• International Journal of Precision Engineering and Manufacturing
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• v.2 no.4
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• pp.81-88
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• 2001

We present a new digital phase measuring method for heterodyne optical interferometry, which providers high measuring speed up to 6 m/s with a fine displacement resolution of 0.1 nanometer. The key idea is combining two distinctive digital phase measuring techniques with mutually complementary characteristics to earth other one is counting the Doppler shift frequency counting with 20 MHz beat frequency for high-velocity measurement and the other is the synchronous phase demodulation with 2.0 kHz beat frequency for extremely fine displacement resolution. The two techniques are operated in switching mode in accordance wish the object speed in a synchronized way. Experimental results prove that the proposed dual mode phase measuring scheme is realized with a set of relatively simple electronic circuits of beat frequency shifting, heterodyne phase detection. and low-pass filtering.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.400-403
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• 2002

This paper presents a shearographic technique for measuring in-plane strains. During the measurement, the test object is illuminated alternately with two laser beams, symmetrically with respect to the viewing direction. Employing a phase shift technique, the phase distributions due to object deformation for each beam are obtained separately. The difference of the two phase distributions depicts the derivative of in-plane surface displacements. The technique is equivalent to a system of many strain gages.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.239-244
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• 1998

ESP(Electronic Speckle Pattern Interferometry) is an optical technique to measure deforamtion of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive measuring method, is capable of providing full-field results with high spatial resolution and high speed. One of important application aspects using electronic speckle pattern interferometry is to generate contours of a diffuse object in order to provide data for 3-D shape analysis and topography measurement. The electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and a shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring. And by this geometric analysis, we performed the electronic speckle contouring experiment. We used 4-frame phase shifting method with PZT for quantitative analysis of contour fringes. Finally, we showed good agreements between the geometric analysis and experimental results.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.2
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• pp.84-93
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• 1996

Non-destructive inspection techniques using laser have been broading their application areas as well as growing their measurement skills together with the rapid development of circumferential technology like fiber optics, computer and image processing. The ESPI technique is already on the stage of on-line testing with commercial products in developed country nations. Especially, this technique is expected to be applied to the nuclear industry, automobile and aerospace because it is proper for the vibration measurement and it can be applied to objects of a high temperature. This paper describes the use of the ESPI system for measuring vibration patterns on the reflecting objects. Using this system, high-quality Jo fringes for identifying mode shapes are displayed. A bias vibration is introduced into the reference beam to shift the Jo fringes so that fringe shift algorithms can be used to determine vibration amplitude. Using this method, amplitude fields for vibrating objects were obtained directly from the time-average interferograms recorded by the ESPI system.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.6
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• pp.116-123
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• 1998

An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detector's sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detector's sampling significantly, and interferometeric microscope's lateral resolution is improved also.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.10
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• pp.156-164
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• 1998

Electronic Speckle Pattern Interferometry(ESPI) has been used to measure surface deformations of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive technique, is capable of providing full-field results with high spatial resolution and high speed. One of the important application using electronic speckle pattern interferometry is electronic speckle contouring of a diffused object for 3-D shape analysis and topography measurement. Generally the electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and the shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. We also describe formation process of depth contour fringes and grid contour fringes by shifting direction of the two illumination beams. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring, and then, the electronic speckle contouring experiment with various specimens. For quantitative analysis of the contour fringes, we used 4-frame phase shifting method with PZT Finally, good agreement between the geometric analysis and experimetal results is obtained.

• Journal of the Optical Society of Korea
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• v.16 no.4
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• pp.354-364
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• 2012

In this paper, a new 2-step quadrature phase-shifting digital holographic optical encryption method using orthogonal polarization is proposed and tolerance errors for this method are analyzed. Unlike the conventional technique using a PZT mirror, the proposed optical setup comprises two input and output polarizers, and one ${\lambda}$/4-plate retarder. This method makes it easier to get a phase shift of ${\pi}$/2 without using a mechanically driven PZT device for phase-shifting and it simplifies the 2-step phase-shifting Mach-Zehnder interferometer setup for optical encryption. The decryption performance and tolerance error analysis for the proposed method are presented. Computer experiments show that the proposed method is an alternate candidate for 2-step quadrature phase-shifting digital holographic optical encryption applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.12
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• pp.190-197
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• 1999

Electronic speckle contouring(ESC) is the optical method for measuring shape by using fringe-projection techniques in electronic speckle pattern interferometry. It has the advantage of being non-contacting and can also give a field view of the surface under investigation. Fringes in ESC represent the difference in depth along the view direction between the master wavefront and the test component. The contour maps of three-dimensional diffuse objects are obtained by small shifts of optical fiber carrying the dual-object-beams and 4-frame phase shift. We proposed the contouring method by shifting the collimated illumination beams through optical fiber in order to obtain the contour fringe patterns. And also, we performed addition of incremental addition of images and experiments based on it. we obtained both quantitative increment without decorrelation effect and qualitative improvement by reducing the noise of contour fringes.

• Journal of the Institute of Convergence Signal Processing
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• v.12 no.3
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• pp.181-187
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• 2011

In this thesis, digital in-line holographic microscopy has been implemented with enhanced phase shifting technique. It was demonstrated that the zero-order diffraction noise and the twin image can be eliminated by phase-shifting interferometry very effectively. Also the experimental and numerical reconstruction has been incorporated into one set-up operating in real time. Experimental results and the analysis of the phase map indicate that the proposed system can be very useful for the measurement of microscopic objects and 3-D microscopy.