• 제목/요약/키워드: patterning process

검색결과 443건 처리시간 0.028초

금속 패터닝과 Blank노광을 이용한 감광성 유리의 미세가공 (Microfabrication of Photosensitive Glass Using Metal Patterning and Blank Exposure)

  • 조재승;강형범;윤혜진;김효진;임현우;조시형;임실묵
    • 한국표면공학회지
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    • 제46권3호
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    • pp.99-104
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    • 2013
  • The simple and cost-effective microfabrication method of photosensitive glass (PSG) using metal patterning and blank exposure was proposed. Conventional photolithography for micromachining of PSG needs a costly quartz mask which has high transmittance as an optical property. However, in this study the process was improved through the combination of micro-patterned Ti thin film and blank UV exposure without quartz mask. The effect of UV exposure time as well as the DHF etching condition was investigated. UV exposure test was performed within the range from 3 min to 9 min. The color and etch result of PSG exposed for 5 min were the most clear and effective to etch more precisely, respectively. The etching results of PSG in diluted hydrofluoric acid (DHF) with a concentration of 5, 10, 15 vol% were compared. The effect on the side etch was insignificant while the etch rate was proportional as the concentration increased. 10 vol% DHF results not only high etch rate of 75 ${\mu}m/min$ also lower side etch value after PSG etching. This method facilitates the microfabrication of PSG with various patterns and high aspect ratio for applying to advanced applications.

태양전지 2 단계 전극형성 공정을 위한 마스크 패턴공정 및 효율에 대한 영향성 연구 (Mask Patterning for Two-Step Metallization Processes of a Solar Cell and Its Impact on Solar Cell Efficiency)

  • 이창준;신동윤
    • 대한기계학회논문집B
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    • 제36권11호
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    • pp.1135-1140
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    • 2012
  • 마스크를 이용하여 니켈 시드층의 형성 후 실버 도금을 통해 태양전지 상부전극을 형성하는 2 단계 전극형성 공정이 태양전지의 고효율화 방안으로 제안되었다. 본 연구에서는, 자외선 경화형 혹은 상변화 잉크를 고비용의 인쇄공정을 통해 마스크를 형성하는 방법을 대신하여, 코팅과 레이저의 복합공정을 통해 마스크를 형성하는 방법에 대해 제안하도록 한다. 마스크를 형성하는 물질로서 저비용의 저융점 왁스 혹은 플루오르카본 용액을 태양전지 웨이퍼 상에 코팅 후 레이저로 선택적으로 제거하여 전극패턴을 형성하였으며, 플루오르카본 용액 코팅이 왁스 코팅보다 패턴 균일도 측면에서 우수할 뿐만 아니라 통계적으로 0.16% 태양전지 효율증대를 유발한다는 점이 발견되었다.

상이한 기판조건에 따른 PZT 적외선 감지소자의 성능 변화 (Substrate Effects on the Response of PZT Infrared Detectors)

  • 고종수;곽병만
    • 대한기계학회논문집A
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    • 제26권3호
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    • pp.428-435
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    • 2002
  • Pyroelectric $Pb(Zr_{0.3}Ti_{0.7})O_3$ (PZT30/70) thin film IR detectors has been fabricated and characterised. The PZT30/70 thin film was deposited onto $Pt/Ti/Si_3N_4/SiO_2/Si$ substrate by the sol-gel process. Four different substrate conditions were studied for their effects on the pyroelectric responses of the IR detectors. The substrate conditions were the combinations of the Si etching and the Pt/Ti patterning. In the Si etched substrate, the $Si_3N_4/SiO_2$ composite layer was used as silicon etch-stop, and was used as the membrane to support the PZT pyroelectric film element as well. The measured pyroelectric current and voltage responses of detectors fabricated on the micro-machined thin $Si_3N_4/SiO_2$ membrane were two orders higher than those of the detectors on the bulk-silicon. For detectors on the membrane substrate, the Pt/Ti patterned detectors showed a 2-times higher pyroelectric response than that of not-patterned detectors. On the other hand, the pyroelectric response of the detectors on the not-etched Si substrate was almost the same, regardless of the Pt/Ti patterning. It was also found that the rise time strongly depended on the substrate thickness: the thicker the substrate was, the longer the rise-time.

오프셋 인쇄에서의 동기화 오차 정밀 계측 및 보정 연구 (Measurement and Compensation of Synchronization Error in Offset Printing Process)

  • 강동우;김현창;이언석;최영만;조정대;이택민
    • 한국정밀공학회지
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    • 제31권6호
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    • pp.477-481
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    • 2014
  • Flexible electronics have been to the fore because it is believed that flexibility can add incredible value such as light weight and mobility into the existing electronic devices and create new markets of large-area and low-cost electronics such as wearable eletronics in near future. Offset printing processes are regarded as major candidates for manufacturing the flexible electronics because they can provide the patterning resolution of micron-size effectively in large-area. In view of mechanics, the most important viewpoint in offset printing is how to achieve the synchronized movement of two contact surfaces in order to prevent slip between two contact surfaces and distortion of the blanket surface during ink transfer so that the high-resolution and good-overlay patterns can be printed. In this paper, a novel low-cost measurement method of the synchronization error using the motor control output signals is proposed and the compensation method is presented to minimize the synchronization error.

Shape anisotropy and magnetic properties of Co/Ni anti-dot arrays

  • Deshpande, N.G.;Seo, M.S.;Kim, J.M.;Lee, S.J.;Lee, Y.P.;Rhee, J.Y.;Kim, K.W.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.444-444
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    • 2011
  • Recently, patterned magnetic films and elements attract a wide interest due to their technological potentials in ultrahigh-density magnetic recording and spintronic devices. Among those patterned magnetic structures, magnetic anti-dot patterning induces a strong shape anisotropy in the film, which can control the magnetic properties such as coercivity, permeability, magnetization reversal process, and magneto-resistance. While majority of the previous works have been concentrated on anti-dot arrays with a single magnetic layer, there has been little work on multilayered anti-dot arrays. In this work, we report on study of the magnetic properties of bilayered anti-dot system consisting of upper perforated Co layer of 40 nm and lower continuous Ni layer of 5 nm thick, fabricated by photolithography and wet-etching processes. The magnetic hysteresis (M-H) loops were measured with a superconducting-quantum-interference-device (SQUID) magnetometer (Quantum Design: MPMS). For comparison, investigations on continuous Co thin film and single-layer Co anti-dot arrays were also performed. The magnetic-domain configuration has been measured by using a magnetic force microscope (PSIA: XE-100) equipped with magnetic tips (Nanosensors). An external electromagnet was employed while obtaining the MFM images. The MFM images revealed well-defined periodic domain networks which arise owing to the anisotropies such as magnetic uniaxial anisotropy, configurational anisotropy, etc. The inclusion of holes in a uniform magnetic film and the insertion of a uniform thin Ni layer, drastically affected the coercivity as compared with single Co anti-dot array, without severely affecting the saturation magnetization ($M_s$). The observed changes in the magnetic properties are closely related to the patterning that hinders the domain-wall motion as well as to the magneto-anisotropic bilayer structure.

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펨토초 레이저 절삭 공정을 이용한 생분해성 나노섬유 표면 미세 패터닝 공정 (Micropatterning on Biodegradable Nanofiber Scaffolds by Femtosecond Laser Ablation Process)

  • 정용우;전인동;김유찬;석현광;정석;전호정
    • 한국표면공학회지
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    • 제49권6호
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    • pp.555-559
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    • 2016
  • A biodegradable nanofiber scaffolds using electrospining provide fibrous guidance cues for controlling cell fate that mimic the native extracellular matrix (ECM). It can create a pattern using conventional electrospining method, but has a difficulty to generate one or more pattern structures. Femtosecond(fs) laser ablation has much interested in patterning on biomaterials in order to distinguish the fundamental or systemic interaction between cell and material surface. The ablated materials with a short pulse duration using femtosecond laser that allows for precise removal of materials without transition of the inherent material properties. In this study, linear grooves and circular craters were fabricated on electrospun nanofiber scaffolds (poly-L-lactide(PLLA)) by femtosecond laser patterning processes. As parametric studies, pulse energy and beam spot size were varied to determine the effects of the laser pulse on groove size. We confirmed controlling pulse energy to $5{\mu}J-20{\mu}J$ and variation of lens maginfication of 2X, 5X, 10X, 20X created grooves of width to approximately $5{\mu}m-50{\mu}m$. Our results demonstrate that femtosecond laser processing is an effective means for flexibly structuring the surface of electrospun PLLA nanofibers.

Polymer Inkjet Printing: Construction of Three-Dimensional Structures at Micro-Scale by Repeated Lamination

  • Yun, Yeon-Hee;Kim, Jae-Dong;Lee, Byung-Kook;Cho, Yong-Woo;Lee, Hee-Young
    • Macromolecular Research
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    • 제17권3호
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    • pp.197-202
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    • 2009
  • Solution-based, direct-write patterning by an automated, computer-controlled, inkjet technique is of particular interest in a wide variety of industrial fields. We report the construction of three-dimensional (3D), micro-patterned structures by polymer inkjet printing. A piezoelectric, drop-on-demand (DOD) inkjet printing system and a common polymer, PVA (poly(vinyl alcohol)), were explored for 3D construction. After a systematic preliminary study with different solvent systems, a mixture of water and DMSO was chosen as an appropriate solvent for PVA inks. The use of water as a single solvent resulted in frequent PVA clogging when the nozzles were undisturbed. Among the tested polymer ink compositions, the PVA inks in a water/DMSO mixture (4/1 v/v) with concentrations of 3 to 5 g/dL proved to be appropriate for piezoelectric DOD inkjet printing because they were well within the proper viscosity and surface tension range. When a dot was printed, the so-called 'coffee-ring effect' was significant, but its appearance was not prominent in line printing. The optimal polymer inkjet printing process was repeated slice after slice up to 200 times, which produced a well-defined, 3 D micro-patterned surface. The overall results implied that piezoelectric DOD polymer inkjet printing could be a powerful, solid-freeform, fabrication technology to create a controlled 3D architecture.

Compact Disc를 마스터 몰드로 사용하는 저비용의 OFET용 유기반도체 소프트 리소그래피 (Cost-Effective Soft Lithography of Organic Semiconductors in OFETs with Compact Discs as Master Molds)

  • 박세진;김혁진;안태규
    • 접착 및 계면
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    • 제23권4호
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    • pp.116-121
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    • 2022
  • Organic field-effect transistor가 실제 전자 장치에 쓰이기 위해서는 유기반도체 용액공정용 미세 패터닝 기술이 요구된다. 본 연구에서는 기존의 스핀 코팅 방법보다 미세 패턴을 형성할 수 있는 소프트 리소그래피 방법이 더 우수한 전기적 특성을 가질 수 있다는 것을 확인하기 위해 비교 분석하였다. Compact Disc 표면의 나노 패턴을 이용하여 유연한 마스터 몰드를 제작하였고, 650 nm 폭의 2,7-Dioctyl [1] benzothieno [3,2-b] [1] benzo thiophene (C8-BTBT) 나노 와이어를 얻었다. 그 결과 소프트 리소그래피 방법을 이용해 제작된 소자 이동도는 0.086 cm2/Vs이며, 스핀 코팅으로 만들어진 소자 이동도는 0.0036 cm2/Vs으로 소프트 리소그래피 방법으로 제작된 소자가 약 20배 이상 높은 이동도와 더 우수한 전기적 성능을 보였다.

Rogers 이론에 근거한 가족양상 사정지침개발 (Development of a Family Pattern Appraisal to Guide a Rogerian Nursing Practice)

  • 이광옥;한영란;김희정
    • 대한간호학회지
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    • 제25권4호
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    • pp.751-773
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    • 1995
  • We, clinical nurse specialists practising and guiding student practice in a Community health nursing clinic, wanted to develop a family pattern appraisal consistent with Rogers' conceptual system, the nursing model guiding our practice. We use Rogers' model because it is harmonious with the traditional Korean view of the one human, natural and cosmic world. The purpose of our research was to contribute to science - based nursing practice, not only, one helpful model, but also a model of how to use, in guiding practice, a conceptual system which reflects nurse practitioners' philosophy of nursing, is intellectually satisfying, and enriches meaning in daily nursing life. The research objectives were to review the literature on Rogers' model and analyse it according to Kim's five - level analytical framework, to explore Rogers' definition of family, to review appraisals based on Rogers' model, and to develop a family appraisal which is culturally appropriate for use in our community. This work including the use of the appraisal and its refinement with families in our practice which was done during 1994 and 1995, in Seoul, in the Capital of the Republic of Korea. At the highest level of analysis, Rogers conceptual system emphasizes acausality and multidimentional meaning ; the world view is characterized by process, movement and wholeness. The epistemology Is one of holism and the knowledge base includes all forms of experience, from sensory to mystical, objective, and subjective. At the metaparadigm level, nursing focuses on the unitary human being and the environment. At the level of nursing philosophy, the model identifies human being, nursing, nurse, and illness and health. At the paradigm level the model assumes the irriducibility of the human to parts, noncausality and continual change. Rogers' practice methodology consists of pattern manifestation appraisal and deliberative mutual patterning. Under-standing patterns and patterning of people is the key to helping them achieve their potential. At the theory level, the basic assumptions, key concepts, and homeodynamic principles were identified. Rogers states the family energy field is an undividable, four-dimensional negentropic energy field which is in a larger envircinmental field show-ing such characteristics as cannot be predicted by knowledge of individual family members. Based on the word of Rogers scholars, we chose Rogers' correlates of patterning to understand the family unit as a whole-frequency, rhythms, motion, time perception, sleeping-waking beyond waking, pragmatic -imaginative-visionary to develop the appraisal. We, also used some of Barrel's (1988) criteria including interpersonal network and professional health care access and use, and Cordon's (1982) criteria including self perception - self concept modified to fit the family. Our family Pattern appraisal included 1. Influencirg data, 2. Professional health care access and use, 3. Family self perception-self concept, 4. Family interpersonal network, 5. Sleep-wake-be-yond waking, 6. Pragmatic-imaginary-visionary, 7. Family frequency and rhythm, 8. Family motion, 9. Family time perception. The appraisal was used with four families and modified to eliminate overlap and to make it possible for the family member to express themselves more easily. We plan to gain more experience with the appraisal toward further development of the tool.

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다층의 고분자 전해질을 이용한 Poly-(dimetnylsiloxane)의 표면 개질 및 특성 (Surface modification of Poly-(dimethylsiioxane) using polyelectrolYte multilayers and its characterization)

  • 심현우;이창희;이지혜;황택성;이창수
    • KSBB Journal
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    • 제23권3호
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    • pp.263-270
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    • 2008
  • 최근 마이크로 및 나노테크놀러지 (nanotechnology) 분야에서 가장 범용적으로 사용되고 있는 폴리머인 Poly-(dimethylsiloxane) (PDMS)의 표면을 다층의 고분자 전해질을 이용하여 표면 개질 및 그 특성을 보였다. 서로 상반되는 전하를 나타내는 고분자 전해질의 정전기적 인력을 통해 개질된 PDMS의 표면 성질은 접촉각 분석기를 이용한 접촉각의 측정 및 Fourier transform infrared (FT-lR) spectroscopy를 이용해 측정함으로써 확인할 수 있었다. 상기의 표면 개질 방법을 통하여 원하는 표면의 성질을 구현 할 수 있고 생체 물질의 부착을 위한 표면 또한 쉽게 만들 수 있다. 다층의 고분자 전해질로 개질된 PDMS 표면에 부착된 박테리아는 표면이 개질 되지 않은 PDMS 표면과 매우 높은 대조를 이루는 것을 확인 할 수 있었다. PDMS 표면에 세포 부착을 위한 경우 그것의 소수성인 표면 성질로 인한 제약을 본 연구에서 제안한 표면 개질 방법을 이용하여 해결 할 수 있었다. 상기 방법의 가장 큰 장점은 간단하고, 빠르게 표면을 개질 할 수 있는 방법이라는 점에 있으며, 고분자 전해질의 여러 조합을 통해 원하는 표면의 성질을 조절 할 수 있으므로 매우 중요한 기술로 생각된다. 본 연구에서 제안된 방법은 간단하고, 편리하며, 매우 재현성이 높고, 빠르게 구현할 수 있어서 이것을 이용하여 바이오 센서 및 바이오 칩, 랩온어 칩 분야, 패터닝, 세포와 표면 간의 상호작용 연구를 위한 응용 분야로의 적용이 될 것으로 기대된다.