• Composites Research
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• 제15권5호
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• pp.7-13
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• 2002

압전필름센서는 복합재 구조물의 저속충격응답을 관측하기에 우수한 특성을 지니고 있다. 본 연구에서는 Gr/Ep 복합재 적층판이 손상이 발생할 수 있을 정도의 충격에너지를 받았을 때 압전필름센서 신호를 이용하여 충격거동을 모니터링할 수 있는 가능성에 대하여 고찰하였다. 손상이 발생하지 않는 저에너지 충격조건부터 국부적인 손상을 유발할 수 있는 충격조건까지 압전필름센서가 부착된 Gr/Ep 복합재 적층판에 대하여 16가지의 저속충격시험을 수행하였다. 세 가지 조거의 충격시험에서 기지균열 및 층간분리 등의 국부적인 손상이 발생하였으나, 충격력과, 변위, 변형률, 압전센서 신호와의 관계를 이용한 선형해석 모델을 사용하여 충격하중에 의한 복합재 적층판의 응답을 예측하는 정방향 문제와 압전센서 신호로부터 충격력을 복원하는 역방향 문제에서 시험과 해석 결과는 비교적 잘 일치하는 경향을 보였다. 복원된 충격력으로부터 국부적인 손상이 발생할 정도의 충격까지는 압전필름센서 신호를 이용하여 충격력을 정확히 복원할 수 있음을 확인하였다.

• Composites Research
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• 제13권6호
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• pp.47-54
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• 2000

복합재 구조물의 저속충격탐지 방법 중의 하나는 고분자 압전센서를 이용하는 것이다. 본 논문에서는 저속충격을 받는 복합재 평판에 대한 충격력과 부착된 스트레인 게이지, 고분자 압전센서 신호와의 관계를 유도하였다. 압전센서의 등가회로도를 통해서 고분자 압전센서의 개회로 신호와 폐회로 신호와의 관계를 유도하여 전하증폭기를 사용하지 않은 고분자 압전센서 신호를 이용하여 복합재 평판의 충격력 복원 가능성에 대한 연구로 확장하였다. 진동실험을 통하여 얻은 복합재 평판의 고유진동수와 감쇠비를 이용하여 해석적인 모델을 수정하여 정방향 문제와 역방향 문제에 있어서 오차를 줄일 수 있었다. 복원된 충격력과 해석적인 센서 신호는 실제 저속 충격 실험을 통하여 측정한 충격력, 스트레인 게이지 신호, 그리고 고분자 압전센서 신호와 잘 일치하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.622-625
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• 2004

The CMP monitoring system was newly developed by the aid of friction force measurement, resulting from installation of piezoelectric quartz sensor on R&D polisher. The correlation between friction and CMP results was investigated in terms of tribological aspects by using the monitoring system. Various friction signals were monitored and analyzed by the change of experimental conditions such as pressure, velocity, pad and slurry. First of all, the lubrication regimes were classified with Sommerfeld Number through measuring coefficient of friction in ILD CMP. And then, the removal mechanism of abrasives could be understood through the correlation with removal rate and coefficient of friction. Especially, the amount of material removal per unit sliding distance is directly proportional to the friction force. The uniformity of CMP performances was also deteriorated as coefficient of friction increased.

• Smart Structures and Systems
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• 제10권1호
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• pp.33-46
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• 2012

To reduce the vibration of cable-stayed bridges, conventional magnetorheological (MR) damper control system (CMRDS), with separate power supply, sensors and controllers, is widely investigated. In this paper, to improve the reliability and performance of the control system, one adaptive MR damper control system (AMRDS) consisting of MR damper and piezoelectric energy harvester (PEH) is proposed. According to piezoelectric effect, PEH can produce energy for powering MR damper. The energy is proportional to the product of the cable displacement and velocity. Due to the damping force changing with the energy, the new system can be adjustable to reduce the cable vibration. Compared with CMRDS, the new system is structurally simplified, replacing external sensor, power supply and controller with PEH. In the paper, taking the N26 cable of Shandong Binzhou Yellow River Bridge as example, the design method for the whole AMRDS is given, and simple formulas for PEH are derived. To verify the effectiveness of the proposed adaptive control system, the performance is compared with active control case and simple Bang-Bang semi-active control case. It is shown that AMRDS is better than simple Bang-Bang semi-active control case, and still needed to be improved in comparison with active control case.

• 센서학회지
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• 제28권4호
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• pp.205-215
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• 2019

A flexible polyvinylidene fluoride (PVDF)/polydimethylsiloxane (PDMS) composite prototype with high piezoelectricity and force sensitivity was constructed, and its huge potential for applications such as biomechanical energy harvesting, self-powered health monitoring system, and pressure sensors was proved. The crystallization, piezoelectric, and electrical properties of the composites were characterized using an X-ray diffraction (XRD) experiment and customized experimental setups. The composite can sustain up to 100% strain, which is a huge improvement over monolithic PVDF fibers and other PVDF-based composites in the literature. The Young's modulus is 1.64 MPa, which is closely matched with the flexibility of the human skin, and shows the possibility for integrating PVDF/PDMS composites into wearable devices and implantable medical devices. The $300{\mu}m$ thick composite has a 14% volume fraction of PVDF fibers and produces high piezoelectricity with piezoelectric charge constants $d_{31}=19pC/N$ and $d_{33}=34pC/N$, and piezoelectric voltage constants $g_{31}=33.9mV/N$ and $g_{33}=61.2mV/N$. Under a 10 Hz actuation, the output voltage was measured at 190 mVpp, which is the largest output signal generated from a PVDF fiber-based prototype.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.413-417
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• 1997

Distributed piezoelectric sensor and actuator have been designed for efficient vibration control of a cantilevered beam. Both PZT and PVDF are used in this study, the former as an actuator and the latter as a sensor for our integrated structure. For the PZT actuator, the position and size have been optimized. Optimal electrode shape of the PVDF sensor has been determined. For multi-mode vibration control, we have used two PZT actuators and a PVDF sensor. Electrode shading of PVDF is more powerful for modal force adjustment than the sizing and positioning of PZT. Finite element method is used to model the structure that includes the PZT actuator and the PVDF sensor. By deciding on or off of each PZT segment, the length and the location of the PZT actuator are optimize. Considering both of the host structure and the optimized actuators, it is designed that the active electrode width of PVDF sensor along the span of the beam. Actuator design is based on the criterion of minimizing the system energy in the control modes under a given initial condition. Sensor is designed to minimize the observation spill-over. Modal control forces for the residual(uncontrolled) modes have been minimized during the sensor design. Genetic algorithm, which is suitable for this kind of discrete problems, has been utilized for optimization. Discrete LQG control law has been applied to the integrated structure for real time vibration control. Performance of the sensor, the actuator, and the integrated smart structure has been demonstrated by experiments.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.489.2-489.2
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• 2014

The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.

• 세라미스트
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• 제7권3호
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations