• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.137-138
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• 2013

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1703-1708
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• 2004

In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ${\sim}$ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was $1.6{\times}10^{-6}$ Torr for three-stage DTDP (channel disk-type rotor), $2.5{\times}10^{-6}$ Torr for four-stage DTDP (planar disk-type rotor).

• ETRI Journal
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• 제27권1호
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• pp.122-125
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• 2005

A polymer-based planar-lightwave-circuit-type variable optical attenuator (VOA) was fabricated using a hot embossing process. With an optimized one-step embossing process, forty micro-channels for the guidance of light were defined on a polymer thin film with an accuracy of ${\pm}0.5{\mu}m$. The fabricated polymeric thermo-optic VOA shows 30 dB attenuation with 110 mW electrical input power at $1.55{\mu}m$. The rise and fall times are less than 5 ms.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1658-1665
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• 1989

Reactor design considerations over several critical parameters for a planar type reactive ion etcher are given. The etch uniformity is taken as a principal design constraint. The characteristics of economicaly available vacuum pumping system are taken as practical design constraints. A set of theoretical conditions on the chamber geometry and on the gas delivery and vacuum system, that satisfy the design constraints, are derived from basic properties of RF glow discharge and gas dynamics. The theoretical results are applied to decide design parameters of a practical single-wafer-per-chamber planar type reactive ion etching machine.

• 한국정밀공학회지
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• 제20권3호
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• pp.97-104
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• 2003

This paper proposes a new parallel manipulator fur plane motion, and then discusses on the workspace and kinematical characteristics of the manipulator. The conventional planar parallel manipulators have some disadvantages which are complex non-closed type direct kinematics, workspaces containing useless voids, and concave type border tines of workspaces. The proposed planar parallel manipulator overcomes the above disadvantages, that is, the manipulator has simple closed type direct kinematics, a void-free workspace, and a convex type borderline of a workspace. This paper shows the simulation result of the workspace as well as performances indices using a homogeneous inverse Jacobian.

• 전기학회논문지P
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• 제58권4호
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• pp.609-614
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• 2009

A fuel-cell power system among various alternative power sources has many advantages such as comparatively independable circumstances, high-efficient, and heat-recyclable, thus it is now able to be up to hundreds MWh-scaled through improving feasibility and longevity of it. During the last few decades, numerous research results has been investigated to expand interest in fuel-cell technology. This study presents pressure distribution on the geometrical manifold structures, which are U-type and Z-type, of a planar-type fuel-cell stack by simulated with computational fluid dynamics(CFD). Then, electrical performance of a 200W fuel-cell stack, which is U-type, was diagnosed after pre-conditioning operation. The stack has electrical characteristics ; 22V, 10A, 220W, and current density $200mA/cm^2$.

• 한국정밀공학회지
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• 제20권4호
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.13-13
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• 2010

In this paper, the electrical characteristics of Fin-type SONOS (Silicon-Oxide-Nitride-Oxide-Silicon) flash memory and Planar-type SONOS flash memory are analyzed. Compared to the Planar-type SONOS device, Fin-type SONOS device shows a good short channel effect immunity. Moreover, memory characteristics such as PIE speed, Endurance and Retention of FinFET SONOS flash are batter than that of conventional Planar-type SONOS flash memory.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.879-880
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.623-624
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• 2008