• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.456-460
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• 1999

Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.3
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• pp.472-477
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• 2003

A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.562-565
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• 2008

Measuring system for piezo inkjet droplet and ink jetting status was developed. In order to measure the jetting performance, two different approaches have been used. One is to use the self-sensing capability of the piezo actuator in the printhead. The other is to use the droplet image from a CCD camera. The software as well as hardware using two approaches was developed. The self-sensing signal as well as meniscus motion was shown to be useful in monitoring jetting conditions. Furthermore, ink properties such as viscosity and speed of sound, which is related to jetting performance, can be understood.

• Smart Structures and Systems
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• v.11 no.6
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• pp.569-587
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• 2013

This paper evaluates the closed loop performance of the reaching law based discrete sliding mode controller with multisensor data fusion (MSDF) in real time, by controlling the first two vibrating modes of a piezo actuated structure. The vibration is measured using two homogeneous piezo sensors. The states estimated from sensors output are fused. Four fusion algorithms are considered, whose output is used to control the structural vibration. The controller is designed using a model identified through linear Recursive Least Square (RLS) method, based on ARX model. Improved vibration suppression is achieved with fused data as compared to single sensor. The experimental evaluation of the closed loop performance of sliding mode controller with data fusion applied to piezo actuated structure is the contribution in this work.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.151-158
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• 2005

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was $0.05{\mu}m$ and position accuracy less than $2{\mu}m$ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many fuming experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.

• Computers and Concrete
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• v.25 no.5
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• pp.471-478
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• 2020

In this work, the analytical solution for the stresses in piezo-thermo-elastic homogeneous, transversely isotropic material under the effect of the rotation has investigated. The thermoelasticity theory has used to study the problem. The material subjected to boundary conditions. Finally, the numerical solution has carried out piezo - thermo-elastic material under the effect of rotation, to illustrate the analytical development. The corresponding simulated results of various physical quantities such as the displacements and the stresses, the temperature and the electrical displacement have presented graphically.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.418-422
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• 1997

A numerical computation and experimental test have been performed for the investigation of dynamic behavior of composite beams with bonded piezo ceramics. The present finite element method based on layerwise approach can effectively evaluate the characteristics of the composite beams with bonded piezo ceramics. The natural frequencies and damping values were measured by fitting the frequency response function obtained from FFT analyzer. The frequency-dependent damping properties of composite material were measured to utilize them for the finite element analysis of the composite beams with bonded piezo ceramics. The experimental results are in good agreement with those of finite element analysis.

• ETRI Journal
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• v.29 no.1
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• pp.70-78
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• 2007

A new low-voltage CMOS interface circuit with digital output for piezo-resistive transducer is proposed. An input current sensing configuration is used to detect change in piezo-resistance due to applied pressure and to allow low-voltage circuit operation. A simple 1-bit first-order delta-sigma modulator is used to produce an output digital bitstream. The proposed interface circuit is realized in a 0.35 ${\mu}m$ CMOS technology and draws less than 200 ${\mu}A$ from a single 1.5 V power supply voltage. Simulation results show that the circuit can achieve an equivalent output resolution of 9.67 bits with less than 0.23% non-linearity error.

• Journal of ILASS-Korea
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• v.17 no.3
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• pp.158-163
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• 2012

This paper presents spray characteristics of piezo-driven type common-rail injector and comparisons to those of solenoid-driven type. Experiments were conducted to measure spray penetraion and SMD distributions using a spray visualization system and PDPA (phase Doppler particle analyzer) system. Injection conditions including injection pressure and energizing durations were varied in order to analyzing effects of injection conditions on spray characteristics. Furthermore, ambient pressures were increased for keeping ambient gas density close to in-cylinder pressure of diesel engine. Results showed that injection delay of piezo-driven type injector was much shorter than those of solenoid driven type and exhibited enhanced atomization performances.

• Smart Structures and Systems
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• v.25 no.1
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• pp.37-45
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• 2020

This paper aims at enlightening the properties, computational and implementation issues related to Kalman filter based state estimation algorithms and sliding mode observers, by applying them for estimating the states of a smart structure system. The Kalman based estimators considered in this work are Kalman filter and information filter and, the sliding mode observers considered are Utkin observer and higher order sliding mode observer. A fourth order linear time invariant model of a piezo actuated beam is used in this work. This structure is embedded with four number of piezo patches, of which two act as sensors, one as disturbance actuator and the other as control actuator. The performance of the state estimation algorithms is evaluated through simulation, for the first two vibrating modes of the piezo actuated structure, when the structure is maintained at first mode and second mode resonance.