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Test Method for Particle Removal Characteristic of Equipment Fan Filter Unit (EFFU)  

Lee, Yang-Woo (Dept. of Mechanical Engineering, Hanyang University)
Ahn, Kang-Ho (Dept. of Mechanical Engineering, Hanyang University)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.2, 2012 , pp. 59-62 More about this Journal
This test method covers a procedure for measuring particle removal characteristic of equipment fan filter unit(EFFU) installed inside of semiconductor process equipments, FPD manufacturing equipments and so on. Since EFFU is a combination of air filter and the assembly of fan, motor and frame, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for air filters is not suitable for EFFU particle removal performance. This test method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment. The particle removal performance of EFFUs is usually depending on the performance of filter media and air flow rate. To understand a performance of an EFFU, the filter media characteristic, air flow rate and the integrity of EFFU parts should be considered simultaneously. This test method is intended to demonstrate the system performance of an EFFU and successfully evaluated EFFU performance characteristics.
Equipment Fan Filter Unit (EFFU); Particle removal characteristics; Enclosed space; Test method;
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  • Reference
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