• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1723-1725
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• 1999

This paper is the study for piezoelectric properties of PMN-PT-PZ composition for high power piezoelectric device. It needs the properties such as high mechanical quality factor(Qm), high electromechanical coupling coefficient(kp) and high dielectric strain constant$(d_31)$, and the stable electromechanical properties under high vibration level. For acquiring this results, the value of x is changed in 0.1Pb$(Mn_{1/3}Nb_{2/3})O_3$+(0.9-x)$PbZrO_3+xPbTiO_3$ composition to find MPB(morphotropic phase boundary), and the piezoelectric constants is measured by resonance-antiresonance frequency method, based on IRE Standard. Also, it is measured as a function of the amount of additive, $Nb_2O_5$. When the composition is applied to high power device, the electromechanical properties is measured by laser vibrometer to confirm the reliablity under high vibration level. From these results, PMN-PT-PZ composition is shown excellent properties and capacity of application to high power device.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.622-622
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• 2013

Piezoelectric energy harvesting (PEH) device refers to a power device for acquiring mechanical energy from the environment surrounding us which would otherwise be wasted and for converting it into usable electrical energy. While much work has been done on developing ZnO nanogenerator (NG) with nanowire arrays, there are some issues of not only scaling up its output power but also optimizing structure for operating feasibly in various conditions. Efficiency of NG is highly dependent on fixed orientation. But in many cases, it is not easy to predict where the pressure and vibration may come from. Furthermore, the direction of the applied mechanical stress is usually non-stationary and can be random in various practical applications. Therefore an omnidirectional PEH is needed.In this work, we investigate an omnidirectional PEH device consisting ZnO nanowires. We deposited spiral patterned ZnO seed layer on Kapton film. We deposited thin Cr layer on the ZnO seed layer using DC-sputter to form a passivation layer to retard un-expected growth of ZnO nanowires. We grew ZnO nanowires along the spiral arms using hydrothermal method. ZnO nanowires have been selectively grown from the ZnO sidewall without Cr layer and have the average length of$5{\mu}m$ and the average diameter of 40nm. We reduced the defect in the as-grown ZnO nanowires by O2 plasma using asher and by thermal treatment using RTA. Consequently, each nanowire has different directions to each other. This isotropic design can lead to the omnidirectional power generation. The morphology of NG is characterized with FESEM. Maximum output power of the device is measured by using a picoammeter and a nanovoltmeter.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.2
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• pp.157-160
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• 2019

P(VDF-TrFE-CFE) (Poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene)), which exhibits a high electrostriction of about 7%, can transmit tactile output as vibration or displacement. In this study, we investigated the applicability of P(VDF-TrFE-CFE) to wearable piezoelectric actuators. The P(VDF-TrFE-CFE) layers were deposited through spin-coating, and interspaced with patterned Ag electrodes to fabricate a two-layer $3.5mm{\times}3.5mm$ device. This layered structure was designed and fabricated to increase the output and displacement of the actuator at low driving voltages. In addition, a laser vibrometer and piezoelectric force microscope were used to analyze the device's vibration characteristics over the range of ~200~4,200 Hz. The on-off characteristics were confirmed at a frequency of 40 Hz.

• Journal of Sensor Science and Technology
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• v.31 no.5
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• pp.312-317
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• 2022

Piezoelectric energy harvesting has attracted increasing attention over the last decade as a means for generating sustainable and long-lasting energy from wasted mechanical energy. To develop self-powered wearable devices, piezoelectric materials should be flexible, stretchable, and bio-eco-friendly. This study proposed the fabrication of stretchable piezoelectric composites via dispersing perovskite-structured BaTiO₃ nanoparticles inside an Ecoflex polymeric matrix. In particular, the stretchable piezoelectric sensor array was fabricated via a simple and cost-effective spin-coating process by exploiting the piezoelectric composite comprising of BaTiO₃ nanoparticles, Ecoflex matrix, and stretchable Ag coated textile electrodes. The fabricated sensor generated an output voltage of ~4.3 V under repeated compressing deformations. Moreover, the piezoelectric sensor array exhibited robust mechanical stability during mechanical pushing of ~5,000 cycles. Finite element method with multiphysics COMSOL simulation program was employed to support the experimental output performance of the fabricated device. Finally, the stretchable piezoelectric sensor array can be used as a self-powered touch sensor that can effectively detect and distinguish mechanical stimuli, such as pressing by a human finger. The fabricated sensor demonstrated potential to be used in a stretchable, lead-free, and scalable piezoelectric sensor array.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.7
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.220-221
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• 2008

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31 type triple-morph cantilever was resulted from the conditions of 100k$\Omega$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of $6.57V_{rms}$, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.414-417
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• 2001

Recently, developments of device using characteristics of ceramics as a new technical material is in progress. While doing so, Ultrasonic motor which is a part of research & flat-type $L_1-B_8$ mode Ultrasonic motor and measured the operation characteristics of its. The size of USM is 80*20*1.5[$mm{^1}$](length*width*thickness) and is constructed with stator by piezo-ceramics and stainless elastic body and rotator by bearings. As results of experiments, the fastest speed of revolution($\upsilon$), the maximum torque(T) and the efficiency($\eta$) were 37.5[cm/sec], 5.0[mN$\cdot$M] and 1.17[%] respectively when 27.9[kHz], 150[gf], 50[V] were applied. SO, we think this flat-type $L{_1}-B{_8}$ mode Ultrasonic motor is able to be used for applications in forwarding device of a paper or electric card so on. Key Words: Flat=type $L{_1}-B{_8}$ mode Ultrasonic Motors, Piezoelectric ceramics, forwarding device.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.3
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• The Korean Journal of Ceramics
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• v.5 no.2
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• pp.171-177
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• 1999

In the $(Pb_{1-x}M_x)[(Mn_{1/3}Sb_{2/3})_{0.05}Zr_yTi_{0.95-y}]O_3$ system, where M=Ca and Sr, the piezoelectric properties were evaluated to examine the possibility of application to piezoelectric transformer. A Rosen-type piezoelectric transformer was formed, then the electrical properties of voltage step-up ratio, frequency characteristics etc. were analysed. The morphotropic phase boundary was determined to be y=0.475 in $Pb[(Mn_{1/3}Sb_{2/3})_{0.05}Zr_yTi_{0.95-y}]O_3$ system and the piezoelectric properties of this composition was kp=0.59, Qm=1600 and $\varepsilon_r$=1150. Moreover, when 1-2 mol% of Sr are substituted, enhanced piezoelectric properties of kp=0.61, Qm=1600 and $\varepsilon_r$=1400 were shown. The temperature rising (ΔT) of a piezoelectric transformer with $Pb[Mn_{1/3}Sb_{2/3})_{0.05}Zr_{0.475}Ti_{0.475})]O_3 $ composition was $10^{\circ}C$, and the voltage step-up ratio was 500 when the output voltage was 4000V, whereas the ΔT was below $3^{\circ}C$ and the resonant frequency variation ($\Delta f_r$) as a function of load resistance was below 5% when the output voltage was 2000 V. These characteristics are superior to the properties of materials, which were substituted by Ca or without substitution.