A Study on Emitter layer by Plasma Doping for Crystalline Silicon Solar Cells
![]() |
Yu, Dong-Yeol
(Dept. of Electrical & Electronic & Communication Engineering)
Roh, Si-Cheol (Dept. of Electrical & Electronic & Communication Engineering) Choi, Jeong-Ho (Dept. of Electrical & Electronic & Communication Engineering) Kim, Jeong-Hwan (Dept. of Electrical & Electronic & Communication Engineering) Seo, Hwa-Il (Dept. of Electrical & Electronic & Communication Engineering) Kim, Yeong-Cheol (School of Energy & Materials & Chemical Engineering, Korea University of Technology and Education) |
1 | Korea Institute of Energy Research, "2011 workshop of association for research on PV", KIER, pp. 1-122, 2011. |
2 | Korea Photovoltaic Industry Association, "PV World Forum 2011: 1st Day-Conference Data Book", Infothe, pp. 9-188, 2011. |
3 | Seung Woo Do, "Formation and Characteristics of a Shallow Junction using Plasma Doping", Kyungpook National University, pp.24-29, 53-56, 2010. |
4 | Y. H. Kim and J. S. Lee, "Introduction to Solar Cell Production", Dooyangsa, pp. 9-313, 2009. |
5 | Seoul National University, "The catalytic process", Seoul National University publishing department, 2002. |
6 |
Yong Hyun Lee, "N+/P+ poly counter doping and 30nm shallow junction formation using Plasma Immersion Ion Doping( |
7 | N.Q.Khanh, I. Pinter, Cs. Ducso, M. Adam, E. Szilagyi and I. Barsony, "Ion beam analysis of plasma immersion implanted silicon for solar cell fabrication", Nucl. Instr. And Meth. in Phys. Res. B 112, pp.259-262, 1996. DOI |
8 | Kamaruzzaman Sopian, Nowshad Amin, Nilofar Asim and Saleem H. Zaidi, "Plasma Implantation for Emitter and Localized Back Surface Field (BSF) Formation in Silicon Solar Cells", European Journal of Scientific Research, Vol.24 No.3, pp.365-372, 2008. |
9 | Yuji Komatsu, Giuseppe Galbiati, Machteld Lamers, Peter Venema, Malcolm Harris, Arno F. Stassen, Christine Meyer, Menno van den Donker and Arthur Weeber, "Innovative Diffusion Processes for Improved Efficiency on Industrial Solar Cells by Doping Profile Manipulation", 24th EUPVSEC, 2009. |
10 | T. Janssens, N. E. Posthuma, Van Kerschaver, K. Baert, P. Choulat, J.L. Everaert, J. Goosens, W. Vandervorst and J. Poortmans, "Advanced Phosphorus Emitters for High Efficiency Si Solar Cells", IEEE, 2009. |
![]() |