• 한국생산제조학회지
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• 제9권5호
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• pp.144-149
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• 2000

The demands for robotic and automatic system are continually increasing in manufacturing fields. There have been many studies to monitor and predict the system, but they have mainly focused upon measuring cutting force, and current of motor spindle, and upon using acoustic sensor, etc. In this study, time series sequence of cutting force was acquired by taking advantage of piezoelectric type tool dynamometer. Radial cutting force was obtained from it and was available for useful observation data. The parameter was estimated using PAA(parameter adaptation algorithm) from observation data. ARMA(auto regressive moving average) model was selected for system model and second order was decided according to parameter estimation. Uncorrelation test was also carried out to verify convergence of parameter.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.690-693
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• 2002

This paper is concerned on method of simultaneous force(stress) and temperature sensing with PVDF film. PVDF film has piezoelectric and pyroelectric properties. Therefore, it senses changes of stress and temperature. But it's output is affected with two properties. Using different medium in a sensing element, this problem is solved. Two structures induce different equations that its solutions are changes of stress and temperature. This method and result is applicable in skin sensor that has complexity of material and structure.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.40-45
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• 1999

The demands for robotic and automatic system are continually increasing in manufacturing fields. There have been many studies to monitor and predict the system, but they have mainly focused upon measuring cutting force, and current of motor spindle, and upon using acoustic sensor, etc.In this study, time series sequence of cutting force was acquired by taking advantage of piezoelectric type tool dynamometer. Radial cutting force was obtained from it and was available for useful observation data. The parameter was estimated using PAA (parameter adaptation algorithm) from observation data. ARMA(auto regressive moving average) model was selected for system model and second order was decided according to parameter estimation. Uncorrelation test was also carried out to verify convergence of parameter.

• 전기학회논문지
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• 제59권2호
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• 대한인간공학회지
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• 제11권2호
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• pp.23-33
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• 1992

The distribution of the pressure between the sole of a feet and a supporting surface can reveal the information about the structure and fonction of the foot and the posural control of the whole body. In particular, the measurement of the vertical contact forces between the plantar surface of the foot and the shoe insole is of great importance to reveal the loading distributio patterns incurred from a particular shoe midsole design. In order to investigate the plantar surface pressure distribution, an insole-type sensor with a piezoelectric material is developed and tested. The present paper describes a new method to completely reduce both the shear force and pyroelectric effects that are normally caused from piezoelectric materials.

• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.313-320
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

• 대한기계학회논문집A
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• 제29권7호
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• pp.983-989
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• 2005

The effects of mechanical parameters on the characteristics of chemical mechanical polishing(CMP) can be directly evaluated by friction force. The piezoelectric quartz sensor for friction force measurement was installed, and friction force could be detected during CMP process. Furthermore, friction energy can be calculated by multiplying relative velocity by integration of the friction force throughout the polishing time. $SiO_2$ slurry for interlayer dielectric(ILD) CMP was used in this experiment to consider the relation of frictional characteristics and polishing results. From this experiment, it is proven that the friction energy is an essential factor of removal rate. Also, the friction force is related to removal amount per unit length(dH/ds) and friction energy has corelation to the removal rate(dH/dt) and process temporature. Moreover, within wafer non-unifornity(WIWNU) is related to coefficient of friction because of the mechanical moment equilibrium. Therefore, the prediction of polishing result would be possible by measuring friction force.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 화약ㆍ발파
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• 제35권3호
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• pp.15-20
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• 2017

발파 하중에 대한 암석의 동적 응답 특성을 획득하기 위해서는, 내충격 고감도의 충격하중센서가 필요하다. 이러한 충격 하중 센서는 석영(quartz) 하중셀, 압전소자(piezoelectric element), 변형률 게이지를 적용하여 제작되고 있으나, 석영 및 압전소자의 경우 고가이기 때문에, 충격하중가압시험과 같이 압력 센서의 손상이 빈번한 경우에는 제약이 따르게 된다. 본 연구에서는 원통형 압축셀에 변형률 게이지 측정원리를 적용한 내충격 고감도 하중센서를 개발하였다. 개발된 하중 센서는 Nonex Rock Cracker (NRC) 구동 고속충격 하중 장치를 이용한 화강암 동적 압열 인장 실험에 적용하여 동적하중이력의 측정에 적용되었다. 그 결과, NRC 구동 고속충격하중장치는 암석 강도의 중간 변형률 속도 의존성 연구에 적용 가능한 것으로 파악되었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.442-448
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• 2008

This paper presents an approach to define an optimal piezoactuator length to actively control structural vibration. The optimal ratio of the piezoactuator length against beam length when a pair of piezoceramic actuator and accelerometer is used to suppress unwanted vibration with direct velocity feedback (DVFB) control strategy is not clearly defined so far. It is well known that direct velocity feedback (DVFB) control can be very useful when a pair of sensor and actuator is collocated on structures with a high gain and excellent stability. It is considered that three different collocated pairs of piezoelectric actuators (20, 50 and 100 mm) and accelerometers installed on three identical clamped-clamped beams (300 * 20 * 1 mm). The response of each sensor-actuator pair requires strictly positive real (SPR) property to apply a high feedback gain. However the length of the piezoactuator affects SPR property of the sensor-actuator response. Intensive simulation and experiment shows the effect of the actuator length variation is strongly related with the frequency range of SPR property. A shorter actuator gave a wider SPR frequency range as a longer one had a narrower range. The shorter actuator showed limited control performance in spite of a higher gain was applied because the actuation force was relatively small. Thus an optimal length ratio (actuator length/beam length) was suggested to obtain relevant performance with good stability with DVFB strategy. The result of this investigation could give important information in the design of active control system to suppress unwanted vibration of smart structures with piezoelectric actuators and accelerometers.