• Journal of the Semiconductor & Display Technology
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• v.11 no.2
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• pp.59-62
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• 2012

This test method covers a procedure for measuring particle removal characteristic of equipment fan filter unit(EFFU) installed inside of semiconductor process equipments, FPD manufacturing equipments and so on. Since EFFU is a combination of air filter and the assembly of fan, motor and frame, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for air filters is not suitable for EFFU particle removal performance. This test method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment. The particle removal performance of EFFUs is usually depending on the performance of filter media and air flow rate. To understand a performance of an EFFU, the filter media characteristic, air flow rate and the integrity of EFFU parts should be considered simultaneously. This test method is intended to demonstrate the system performance of an EFFU and successfully evaluated EFFU performance characteristics.

• 한국연소학회:학술대회논문집
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• 2007.05a
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• pp.47-53
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• 2007

The laminar combustion characteristics of interacting coal particles in a convective flow are numerically investigated at particle arrangement and size difference. The numerical simulations, which use the two-step global reaction model to account for the surrounding gas effect, show the detailed interaction among the inter-space particles, undergoing devolatilization and subsequent char burning. Several parametric studies, which include the effect of the gas temperature (1700 K), high pressure(10 atm) and variation in geometrical arrangement of the particle diameter on the volatile release rate and the char combustion rate, have been carried out. The comparison indicates that the shift to the multiple particle arrangement resulted in the substantial change of the combustion characteristics and that the volatile release rate of the interacting coal particles exhibits a strong dependency on the particle spacing and size difference.

• Journal of Korean Society for Atmospheric Environment
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• v.29 no.2
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• pp.163-170
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• 2013

The fine-particles, moisture and variety of hazardous gases are produced during electronic manufacture process. Most of the fine-particles are 0.1~10 ${\mu}m$ in size and the hazardous gases such as HF, $SiH_4$, CO, $NH_3$, etc. seriously affect environment, human's body and manufacturing process. To remove these characterized gases and fine-particles, Water-Cyclone designed and tested for removal efficiency on fine-particles and $NH_3$ under -980Pa negative pressure condition. As a result, under 0.1~1.0 $m^3/min$ flow condition, the efficiency on 5 ${\mu}m$ particles was 80~96%, 10 ${\mu}m$ particles was 86~96%, and 20 ${\mu}m$ particles was 91~99%. Besides, the removal efficiency on soluble gas $NH_3$ was 56.5% at 0.5m3/min and 79.1% at 1.0m3/min under 500 ppm flow concentration and 70.0% at 1.0 $m^3/min$ under 1,000 ppm flow concentration. Therefore, on particles, as the flow rate and particle size increased, the collection efficiency rate was increased. On soluble gas, as the flow rate increased, the removal efficiency was increased under the same concentration.

• 한국가시화정보학회:학술대회논문집
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• 2006.12a
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• pp.7-10
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• 2006

An experimental study has been conducted to quantitatively characterize the motion of neutrally buoyant particles in 2-dimensional Poiseuille flow through the micron-sized circular capillaries in the range of Re (Reynolds number) $\approx0.1\sim100$. $A{\mu}-PTV$ (Particle Tracking Velocimetry) system is adopted, which consists of a double-headed Nd:YAG laser, an epi-fluorescence microscope and a cooled CCD camera. Since high shear rate can be induced due to the scale effect even at low Re, it is shown that in micro scale neutrally buoyant particles in Poiseuille flow drift away from the wall and away from the center of the capillary. Consequently, particles accumulate at the equilibrium position of $0.52\sim0.64R$ with R being the radius of the capillary, which is analogous to that of tube flow in macro scale. There is a plateau in equilibrium position at small Re, while equilibrium position starts increasing at $Re\approx30$. The outermost edge of particle cluster is closer to the center of the capillary than that in previous studies due to low Re effect. The present study quantitatively presents characteristics of particle motion in circular capillaries. Furthermore, it is expected to give optimum factors for designing microfluidic systems that are to be used fur plasma separation from the blood.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.10
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• pp.1498-1507
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• 2003

A SMPS(scanning mobility particle sizer) system measures the number size distribution of particles using electrical mobility detection technique. An aerosol charge neutralizer, which is a component of the SMPS, is a bipolar charger using a radioactive source to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. In this study, the effect of the particle charging characteristics of two aerosol charge neutralizers on the measurement using a SMPS system was experimentally investigated for highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0.5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.3 to 3.0 L/min. The results show that the non-equilibrium character in particle charge distribution appears as the air flow rate increases although the particle number concentration is relatively low in the range of 1.5∼2x10$^{6}$ particles/㎤. The low neutralizing efficiency of the $^{85}$ Kr aerosol charge neutralizer for highly charged particles can cause to bring an artifact in the measurement using a SMPS system. However, the performance of the $^{210}$ Po aerosol charge neutralizer is insensitive to the air flow rate.

• Particle and aerosol research
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• v.9 no.3
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• pp.163-171
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• 2013

Soot particles emitted from combustion processes are often coated by non-absorbing organic materials, which enhance the global warming effect of soot particles. It is of importance to study the condensation characteristics of soot particles experimentally and theoretically to reduce the uncertainty of the climate impact of soot particles. In this study, the condensational growth of soot particles in a tubular coater was modeled by a one-dimensional (1D) plug flow model and a two-dimensional (2D) laminar flow model. The effects of 2D heat and mass transports on the predicted particle growth were investigated. The temperature and coating material vapor concentration distributions in radial direction, which the 1D model could not accounted for, affected substantially the particle growth in the coater. Under the simulated conditions, the differences between the temperatures and vapor concentrations near the wall and at the tube center were large. The neglect of these variations by the 1D model resulted in a large error in modeling the mass transfer and aerosol dynamics occurring in the coater. The 1D model predicted the average temperature and vapor concentration quite accurately but overestimated the average diameter of the growing particles considerably. At the outermost grid, at which condensation begins earliest due to the lowest temperature and saturation vapor concentration, condensing vapor was exhausted rapidly because of the competition between condensations on the wall and on the particle surface, decreasing the growth rate. At the center of the tube, on the other hand, the growth rate was low due to high temperature and saturation vapor concentration. The effects of Brownian diffusion and thermophoresis were not high enough to transport the coating material vapor quickly from the tube center to the wall. The 1D model based on perfect radial mixing could not take into account this phenomenon, resulting in a much higher growth rate than what the 2D model predicted. The result of this study indicates that contrary to a previous report for a thermodenuder, 2D heat and mass transports must be taken into account to model accurately the condensational particle growth in a coater.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.5
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• pp.882-889
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• 2010

This paper presents a method of finding the optimal operating point minimizing a given objective function with 3 phase power flow equations and operational constraints, called 3 phase optimal power flow (3POPF). 3 phase optimal power flow can provide operation and control strategies for the distribution systems with distributed generation assets, which might be frequently in unbalanced conditions assuming that high penetration rate of renewable energy sources in the systems. As the solution technique for 3POPF, this paper adopts a simulation-based method of particle swarm optimization (PSO). In the PSO based 3POPF, a utility function needs to be defined for evaluation of the degree in operational improvement of each particle's current position. To evaluate the utility function, in this paper, NR-based 3 phase power flow algorithm was developed which can deal with looped distributed generation systems. In this paper, illustrative examples with a 5-bus and a modified IEEE 37-bus test systems are given.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.5
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• pp.773-781
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• 2004

This research was Performed to raise grade efficiency of Sturtevant type air classifier. to treat powder less than $74\mu\textrm{m}$ particle produced at the crushing process of the dry aggregates manufacturing system or concrete wastes recycling system. The experimental conditions were in the ranges. 0.85 to 5.15 $m^3$/s of primary air flow rate. 0.005 to 0.015 $m^3$/s of secondary air flow rate $30^{\circ}$ to $70^{\circ}$ of auxiliary blades angle. respectively. for 1.7~3.3 kg/min of the powder feed rate. It was found that the grade efficiency of the air classifier was increased as the baffle plate was attached at the expansion region. and the optimal operating conditions of the air flow rates and the blade angle were obtained. The fractional recovery curves from the experiments were well agreement with the theoretical one of Molerus model.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.943-948
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• 2000

The Twin-fluid Swirl Nozzles are used in many parts of the industry to produce homogeneous spray. This study is to investigate the effects of outer air swiller and inner water swiller on atomization of liquid.. The experiment was carried out with increasing air-flow rate at constant liquid-flow rate and with changing outer air swiller angle and inner water swiller angle. A Particle Dynamics Analyzer(PDA) was used to measure drop size, mean and ms values of axial velocity, number density and Sauter mean diameter(SMD). The axial mean velocity and SMD of droplets were measured along the center line and radial directions. It was found that the higher air flow-rate resulted in the smaller Sauter mean diameter of liquid spray and the higher axial mean velocity of droplets. This experimental results will be conveniently used for the preliminary design stage of twin-fluid nozzle development.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.3
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• pp.547-554
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• 1992

Response characteristics and false counts of laser and white light optical particle counters (OPC) have been studied as a function of particle size using monodisperse polystylen laterx (PSL) particles. Theoretical light scattering calculations for He-Ne laser based counter have been compared with the experimental results and thus good agreements have been found. The light scattering intensity in monochromatic light shows an oscillatory character for the transparent and spherical particles of PSL due to Mie resonance. Because of this effect, the response of the LAS-X OPC showed almost same responses in the diameter ranges of 0.4mu.m to 0.6mu.m and 0.7mu.m to 1.0mu.m for PSL particles. A laser optical particle counter with high flow rate applied for clean room has been studied to identify the noise sources. Three different manufacturer's clean room optical particle counters alos have been tested to measure the background noise level.