Fabrication of AlN Thin Film by Reactive RF Magnetron Sputtering and Sensing Characteristics of Oil Pressure
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Seok, Hye-Won
(Electronic Materials & Module Team, Korea Institute of Ceramics Engineering and Technology)
Kim, Sei-Ki (Electronic Materials & Module Team, Korea Institute of Ceramics Engineering and Technology) Kang, Yang-Koo (Electronic Materials & Module Team, Korea Institute of Ceramics Engineering and Technology) Hong, Yeon-Woo (Electronic Materials & Module Team, Korea Institute of Ceramics Engineering and Technology) Lee, Young-Jin (Electronic Materials & Module Team, Korea Institute of Ceramics Engineering and Technology) Ju, Byeong-Kwon (Display and Nanosystem Lab, Korea University) |
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