of different kinds of microwave probes. Characteristics of frequency spectrum from probes were analyzed by using three-dimensional electromagnetic simulation. The plasma density, obtained from the spectrum, was compared with simulation input plasma density. The different microwave probe behavior with changes of plasma density, sheath and pressure were found. To confirm the result experimentally, we performed the comparative experiment between cutoff and hairpin probes. The sheath and collision effects are corrected for each probe. The results were reasonably interpreted based on the above simulation.

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Single-Scan Plasma Display Panel(PDP)를 위한 고속 어드레스 에너지 회수 기법 (A High Speed Address Recovery Technique for Single-Scan Plasma Display Panel(PDP))

  • 이준영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 심포지엄 논문집 정보 및 제어부문
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    • pp.239-242
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    • 2005
  • A high speed address recovery technique for AC plasma display Panel(PDP) is proposed. By removing the GND switching operation, the recovery speed can be increased and switching loss due to GND switch also becomes to be reduced. The proposed method is able to perform load-adaptive operation by controlling the voltage level of energy recovery capacitor, which prevents increasing inefficient power consumption caused by circuit loss during recovery operation. Thus, the technique shows the minimum address power consumption according to various displayed images, different from Prior methods operating in fixed mode regardless of images. Test results with 50" HD single-scan PDP(resolution = 1366$\times$768) show that less than 350ns of recovery time is successfully accomplished and about 54% of the maximum power consumption can be reduced, tracing minimum power consumption curves.

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저온 플라즈마와 $NH_3$ SCR 복합공정을 이용한 디젤엔진 배기가스의 NOx 저감 기술 (Non-thermal Plasma and $NH_3$ SCR Hybrid Process for Treating Diesel Engine Exhaust)

  • 차민석;이재옥;김용호;송영훈
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2002년도 제25회 KOSCI SYMPOSIUM 논문집
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    • pp.89-95
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    • 2002
  • A hybrid De- NOx technique of non-thermal plasma and $NH_3$ SCR process has been investigated to remove NOx from 300 hp marine engine exhaust under the low temperature conditions, i.e. $100-200^{\circ}C$. Fundamental investigation with Diesel-like simulant gas was also conducted. The performance of the present technique has been demonstrated by treating real diesel exhaust gases, in which high contents of soot, water vapor, $SO_2$, NOx, and unburned HC are included. Detailed engineering data for evaluating the feasibility of the technique are provided in the present investigation.

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플라즈마 멤브레인을 이용한 유기용매 혼합을 분리 (Separation of Organic Liquid Mixtures using Plasma Membrane)

  • 김성오;박복기;김두석;박진교;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.642-644
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    • 1999
  • We have prepared the plasma-polymerized membrane for pervaporation of organic-liquid mixtures by the plasma polymerization technique. Plasma polymerization techniques were utilized in the development of hydrophilic composite membranes having high hydrogen ion permeability and excellent dimensional stability. To develop an organic liquid permselective Membrane, suppressing membrane swearing as well as enhancing the solubility difference is impotant. the objectives of the present study are to disign a suitable membrane for an organic-mixture system by the control of the plasma-polymer solubility.

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레이저와 프라즈마와의 비선형상오작용에 관한 연구 -분광법에 의한 제 2고주파와 Brillouin 산람광의 검출- (Study on the Nonlinear Interaction of Laser with Plasma -Detection of Second Harmonic Light and Brillouin Scattering Light by Means of Spectroscopic Technique-)

  • Kang, Hyung-Boo
    • 대한전기학회논문지
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    • 제33권5호
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    • pp.173-180
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    • 1984
  • The spectra of scattering light fromlaser-produced plasma near its fundamental and second harmonic wavelength were observed respectively by means of spectroscopic technique. The experimental results and the generation mechanism of nonlinear effects such as the second garmonics and the brillouin scattering were analysed theoretically. The spectra of reflected laser light became wider than that of incident laser light. And the peak of spectrum of reflected light shifted to red-side from that of incident light. The second harmonic light is generated from the nonlinear interaction of the incident laser light and the electron plasma wave excited in resonance region by the oblique incidence of laser light to the plasma. The Brillouin backscattering from laser-produced plasmas of hydrogen and deuterium has shown an isotope effect in the red-side region of the generated second harmonic light. This isotope shift is explained by the parametric instability at the cutoff (resonance) region using frequency-and phase-matching conditions of the waves.

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