• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.2
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.4
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• pp.558-561
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• 1996

PZT powders were prepared by the molten salt synthesis method. The porous PZT ceramics were made from a mixture of PZT and polyvinylalcohol(PVA) by BURPS(Burnout Plastic Sphere) technique. The porous PZT bodies were fabricated from the green compacts with various amounts of PVA spheres. The piezoelectric coefficient d$_{33}$ (334~350*10$^{-12}$ C/N)of porous PZT ceramics(364*10$^{-12}$ C/N). The figure of merit(d$_{h}$g$_{h}$) of porous PZT specimens evaluating the sensitivity for ultrasonic transducer applications was improved significantly(11~70times) in comparison with that of single phase PZT ceramics(100*10$^{-15}$ m$^{2}$/N). The thickness mode coupling factor k$_{t}$(0.5~0.6) of porous specimens was comparable with that of single phase PZT ceramics(k$_{t}$=0.7). The mechanical quality factor of porous PZT specimens was smaller than 10, and thus these porous PZT ceramics would be believed as a good candidate for broad band hydrophone applications. (author). 10 refs., 7 figs.igs.igs.

• Computers and Concrete
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• v.8 no.5
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• pp.563-581
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• 2011

The signal-based acoustic emission (AE) characterization of concrete fracture process utilizing home-programmed AE monitoring system was performed for three kinds of static loading tests (Cubic-splitting, Direct-shear and Pull-out). Each test was carried out to induce a distinct fracture mode of concrete. Apart from monitoring and recording the corresponding fracture process of concrete, various methods were utilized to distinguish the characteristics of detected AE waveform to interpret the information of fracture behavior of AE sources (i.e. micro-cracks of concrete). Further, more signal-based characters of AE in different stages were analyzed and compared in this study. This research focused on the relationship between AE signal characteristics and fracture processes of concrete. Thereafter, the mode of concrete fracture could be represented in terms of AE signal characteristics. By using cement-based piezoelectric composite sensors, the AE signals could be detected and collected with better sensitivity and minimized waveform distortion, which made the characterization of AE during concrete fracture process feasible. The continuous wavelet analysis technique was employed to analyze the wave-front of AE and figure out the frequency region of the P-wave & S-wave. Defined RA (rising amplitude), AF (average frequency) and P-wave & S-wave importance index were also introduced to study the characters of AE from concrete fracture. It was found that the characters of AE signals detected during monitoring could be used as an indication of the cracking behavior of concrete.

• Journal of Electrical Engineering and information Science
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• v.3 no.2
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• pp.239-244
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• 1998

Piezoelectric pressure sensors and pyroelectric infrared detectors based on ZnO thin film have been integrated with GaAs metal-semiconductor field effect transistor (MESFET) amplifiers. Surface micromachining techniques have been applied in a GaAs MESFET process to form both microsensors and electronic circuits. The on-chip integration of microsensors such as pressure sensors and infrared detectors with GaAs integrated circuits is attractive because of the higher operating temperature up to 200 oC for GaAs devices compared to 125 oC for silicon devices and radiation hardness for infrared imaging applications. The microsensors incorporate a 1${\mu}$m-thick sputtered ZnO capacitor supported by a 2${\mu}$m-thick aluminum membrane formed on a semi-insulating GaAs substrate. The piezoelectric pressure sensor of an area 80${\times}$80 ${\mu}$m2 designed for use as a miniature microphone exhibits 2.99${\mu}$V/${\mu}$ bar sensitivity at 400Hz. The voltage responsivity and the detectivity of a single infrared detector of an area 80${\times}$80 $\mu\textrm{m}$2 is 700 V/W and 6${\times}$108cm$.$ Hz/W at 10Hz respectively, and the time constant of the sensor with the amplifying circuit is 53 ms. Circuits using 4${\mu}$m-gate GaAs MESFETs are fabricated in planar, direct ion-implanted process. The measured transconductance of a 4${\mu}$m-gate GaAs MESFET is 25.6 mS/mm and 12.4 mS/mm at 27 oC and 200oC, respectively. A differential amplifier whose voltage gain in 33.7 dB using 4${\mu}$m gate GaAs MESFETs is fabricated for high selectivity to the physical variable being sensed.

• Journal of Power Electronics
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• v.16 no.3
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• pp.1226-1235
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• 2016

For wearable health monitoring systems, a fundamental problem is the limited space for storing energy, which can be translated into a short operational life. In this paper, a highly efficient active voltage doubling rectifier with a wide input range for micro-piezoelectric energy harvesting systems is proposed. To obtain a higher output voltage, the Dickson charge pump topology is chosen in this design. By replacing the passive diodes with unbalanced-biased comparator-controlled active counterparts, the proposed rectifier minimizes the voltage losses along the conduction path and solves the reverse leakage problem caused by conventional comparator-controlled active diodes. To improve the rectifier input voltage sensitivity and decrease the minimum operational input voltage, two low power common-gate comparators are introduced in the proposed design. To keep the comparator from oscillating, a positive feedback loop formed by the capacitor C is added to it. Based on the SMIC 0.18-μm standard CMOS process, the proposed rectifier is simulated and implemented. The area of the whole chip is 0.91×0.97 mm², while the rectifier core occupies only 13% of this area. The measured results show that the proposed rectifier can operate properly with input amplitudes ranging from 0.2 to 1.0V and with frequencies ranging from 20 to 3000 Hz. The proposed rectifier can achieve a 92.5% power conversion efficiency (PCE) with input amplitudes equal to 0.6 V at 200 Hz. The voltage conversion efficiency (VCE) is around 93% for input amplitudes greater than 0.3 V and load resistances larger than 20kΩ.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.12
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• pp.815-819
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• 2014

Aluminum nitride (AlN) thin film and TiN film as a buffer layer were deposited on INCONEL 600 substrate by reactive RF magnetron sputtering at room temperature(R.T.) under 25~75% $N_2/Ar$ atmosphere. The as-deposited AlN films at 25~50% $N_2/Ar$ showed a polycrystalline phase of hexagonal AlN, and an amorphous phase. The peak of AlN (002) plane, which was determinant on a performance of piezoelectric transducer, became strong with increasing the $N_2/Ar$ ratio. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. The piezoelectric sensing properties of AlN module were performed using pressure-voltage measurement system. The output signal voltage of AlN module showed a linear behavior between 20~80 mV in 1~10 MPa range, and the pressure-sensing sensitivity was calculated as 3.6 mV/MPa.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.4
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• pp.100-108
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• 2019

In this paper, a new stacked element pressure sensor has proposed for heartbeat and respiration measurement. This device can be directly attached to an individual's chest; heartbeat and respiration are detected by the pulsatile vibration and deformation of the chest. A key feature of the device is the simultaneous measurement of heart rate and respiration. The structure of the sensor consists of two stacked elements, in which one element includes one polyvinylidene fluoride (PVDF) thin film bonded on polydimethylsiloxane (PDMS) substrate. In addition, for the measurement and signal processing, the electric circuit and the filter are simply constructed with an OP-amp, resistance, and a capacitor. One element (element1, PDMS) maximizes the respiration signal; the other (element2, PVDF) is used to measure heartbeat. Element1 and element2 had sensitivity of 0.163V/N and 0.209V/N, respectively, and element2 showed improved characteristics compared with element1 in response to force. Thus, element1 and element2 were optimized for measuring respiration heart rate, respectively. Through mechanical and vivo human tests, this sensor shows the great potential to optimize the signals of heartbeat and respiration compared with commercial devices. Moreover, the proposed sensor is flexible, light weight, and low cost. All of these characteristics illustrate an effective piezoelectric pressure sensor for heartbeat and respiration measurements.

• The Journal of the Acoustical Society of Korea
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• v.41 no.3
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• pp.278-286
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• 2022

In this study, a 33-mode Free-Flooded Ring (FFR) transducer was designed to apply piezoelectric single crystal PIN-PMN-PT, which has high piezoelectric constants and electromechanical coupling coefficient. To ensure low-frequency high transmitting sensitivity characteristics with a small size of FFR transducer, the commercial FFR transducer based on piezoelectric ceramics was compared. To develop the FFR transducer with broadband characteristics, a piezoelectric segmented ring structure inserted with inactive elements was applied. The oil-filled structure was applied to minimize the change of acoustic characteristics of the ring transducer. It was verified that the transmitting voltage response, underwater impedance, and beam pattern matched the finite element numerical simulation results well through an acoustic test. The difference in the transmitting voltage response between the measured and the simulated results is about 1.3 dB in cavity mode and about 0.3 dB in radial mode. The fabricated FFR transducer had a higher transmitting voltage response compared to the commercial transducer, but the diameter was reduced by about 17 %. From this study, it was confirmed that the feasibility of a single crystal-applied FFR transducer with compact size and high-power characteristics. The effectiveness of the performance prediction by simulation was also confirmed.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.16-23
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• 1999

When a moving piezoelectric transducer detects an object in water, its receiving sensitivity is attenuated by Doppler effect. In this paper, a method for compensating the effect is suggested by using a newly designed condenser of which capacitance is varied according to the moving speed of the transducer. Using the method, the receiving resonant frequency of the transducer can be changed automatically. As a result, there is good agreement between the results of experiment and those of calculation. It is confirmed that the response sensitivity degradation of transducers due to Doppler effect can be compensated in the range of $1{\sim}10^m/_s$ moving speed.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1545_1546
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• 2009

This paper reports a novel wireless love-wave biosensor on $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate and $SiO_2$ guiding layer for Immunoglobulin G (IgG) detection by protein binding. Different from the traditional biosensors based on surface acoustic wave (SAW) oscillator structured by delay line/resonators, a 440MHz reflective delay line consists of SPUDTs and three reflectors placed on $41^{\circ}$ YX $LiNbO_3$ in a row was fabricated as the sensor element. Good linearity, reproducibility, and high sensitivity were observed in the IgG concentration range 1~65nM. Unique advantages as high sensitivity, passive and simple measurement system are present over currently available other biosensors.