• 한국전기전자재료학회논문지
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• 제30권8호
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• pp.501-507
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• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• 한국전기전자재료학회논문지
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• 제24권5호
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2002년도 마이크로/바이오 가시화기술부문 학술강연회
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• 한국전기전자재료학회논문지
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• 제26권11호
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• pp.831-835
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• 2013

In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.

• 한국재료학회지
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• 제17권12호
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• pp.660-663
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• 2007

Piezoelectric energy harvesting from our surrounding vibration has been studied for driving the wireless sensor node. To change the vibration energy into the electric-energy efficiently, the natural frequency of cantilever needs to be adjusted to that of a vibration source. When adding 6.80g mass on the end of the fabricated cantilever, a natural frequency shifts from 136 Hz into 49.5 Hz. In addition, electro-mechanical coupling factor increased from 10.20% to 11.90% and resulted in the 1.18 times increase of maximum output power.

• 한국전기전자재료학회논문지
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• 제24권11호
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• pp.865-869
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• 2011

A cantilever-type piezoelectric generator has advantages of simple structure, ease of fabrication and large displacement by transverse vibration of a beam. It is easy to control the natural frequency, and also possible to increase the output power by changing the length, width, and thickness of the generator. In particular, the length increases, the natural frequency sharply decreases, and vice versa. Hence, the natural frequency can widely be controlled by using change in the length of elastic body. In this paper, the generator was designed and fabricated to change natural frequency using the slides of the case. In addition, the generating characteristics were confirmed through finite element analyses and vibration experiment. As a result, the maximum output characteristics could be generated due to resonance phenomenon although any frequency of external force was applied.

• 대한토목학회논문집
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• 제31권4A호
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• pp.287-293
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• 2011

본 연구에서는 교량의 진동을 이용한 압전 외팔보 에너지 수확장치의 적용성을 연구하였다. 이를 위하여 압전 소자의 구성방정식과 외팔보의 진동방정식을 결합하여 외팔보의 단일 모드에 대한 연성 방정식을 행렬 형태로 구성하였다. 그리고 에너지 수확장치의 가진기 실험을 통하여 해석 모델의 타당성을 검증하였다. KTX, 새마을, 무궁화 열차가 주행할 때 측정된 교량 가속도를 바탕으로 수치해석을 통하여 산정한 에너지 수확장치의 최대 전력은 각각 28.5 mW, 0.65 mW, 0.51 mW로 나타났다. 이를 볼 때 철도와 같은 이동하중에 의한 교량의 진동은 가진 진동수와 가속도가 낮고 지속시간이 짧아서 에너지 공급원으로서 효율성이 떨어지는 것으로 판단된다.

• 한국전기전자재료학회논문지
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• 제31권7호
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• pp.462-468
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• 2018

The piezoelectric energy harvesting characteristics of a trapezoidal cantilever generator with lead zirconate titanate (PZT) laminate were investigated with various Ag inner electrodes. The piezoelectric mode of operation was a transverse mode by using a planar electrode pattern. The piezoelectric cantilever generator was fabricated using trapezoidal cofired-PZT/Ag laminates by five specimens of 2, 3, 4, 7, and 13 layers of Ag. As the number of Ag electrodes increased, impedance and output voltage at resonant frequency significantly decreased, and capacitance and output current showed an increasing tendency. A maximum output power density of $7.60mW/cm^3$ was realized for the specimen with seven Ag layers in the optimal condition of acceleration (1.2 g) and resistive load ($600{\Omega}$), which corresponds to a normalized power factor of $5.28mW/g^2{\cdot}cm^3$.

• Smart Structures and Systems
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• 제19권5호
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• pp.567-576
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• 2017

Design of piezoelectric energy harvester for a wide operating frequency range is a challenging problem and is currently being investigated by many researchers. Widening the operating frequency is required, as the energy is harvested from ambient source of vibration which consists of spectrum of frequency. This paper presents a new technique to increase the operating frequency range which is achieved by designing a harvester featured by a propped cantilever beam with variable over hang length. The proposed piezoelectric energy harvester is modeled analytically using Euler Bernoulli beam theory and the effectiveness of the harvester is demonstrated through experimentation. The results from analytical model and from experimentation reveal that the proposed energy harvester generates an open circuit output voltage ranging from 36.43 V to 11.94 V for the frequency range of 27.24 Hz to 48.47 Hz. The proposed harvester produces continuously varying output voltage and power in the broadened operating frequency range.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2395-2397
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• 2005

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.