• 제목/요약/키워드: plasma oxidation

검색결과 691건 처리시간 0.025초

산소 플라즈마에 의한 금속우라늄과 이산화우라늄 산화 연구 (A Study on the Oxidation of Metallic Uranium and Uranium Dioxide in Oxygen Plasma)

  • 양용식;서용대;김용수
    • 한국세라믹학회지
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    • 제37권9호
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    • pp.833-838
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    • 2000
  • 기존의 핵연료재료 습식처리 공정 대체를 위한 건식 처리 공정 기초 연구로서 산소 플라즈마 기체에 의한 금속우라늄과 이산화우라늄의 산화 연구를 수행하였다. 연구결과 산소 플라즈마를 사용할 경우 $UO_2$는 40$0^{\circ}C$에서 약 300% 정도, 50$0^{\circ}C$에서는 70% 정도의 산화율 증가가 일어났으며 금속우라늄의 경우에도 35$0^{\circ}C$에서 50% 정도의 증가를 확인할 수 있었다. 이들 산화율은 플라즈마 출력이 증가함에 따라 비례적으로 증가하였는데 이는 출력 증가에 따른 플라즈마내 산소 원자의 발생과 일치하여 이러한 산화율 증가 현상은 플라즈마내 산소 원자가 주도하는 것으로 드러났다. 이들 실험 결과는, 기존의 실험 결과와 길이, 시간에 따라 산화량이 선형적으로 증가하는 것으로 나타나 산소 플라즈마 산화 반응은 표면 반응이 주요 반응이라는 것이 밝혀졌다.

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플라즈마 에칭으로 손상된 4H-실리콘 카바이드 기판위에 제작된 MOS 커패시터의 전기적 특성 (Electrical Characterization of MOS (metal-oxide-semiconductor) Capacitors on Plasma Etch-damaged 4H-Silicon Carbide)

  • 조남규;구상모;우용득;이상권
    • 한국전기전자재료학회논문지
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    • 제17권4호
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    • pp.373-377
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    • 2004
  • We have investigated the electrical characterization of metal-oxide-semiconductor (MOS) capacitors formed on the inductively coupled plasma (ICP) etch-damaged both n- and p-type 4H-SiC. We found that there was an effect of a sacrificial oxidation treatment on the etch-damaged surfaces. Current-voltage and capacitance-voltage measurements of these MOS capacitors were used and referenced to those of prepared control samples without etch damage. It has been found that a sacrificial oxidation treatment can improve the electrical characteristics of MOS capacitors on etch-damaged 4H-SiC since the effective interface density and fixed oxide charges of etch-damaged samples have been found to increase while the breakdown field strength of the oxide decreased and the barrier height at the SiC-SiO$_2$ interface decreased for MOS capacitors on etch-damaged surfaces.

PEO 코팅 처리된 AZ91 합금의 산화층에 미치는 후-열처리의 영향 (Influence of subsequent-annealing on the oxide layer of AZ91 Mg alloy prepared by plasma electrolytic oxidation)

  • 김용민;고영건;신동혁
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.429-432
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    • 2009
  • The influence of the subsequent-annealing (SA) treatment on plasma electrolytic oxidation (PEO)-treated Mg-based alloy was investigated and the dependence of the dehydration reaction on the SA temperature was also studied. For this purpose, a series of the SA treatments were carried out on the coated samples at two different temperatures, i.e. 423 and 523 K for 10 h. In contrast to the sample without SA treatment, the sample annealed at 523 K exhibited a significant difference in term of surface morphology since the MgO content in the oxide layer increased with increasing SA temperature. With increasing SA temperature, the dehydration of $Mg(OH)_2$ led to the increase in the relative amount of the MgO, which was a hard phase. From the nano-indentation results, the applied loads of the samples were seen to increase as SA temperature increased. However, the corrosion resistance of the sample annealed at 423 K was higher than that of the samples annealed at 523 K.

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비열 플라즈마에 의한 NO의 산화에 탄화수소 첨가제가 미치는 영향 (Effect of Hydrocarbons on the Promotion of NO-$NO_2$ Conversion in NonThermal Plasma DeNOx Treatment)

  • 신현호;윤웅섭
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2000년도 제21회 KOSCO SYMPOSIUM 논문집
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    • pp.33-46
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    • 2000
  • In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of NO-$NO_2$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $NO_2$ etc.) successively produced by hydrocarbon decomposition form the primary path of NO-$NO_2$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient NO-$NO_2$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.

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비열 플라즈마에 의한 NO의 산화에 탄화수소 첨가제가 미치는 영향 (Effect of Hydrocarbons on the Promotion of $NO-NO_{2}$ Conversion in NonThermal Plasma DeNOx Treatment)

  • 신현호;윤웅섭
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2000년도 제20회 KOSCO SYMPOSIUM 논문집
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    • pp.178-188
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    • 2000
  • In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of $NO-NO_{2}$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $HO_{2}$ etc.) successively produced by hydrocarbon decomposition form the primary path of $NO-NO_{2}$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient $NO-NO_{2}$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.

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플라즈마 전해산화 처리된 마그네슘 합금의 표면 물성에 미치는 후-열처리 온도의 영향 (Effect of Subsequent-Annealing Temperature on Surface Properties of Plasma Electrolytic Oxidation-Treated Mg Alloy)

  • 고영건;김용민;남궁승;신동혁
    • 소성∙가공
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    • 제18권8호
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    • pp.625-632
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    • 2009
  • The influence of the subsequent-annealing(SA) temperature on the plasma electrolytic oxidation(PEO)-treated Mgbased alloy was investigated in terms of surface properties associated with hardness and corrosion. For this purpose, a series of the SA treatments were performed on the PEO-treated samples at four different temperatures, i.e., 100, 150, 200, and $250^{\circ}C$ for 10 hrs. When compared to the sample without SA, the samples annealed at temperatures higher than $200^{\circ}C$ showed a difference in surface morphology due to the volume expansion accompanied by the dehydration reaction where the part of $Mg(OH)_2$ changed into MgO, working as harder phase. From the results of nano-indentation tests, the applied loads of the samples were seen to increase with increasing SA temperatures. However, the electro-chemical and corrosion properties of the sample annealed at $150^{\circ}C$ were higher than those of the samples annealed at three temperatures.

Characteristics of Oxide Layers Formed on Al2021 Alloys by Plasma Electrolytic Oxidation in Aluminate Fluorosilicate Electrolyte

  • Wang, Kai;Koo, Bon-Heun;Lee, Chan-Gyu;Kim, Young-Joo;Lee, Sung-Hun;Byon, Eung-Sun
    • 한국표면공학회지
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    • 제41권6호
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    • pp.308-311
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    • 2008
  • Oxide layers were prepared on Al2021 alloys substrate under a hybrid voltage of AC 200 V (60 Hz) combined with DC 260 V value at room temperature within $5{\sim}60\;min$ by plasma electrolytic oxidation (PEO). An optimized aluminate-fluorosilicate solution was used as the electrolytes. The surface morphology, thickness and composition of layers on Al2021 alloys at different reaction times were studied. The results showed that it is possible to generate oxide layers of good properties on Al2021 alloys in aluminate-fluorosilicate electrolytes. Analysis show that the double-layer structure oxide layers consist of different states such as ${\alpha}-{Al_2}{O_3}$ and ${\gamma}-{Al_2}{O_3}$. For short treatment times, the formation process of oxide layers follows a linear kinetics, while for longer times the formation process slows down and becomes a steady stage. During the PEO processes, the average size of the discharge channels increased gradually as the PEO treatment time increased.

AZ31 마그네슘 합금의 플라즈마전해산화 피막 형성에 미치는 수산화 이온 및 규산 이온의 영향 (Effects of Hydroxide and Silicate ions on the Plasma Electrolytic Oxidation of AZ31 Mg Alloy)

  • 문성모;양철남;나상조
    • 한국표면공학회지
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    • 제47권4호
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    • pp.147-154
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    • 2014
  • Formation behavior of PEO (Plasma Electrolytic Oxidation) films on AZ31 Mg alloy was studied in aqueous solutions containing various concentrations of hydroxide ion ($OH^-$) and silicate ion ($SiO_3{^{2-}}$) by voltage-time curves, and corrosion resistance of the PEO film-covered specimen was investigated by immersion test in 0.5 M NaCl solution. From the analyses of the voltage-time curves, it is suggested that two different types of anions are essentially needed for the formation of PEO films on AZ31 Mg alloy: film formation agent and local film breakdown agent. $SiO_3{^{2-}}$ ion acts only as a film formation agent but $OH^-$ ion acts not only as a film formation agent but also film breakdown agent. The PEO films prepared on AZ31 Mg alloy in alkaline silicate solution showed very good corrosion resistance without any pitting or filiform corrosions up to 480 h of immersion in 0.5 M NaCl.

Al1050 합금의 플라즈마 전해산화 피막 형성 거동에 미치는 cation의 영향 (Effect of Cation on The Formation Behavior of Plasma Electrolytic Oxidation Films on Al1050 Alloy)

  • 김주석;문성모;오명훈
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.151.2-151.2
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    • 2017
  • 본 연구에서는 정전류 조건에서 알루미늄 합금의 PEO(Plasma Electrolytic Oxidation) 피막 형성 거동에 미치는 전해질 내 cation($K^+$, $Na^+$)의 영향을 아크 발생 양상, 전압-시간 곡선 및 형성된 표면피막 구조를 관찰하여 연구하였다. 전해질은 0.5 M NaOH + 1 M $Na_2SiO_3$ 수용액과 0.5 M KOH + 1 M $Na_2SiO_3$ 수용액이 사용되었다. 아크 발생은 cation의 종류에 상관없이 동일하게 가장자리부터 시작되어 내부로 이동함으로써 전 표면에 걸쳐서 일어났다. 전 표면에서 PEO 피막이 형성된 이후에는 한 지점에서 지속적으로 아크가 발생하는 로컬버닝 현상이 두 용액에서 모두 관찰되었으나 $K^+$이온이 포함된 용액에서 로컬버닝이 빠르게 일어났다. 시편표면에서 아크가 발생하는 동안 중 각 전해액에서의 전압-시간 곡선에서 전압의 상승과 하강이 반복되는 거동이 동일하게 관찰되었다. 이러한 전압 등락의 크기는 $K^+$ 이온이 포함된 수용액에서 더 크게 나타났으며, 그 결과 표면 거칠기가 상대적으로 더 높은 PEO 피막이 형성되었다.

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코어금형용강 SKD11의 플라즈마 전해산화에 의한 피막 형성 (Formation of Coatings on SKD11 Core Mold Steel by Plasma Electrolytic Oxidation)

  • 김상무;이태행;강석조;조영희;구자명
    • 열처리공학회지
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    • 제24권4호
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    • pp.209-216
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    • 2011
  • Surface coatings were prepared on SKD11 core mold steel by plasma electrolytic oxidation (PEO). The coatings were investigated about the formation condition of core mold steel. SKD11 were coated by PEO in a mix solution of Sodium Aluminate $NaAlO_2$ (10 g/l), Sodium Silicate powder $Na_2SiO_3$ (0.5 g/l), Sodium tungstate dihydrate $Na_2WO_42H_2O$ (0.5 g/l) at less than $30^{\circ}C$. The electrical condition were voltage : 500~600 V; Pulse : 600~1800 Hz; current density 15~20 $A/dm^2$ various time : 3 min~40 min. The coatings surface morphology, cross-section, friction coefficient, hardness were investigated. The PEO coatings on SKD11 core mold steel showed the extended service life.