• 제목/요약/키워드: plasma in liquid

검색결과 613건 처리시간 0.033초

Plasma를 이용한 세정액의 활성화와 시료 표면의 탄성계수 및 강도 변화에 대한 연구 (Activation of Stripper Solution by Plasma and Hardness/Modulus of Elasticity Change of the Surface)

  • 김수인;김현우;노성철;윤덕진;장홍준;이종림;이창우
    • 한국진공학회지
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    • 제18권2호
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    • pp.97-101
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    • 2009
  • 현대의 반도체 산업에서 공정 중 가장 큰 비중을 차지하며, 가장 많은 자본과 인력을 소비하는 것이 바로 세정 공정이다. 세정공정은 소자의 작동에 영향을 미치고 기능을 저하시킬 수 있는 이물질 입자들을 제거하는 것이다. 특히 소자를 식각하기 위한 Photoresist(PR) 과정이 끝날 때마다 항상 세정 과정이 포함되어야 했다. 또한, Photoresist(PR) 공정 중 생성된 HDI-PR(high dose implanted photoresist)은 세정 과정에서 제거가 힘들기 때문에 현대의 고밀도 집적회로 세정 공정에서는 건식 세정과 습식 세정을 혼용하여 여러 단계의 세정 공정을 거치게 된다. 이 논문에서는 기존 플라즈마 방식으로 대표되는 건식 세정과 약액으로 대표되는 습식 세정을 동시에 사용하는 방식을 사용하여 약액활성화 방법(Plasma Liquid-Vapor Activation; PLVA)을 제안하여 실험을 실시하였고 HDI-PR을 활성화된 용액에 담근 후 Nano-Indenter를 이용하여 표면강도와 탄성계수를 측정했다. Nano-indenter는 특정한 기하학적 형태를 가지는 Tip을 표면에 압입한 후 압입하중과 압입깊이를 측정함으로서 시료의 표면강도와 탄성계수를 측정하였다. 그 결과 plasma로 활성화된 PR stripper 용액으로 strip한 후의 시료의 표면 강도가 크게 줄어든 것을 확인하였다. 이는 이후 물리적 표면 세정 공정을 후 공정으로 사용한다면 보다 효율적인 HDI-PR을 제거할 수 있을 것으로 사료된다.

육계에서 sulfathiazole 경구투여 후 혈장 및 조직내 잔류량 (Disposition of sulfathiazole in plasma and tissue of broiler chicks following oral administration)

  • 서형석;임정철;허부홍;권정택;김성문;천희웅;최인방;김진상
    • 한국동물위생학회지
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    • 제25권3호
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    • pp.299-308
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    • 2002
  • The purposes of this study were to characterize the disposition of sulfathiazole(ST) and to investigate the effects of sodium bicarbonate on the disposition of ST in broiler chicks(2.5~3.0kg). Animals were given ST acutely(10~80mg/kg, PO), and plasma, kidney, muscle, heart, liver and spleen samples were collected and analyzed for ST by high performance liquid chromatography. The plasma and tissue data was consistent with a one-compartment pharmacokinetic model. The drug is rapidly but incompletely(2.5~3.87%) absorbed with peak plasma and tissue levels being achieved within one hour after dosing. The plasma and tissue levels depended on drug dosage, and the descending order in concentration of ST was kidney > plasma > heart > muscle $\geq$ spleen $\geq$ liver from animals sacrificed at one hour after dosing. Moreover, significant positive correlations(r>0.9) existed between plasma and tissue levels of ST. In addition, sodium bicarbonate pretreatment decreased plasma level, indicating that an alkalinization stimulate the excretion of ST. Results of this study suggest that oral application of ST was rapidly absorbed and eliminated, and confirmed that tissue residues of ST can be estimated from plasma drug concentration in broiler chicks.

콜레스테릭 액정의 합성과 광학필름용 편광성분으로서의 응용 (Synthesis of Cholesteric Liquid Crystal and Its Application as a Polarizing Component on the Optical Film)

  • 김용석;이광연;안철흥;김건중
    • 공업화학
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    • 제19권6호
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    • pp.661-667
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    • 2008
  • 본 연구에서는 LCD 백라이트용 휘도향상 편광필름으로 사용하기 위해, 콜레스테릭 액정(CLC)을 합성하여 네미틱 액정과 혼합한 다음 이들이 충진된 모듈을 제작하였다. 광확산필름에 의해 면광원화된 빛을 통과시킬 때, LCD 백라이트상에서 이들의 투과광 증폭 및 편광능력에 대한 특성을 연구하였다. 합성된 콜레스테릭 액정의 특성은 UV/Visible 스펙트럼과 편광현미경(POM) 등으로 평가하였다. 여러 종류의 선형 카르복실산을 콜레스테롤 분자에 도입하여 콜레스테릭 메소젠 사이의 유연격자를 이루도록 유도하여 각 층에서 일정한 방향성을 유지하도록 하였다. 또한 CLC필름을 적층하여 가시광선대에서 편광능력, 휘도향상 및 투과파장영역을 넓히고 백라이트 유니트의 밝기를 향상시키는 모듈로 적용할 수 있었다.

Development of Nonthermal Bioplasma Source Applicable to Human Liquid Fluids

  • Min, Boo-Ki;Oh, Hyun-Joo;Song, Ki-Baek;Uhm, Han-Sup;Kang, Seung-Oun;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.327-327
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    • 2011
  • A nonthermal bioplasma source was developed for application to human liquid fluids by making use of nano-size tungsten tips. Characteristics of the plasma source are investigated. Here we have used the AC voltage system. The bioplasma source generated by a tungsten tip with quartz tube and ground electrode is a low-temperature plasma without making any noticeable damage to cells at a low power operation. The breakdown voltage and current signals are measured by high voltage probe (Tektronix P6015A) and current probe (P6021). Variation of breakdown temperature near the tip electrode is larger than that in the neighborhood of ground electrode. Bubble formation during discharge has been recorded and investigated by using the high speed camera. The existence and behavior of hydroxyl and superoxide radicals are detected and measured by spectrometers. The electrical and optical properties of breakdown characteristics are also investigated.

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Bioequivalence Assessment of Acephyll® Capsule to Surfolase® Capsule (Acebrophylline HCl 100 mg) by Liquid Chromatography Tandem Mass Spectrometry

  • Nam, Kyung-Don;Seo, Ji-Hyung;Yim, Sung-Vin;Lee, Kyung-Tae
    • Journal of Pharmaceutical Investigation
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    • 제41권5호
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    • pp.309-315
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    • 2011
  • A sensitive and specific liquid chromatographic method coupled with tandem mass spectrometry (LC-MS/MS) was developed for the analysis of ambroxol (active moiety of acebrophylline). After acetonitrile precipitation of proteins from plasma samples, ambroxol and the domperidone (internal standard, IS) were eluted on a C18 column. The isocratic mobile phase was consisted of 10 mM ammonium acetate and methanol (10 : 90, v/v), with flow rate at 0.2 mL/min. A tandem mass spectrometer, as detector, was used for quantitative analysis in positive mode by a multiple reaction monitoring mode to monitor the m/z 379.2${\rightarrow}$264.0 and the m/z 426.2${\rightarrow}$175.1 transitions for ambroxol and the IS, respectively. Twenty four healthy Korean male subjects received two capsules (100 mg ${\times}$ 2) of either the test or the reference formulation of acebrophylline HCl in a 2 ${\times}$ 2 crossover study, this was followed by a 1week washout period between either formulation. $AUC_{0-t}$ (the area under the plasma concentration-time curve) was calculated by the linear trapezoidal rule. $C_{max}$ (maximum plasma drug concentration) and $T_{max}$ (time to reach $C_{max}$) were compiled from the plasma concentration-time data. The 90% confidence intervals for the log transformed data were acceptable range of log 0.8 to log 1.25 (e.g., log 0.8964 - log 0.9910 for $AUC_{0-t}$ log 0.8690 - log 1.0750 for $C_{max}$). The major parameters, $AUC_{0-t}$ and $C_{max}$ met the criteria of Korea Food and Drug Administration for bioequivalence indicating that Acephyll$^{(R)}$ capsule (test) is bioequivalent to Surfolase$^{(R)}$ capsule (reference).

무전극 마이크로웨이브 플라즈마 토치와 응용 (Electrodelss Plasma Torch Powered by Microwave and Its Applications)

  • 홍용철;전형원;노태협;이봉주;엄환섭
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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    • pp.889-892
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    • 2009
  • A microwave plasma torch at the atmospheric pressure by making use of magnetrons operated at the 2.45 GHz and used in a home microwave oven has been developed. This electrodeless torch can be used to various areas, including industrial, environmental and military applications. Although the microwave plasma torch has many applications, we in the present work focused on the microwave plasma torch operated in pure steam and several applications, which may be used in future and right now. For example, a high-temperature steam microwave plasma torch may have a potential application of the hydrocarbon fuel reforming at one atmospheric pressure. Moreover, the radicals including hydrogen, oxygen and hydroxide molecules are abundantly available in the steam torch, dramatically enhancing the reaction speed. Also, the microwave plasma torch can be used as a high-temperature, large-volume plasma burner by injecting hydrocarbon fuels in gas, liquid, and solid into the plasma flame. Lastly, we briefly report an underway research, which is remediation of soils contaminated with oils, volatile organic compounds, heavy metals, etc.

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고속 교반을 이용한 기-액 혼합 플라즈마방전 시스템의 성능 향상 (Performance Enhancement of Gas-Liquid Mixed Plasma Discharge System using High Speed Agitation)

  • 박영식
    • 한국환경과학회지
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    • 제26권6호
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    • pp.711-717
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    • 2017
  • Dielectric Barrier Discharge (DBD) plasma is a new technique for use in environmental pollutant degradation, which is characterized by the production of hydroxyl radicals as the primary degradation species. Due to the short lifetime of the chemically active species generated during the plasma reaction, the dissolution of the plasma gas has a significant effect on the reaction performance. The plasma reaction performance can be enhanced by combining the basic plasma reactor with a homogenizer system in which the bubbles are destroyed and turned into micro-bubbles. For this purpose, the improvement of the dissolution of plasma gas was evaluated by measuring the RNO (N-dimethyl-4-nitrosoaniline, an indicator of the generation of OH radicals). Experiments were conducted to evaluate the effects of the diameter, rotation speed, and height of the homogenizer, pore size, and number of the diffuser and the applied voltage on the plasma reaction. The results showed that the RNO removal efficiency of the plasma reactor combined with a homogenizer is two times higher than that of the conventional one. The optimum rotor size and rotation speed of the homogenizer were 15.1 mm, and 19,700 rpm, respectively. Except for the lowest pore size distribution of $10-16{\mu}m$, the pore size of the diffuser showed little effect on RNO removal.

Assay of Midazolam in Human Plasma by Gas-Liquid Chromatography with Nitrogen-Phosphorus Detection

  • 신호상;홍춘표;Yun-Suk Oh-Shin;강보경;이경옥;이규범
    • Bulletin of the Korean Chemical Society
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    • 제19권5호
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    • pp.524-526
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    • 1998
  • A sensitive and specific method is described for the determination of midazolam in human plasma. The drug was extracted from 1 mL of carbonate buffered plasma (pH 9.6) with 8 mL of diethyl ether. Famprofazone was used as internal standard. The organic phase was evaporated to dryness. The residue was dissolved in methanol for the direct analysis by gas chromatograph-nitrogen phosphorus detector system. In the concentration range of 1-5000 ng/mL, the calibration curve was linear. The coefficients of variation from the precision test were <6% at the range of the concentration of 0.10-2.00 μg/mL and the detection limit for midazolam in 1 mL of plasma was o.5 ng. This assay is more sensitive, selective, simple and rapid than earlier methods. Plasma midazolam concentrations were determined by this method after administration of midazolam.

Effects of excessive dietary methionine on oxidative stress and dyslipidemia in chronic ethanol-treated rats

  • Kim, Seon-Young;Kim, Hyewon;Min, Hyesun
    • Nutrition Research and Practice
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    • 제9권2호
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    • pp.144-149
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    • 2015
  • BACKGROUND/OBJECTIVE: The aim of this study was to examine the effect of high dietary methionine (Met) consumption on plasma and hepatic oxidative stress and dyslipidemia in chronic ethanol fed rats. MATERIALS/METHODS: Male Wistar rats were fed control or ethanol-containing liquid diets supplemented without (E group) or with DL-Met at 0.6% (EM1 group) or 0.8% (EM2 group) for five weeks. Plasma aminothiols, lipids, malondialdehyde (MDA), alanine aminotransferase (ALT), and aspartate aminotransferase were measured. Hepatic folate, S-adenosylmethionine (SAM), and S-adenosylhomocysteine (SAH) were measured. RESULTS: DL-Met supplementation was found to increase plasma levels of homocysteine (Hcy), triglyceride (TG), total cholesterol (TC), and MDA compared to rats fed ethanol alone and decrease plasma ALT. However, DL-Met supplementation did not significantly change plasma levels of HDL-cholesterol, cysteine, cysteinylglycine, and glutathione. In addition, DL-Met supplementation increased hepatic levels of folate, SAM, SAH, and SAM:SAH ratio. Our data showed that DL-Met supplementation can increase plasma oxidative stress and atherogenic effects by elevating plasma Hcy, TG, and TC in ethanol-fed rats. CONCLUSION: The present results demonstrate that Met supplementation increases plasma oxidative stress and atherogenic effects by inducing dyslipidemia and hyperhomocysteinemia in ethanol-fed rats.

LC-MS/MS를 이용한 비글견 혈장 중 파록세틴의 고감도 분석 (Sensitive determination of paroxetine in canine plasma by liquid chromatography-tandem mass spectrometry (LC-MS/MS))

  • 장규영;강승우;한상범;염정록;이경률;이희주
    • 분석과학
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    • 제20권2호
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    • pp.138-146
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    • 2007
  • 본 연구에서는 비글견 혈장 중의 파록세틴을 액체상추출법(LLE)으로 전처리하고 액체크로마토그래피-탠덤질량분석기(LC-MS/MS)로 신속하게 분석하는 방법을 개발하였다. 파록세틴과 내부표준물질로 사용한 플루오세틴을 TBME(tert-butyl methyl ether)로 추출하고 상층액을 취하여 건조시킨 후, 이동상 $100{\mu}L$로 재분산하여 LC-MS/MS에 주입하였다. HPLC 분석조건으로 Capcell Pak UG120($2.0{\times}150mm$, $5{\mu}m$) 컬럼을 사용하였으며, 이동상은 50% 아세토니트릴(pH 3, formic acid로 조정) 용액을 사용하였고, 유량은 0.2 mL/min으로 하였다. MS/MS의 SRM(selective reaction monitoring) 방법으로 파록세틴과 플루오세틴의 선구 이온, 생성 이온을 각각 m/z $330{\rightarrow}192$, m/z $310{\rightarrow}148$로 분석한 결과 0.02~5 ng/mL의 농도범위에서 상관계수($R^2$) 0.9993으로 좋은 직선성을 나타내었다. 또한 정량한계는 0.02 ng/mL이며, 정밀성은 일내 및 일간 변동계수가 7.67% 이하이고, 정확도는 92.96~102.99%로 비글견 혈장 중의 파록세틴의 약물동력학 연구에 이용될 수 있는 충분한 감도와 특이성, 직선성, 정밀성 및 정확성을 갖고 있음을 확인하였다.