• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.3
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• pp.229-233
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• 2011

Diamond thin films were deposited on pretreated Co cemented tungsten carbide (WC-6%Co) inserts as substrate by microwave plasma chemical vapor deposition (MPCVD) system, equipped with a 915MHz, 30kW generator for generating a large-size plasma. The substrates were pretreated with two solutions Murakami solution $[KOH:K_3Fe(CN)_6:H_2O]$ and nitric solution $[HNO_3:H_2O]$ to etch, WC and Co at cemented carbide substrates, respectively. The deposition experiments were performed at an input power of 10 kW and in a total pressure of 100 torr. The influence of various $CH_4$ contents on the crystallinity and morphology of the diamond films deposited in MPCVD was investigated using scanning electron microscopy (SEM) and Raman spectroscopy. The diamond film synthesized by the $CH_4$ plasma shows a triangle-faceted (111) diamond. As $CH_4$ contents was increased, the thickness of diamond films increased and the faceted planes disappeared. Finally, Faceted diamond changed into nano-crystalline diamond with random crystallinity.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.29 no.3
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• pp.351-357
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• 2019

Objectives: The objectives of this study were to investigate fungal contamination in a 31-year old university building in Seoul, Korea, and to study the inactivation of fungi using cold atmospheric pressure plasma(CAP). Methods: To investigate the fungal contamination in a university building, air samples were collected from five locations in the building, including two study rooms, a storage room, a laboratory, and a basement. The sampling was performed in a dry season(February to April) and in a wet season(July). To study the inactivation efficacy of fungi by CAP, airborne fungal concentrations were measured before and after the operation of the CAP generator. Results: Humidity was an important factor affecting fungal growth. The airborne fungal concentrations determined in the wet season(July) were significantly higher than those determined in the dry season(February to April). In the basement, the values determined in the dry and wet season were 319 and $3,403CFU/m^3$, respectively. The inactivation efficiency of fungi by CAP was 83-90% over five to nine days of operation. Conclusions: The university building was highly contaminated by airborne fungi, especially in summer. It is concluded that humidity is an important factor affecting fungal growth and CAP is a highly useful technique for inactivation of indoor airborne fungi.

• Journal of Hydrogen and New Energy
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• v.32 no.1
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• pp.68-76
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• 2021

Climate change problems occur during the use of fossil fuel and the process of biogas production. Research continues to convert carbon dioxide and methane, the major causes of climate change, into high-quality energy sources. in order to present the performance potential for the novel plasma-recuperative burner reformer, the reforming characteristics for each variable were indentified. The optimal operating condition of was an O2/C ratio of 1.0 and a total gas supply of 20 L/min. At this time, CH4 conversion was 64%, H2 selectivity was 39%, and H2/CO ratio was 1.13, which were the results applicable to the solid oxide fuel cell fuel stack for RPG, or Residential Power Generator. Recirculation of reformed gas increases the amount of H2 and CO, which are combustible gases, especially the amount of H2. As a result, the H2 selectivity is improved, and high-quality gas can be produced.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.20 no.1
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• pp.1-11
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• 2009

In this paper, a new 1 kW power amplifier with high efficiency and high stability in a RF generator is designed and fabricated for plasma applications. The efficiency of power amplifier is improved by using class-E amplifier that consists of one push-pull MOSFET and high current drive IC instead of class-C amplifier composed of several single ended MOSFET. Switchable damper that allows selecting three different modes of amplifiers for considering efficiency and stability is added into the amplifier for plasma applications. Stable region of an early electronic discharge section is extended to VSWR of 4.5:1 compared to conventional VSWR of 3.8:1 through using switchable damper. The dimension of the amplifier is also reduced to 30 % of conventional amplifier. The 80 % efficiency of power amplifier with switchable damper is obtained the output power of 1 kW in operating frequency of 13.56 MHz. In comparison of conventional power amplifier for plasma applications, 13 % efficiency is improved.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.230-230
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• 2013

In amorphous or microcrystalline thin-film silicon solar cells, p-i-n structure is used instead of p/n junction structure as in wafer-based Si solar cells. Hence, these p-i-n structured solar cells inevitably consist of many interfaces and the cell efficiency critically depends on the effective control of these interfaces. In this study, in-situ plasma treatment process of the interfaces was developed to improve the efficiency of a-Si:H solar cell. The p-i-n cell was deposited using a single-chamber VHF-PECVD system, which was driven by a pulsed-RF generator at 80 MHz. In order to solve the cross-contamination problem of p-i layer, high RF power was applied without supplying SiH4 gas after p-layer deposition, which effectively cleaned B contamination inside chamber wall from p-layer deposition. In addition to the p-i interface control, various interface control techniques such as thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, multiple applications of thin i-layer deposition and H2 plasma treatment, H2 plasma treatment of i-layer prior to n-layer deposition, etc. were developed. In order to reduce the reflection at the air-glass interface, anti-reflective SiO2 coating was also adopted. The initial solar cell efficiency over 11% could be achieved for test cell area of 0.2 $cm^2$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.368-368
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• 2008

Ion implantation has been widely developed during the past decades to become a standard industrial tool. To comply with the growing needs in ion implantation, innovative technology for the control of ion beam parameters is required. Beam current, beam profile, ion fractions are of great interest when uniformity of the implant is an issue. Especially, it is important to measure the spatial distribution of beam power and also the energy distribution of accelerated ions. This energy distribution is influenced by the proportion of mass for ion in the plasma generator(ion source) and by charge exchange and dissociation within the accelerator structure and also by possible collective effects in the neutralizer which may affect the energy and divergence of ions. Hydrogen atom has been the object of a good study to investigate the energy distribution. Hydrogen ion sources typically produce multi-momentum beams consisting of atomic ion ($H^+$) and molecular ion ($H_2^+$ and $H_3^+$). In the beam injector, the molecular ions pass through a charge-exchanges gas cell and break up into atomic with one-half (from $H_2^+$) or one-third (from $H_3^+$) according to their accelerated energy. Burrell et al. have observed the Doppler shifted lines from incident $H^+$, $H_2^+$, and $H_3^+$ using a Doppler shift spectroscopy. Several authors have measured the proportion of mass for hydrogen ion and deuterium using an ion source equipped with a magnetic dipole filter. We developed an ion implanter with 50-KeV and 20-mA ion source and 100-keV accelerator tube, aiming at commercial uses. In order to measure the proportion of mass for ions, we designed a filter system which can be used to measure the ion fraction in any type of ion source. The hydrogen and helium ion species compositions are used a filter system with the two magnets configurations.

• Analytical Science and Technology
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• v.24 no.3
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• pp.159-167
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• 2011

In this study, the hydride vapour generator inductively coupled plasma mass spectrometry (HVGICPMS) was applied as the new analytical method to show the high accurate and reproductive data analysing the amounts of selenium and germanium being existed inside a system of plant. In order to decrease the interference effects, such as ion and molecular interference. Mini torch was used into the ICPMS instead of the conventional torch. At conditions of the different kinds and concentrations of acid solution, the different reductive conditions for composing hydride, and the different methods for making ash, the contents of selenium and germanium in lettuce were analysed. The inspection of yields and data comparison from SRM-1574 and -1570a were used for increasing the accuracy of this analysis.

• Nuclear Engineering and Technology
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• v.36 no.4
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• pp.357-363
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• 2004

A prototype long pulse ion source was developed, and the beam extraction experiments of the ion source were carried out at the Neutral Beam Test Stand (NBTS) of the Korea Superconducting Tokamak Advanced Research (KSTAR). The ion source consists of a magnetic bucket plasma generator, with multi-pole cusp fields, and a set of tetrode accelerators with circular apertures. Design requirements for the ion source were a 120kV/65A deuterium beam and a 300 s pulse length. Arc discharges of the plasma generator were controlled by using the emission-limited mode, in turn controlled by the applied heating voltage of the cathode filaments. Stable and efficient arc plasmas with a maximum arc power of 100 kW were produced using the constant power mode operation of an arc power supply. A maximum ion density of $8.3{\times}10^{11}\;cm^{-3}$ was obtained by using electrostatic probes, and an optimum arc efficiency of 0.46 A/kW was estimated. The accelerating and decelerating voltages were applied repeatedly, using the re-triggering mode operation of the high voltage switches during a beam pulse, when beam disruptions occurred. The decelerating voltage was always applied prior to the accelerating voltage, to suppress effectively the back-streaming electrons produced at the time of an initial beam formation, by the pre-programmed fast-switch control system. A maximum beam power of 0.9 MW (i.e. $70\;kV{\times}12.5\;A$) with hydrogen was measured for a pulse duration of 0.8 s. Optimum beam perveance, deduced from the ratio of the gradient grid current to the total beam current, was $0.7\;{\mu}perv$. Stable beams for a long pulse duration of $5{\sim}10\;s$ were tested at low accelerating voltages.

• Journal of the Korean Society of Safety
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• v.23 no.5
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• pp.54-60
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• 2008

The objective of this study is to obtain the optimal process condition and the maximum decomposition efficiency by measuring the decomposition efficiency, electricity consumption, and voltage in accordance with the change of the process variables such as the frequency, maintaining time period, concentration, electrode material, thickness of the electrode, the number of windings of the electrode, and added materials etc. of the harmful atmospheric contamination gases such as NO, $NO_2$, and $SO_2$ etc. with the plasma which is generated by the discharging of the specially designed and manufactured $TiO_2$ catalysis reactor and SPCP reactor. The decomposition efficiency of the NO, the standard samples, is obtained with the plasma which is being generated by the discharge of the combination effect of the $TiO_2$ catalysis reactor and SPCP reactor with the variation of those process variables such as the frequency of the high voltage generator($5{\sim}50kHz$), maintaining time of the harmful gases($1{\sim}10.5sec$), initial concentration($100{\sim}1,000ppm$), the material of the electrode(W, Cu, Al), the thickness of the electrode(1, 2, 3mm), the number of the windings of the electrode(7, 9, 11turns), basic gases($N_2$, $O_2$, air), and the simulated gas($CO_2$) and the resulting substances are analyzed by utilizing FT-IR & GC.

• Journal of Korean Society of Water and Wastewater
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• v.20 no.1
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• pp.79-85
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• 2006

Innovated technique to oxidize pollutants has been developed. The technique for this study uses plasma discharge in 2-phase (Air-Water) and is called Discharged Water Generating (DWG) system. It produces electric arc which generates not only the physical decomposing power against the pollutants but also oxidants to sterilize pollutants depending on the inlet gas species. These physical and chemical products play an important role in COD decrease and biodegradability enhancement. The enhancement of biodegradability for the refractory organic substances in aqueous solution was estimated in this study. Argon discharge reduced NBDCOD of EDTA from 58.7mg/L to 38.8mg/L, but oxygen discharge and ozonation reduced it to 37.74mg/L and 38.73mg/L respectively. Furthermore, Argon discharge changed 1181mg/L of NBDCOD of dye effluent into 606mg/L but oxygen discharge and ozonation changed it into 888mg/L and 790mg/L respectively.