• 대한기계학회논문집B
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• 제22권11호
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• pp.1564-1570
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• 1998

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

• 전자공학회논문지
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• 제51권1호
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• pp.219-224
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• 2014

본 논문에서는 미세 입자의 크기와 굴절률, 그리고 레이저 파장과 산란광을 얻는 수신단의 각도 등 여러 변수에 대하여 Mie 산란 이론을 적용하여 미세 입자의 산란 특성에 대하여 연구하였고, 이를 바탕으로 미세 입자 검출을 위한 광학계를 구성하고 산란 신호를 획득하여 그 특성을 분석하였다. 그리고 이러한 특성들을 바탕으로 미세 입자 검출기를 위한 입자 검출 챔버를 개발하고 성능을 분석한다.

• Nuclear Engineering and Technology
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• 제53권6호
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• pp.1942-1946
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• 2021

Gadolinium oxysulfide (GOS) is regarded as a novel scintillator for the realization of ultra-high spatial resolution in neutron imaging. Monte Carlo simulations of GOS scintillator show that the capability of its spatial resolution is towards the micron level. Through the time-of-flight method, the light output of a GOS scintillator was measured to be 217 photons per captured neutron, ~100 times lower than that of a ZnS/LiF:Ag scintillator. A detector prototype has been developed to evaluate the imaging solution with the GOS scintillator by neutron beam tests. The measured spatial resolution is ~36 ㎛ (28 line pairs/mm) at the modulation transfer function (MTF) of 10%, mainly limited by the low experimental collimation ratio of the beamline. The weak light output of the GOS scintillator requires an enormous increase in the neutron flux to reduce the exposure time for practical applications.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3162-3167
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• 2007

The OPS (Optical Particle Sensor) using light scattering from the particles (real-time measurement without physical contact to the particles) can be used for cleanroom or atmospheric environment monitoring. For particles smaller than 300 nm, the detection efficiency becomes lower as scattered light decreases with particle size. To obtain higher detection efficiency with small particles, the flow field in particle chamber and the detection volume should be designed optimally to achieve maximum scattered light from the particles. In this study, a commercial computational fluid dynamics software FLUENT was used to simulate the gas flow field and particle trajectories with various optical chamber designs for 300 nm PSL particle. For estimation of laser viewing volume, we used a commercial computational optical design program ZEMAX. The results will be a great help in the development of OPS which can measure small particles with higher detection efficiency.

• 대한기계학회논문집B
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• 제24권10호
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• pp.1359-1367
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• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• 한국컴퓨터그래픽스학회논문지
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• 제25권2호
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• pp.11-18
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• 2019

본 논문에서는 많은 개체와의 충돌 검사를 요구하는 입자 기반 시스템에서 부채꼴 영역의 동적인 변화를 이용하여 효율적으로 충돌 검사를 가속화시킬 수 있는 프레임워크를 제안한다. 입자와 부채꼴 기반의 충돌 영역은 다음 세 가지 조건에 의해 결정된다: 1) 인접 입자의 반경 내에 부채꼴의 위치가 존재하는 경우, 2) 부채꼴 영역 내에 인접 입자의 위치가 존재하는 경우, 3) 부채꼴 영역을 형성하는 두 벡터 사이에 인접 입자가 존재하는 경우. 결과적으로 위 조건들을 모두 만족했을 때 입자와 부채꼴 영역은 충돌되었다고 정의한다. 본 논문에서는 입자의 움직임에 따라 충돌 검사 범위인 부채꼴의 영역을 자동으로 업데이트 한다. 부채꼴 영역의 동적인 변화를 계산하기 위해 입자의 위치와 속도를 기반으로 부채꼴의 방향, 길이, 각도를 조절한다. 최종적으로 계산된 부채꼴 영역 내에 있는 입자들만을 이용하여 충돌 검사를 빠르게 수행한다. 본 연구에서 제안하는 가속화 방법은 트리와 같은 자료구조를 명시적으로 만들지 않고, 닫힌 형태 방정식으로 실행되기 때문에 간단하게 구현되며 모든 결과에서 충돌 검사 성능이 개선되었다.

• 한국전자통신학회논문지
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• 제7권3호
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• pp.579-583
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• 2012

환경적으로 발생하는 미세입자를 감지하는 시스템을 설계하고 제작하였다. 미세입자 감지시스템은 광산란 현상을 이용하였으며, 레이저다이오우드, 렌즈, aperture, 수광소자로 구성되어진다. 검출시스템의 성능을 좋게 하기 위해 aperture, 렌즈, 수광소자의 위치를 시뮬레이션을 통해 최적화하였다. 제작된 감지시스템으로 유입되는 미세입자에 의한 광산란을 감지하므로 빠른 응답특성를 가지는 미세입자 감지시스템을 제작하였다.

• 한국입자에어로졸학회지
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• 제13권4호
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• pp.159-164
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• 2017

The detection efficiency and characteristics of an optical particle counter (OPC), with various sample nozzle outlet diameters, were experimentally investigated. The OPC system, which was built with original design, was made up of a diode laser, two photodetectors, and a variety of optics such as a beam splitter and a concave mirror. The cone-shaped sampling nozzle was designed to be changeable to alter the outlet diameter, within the range of 1 to 3 mm. For samples, sets of polystyrene latex (PSL) standard particle with various sizes of 1 to $3{\mu}m$, were used. As a result, detection efficiency of the OPC greatly decreased with larger nozzle outlet diameter. Moreover, increased nozzle outlet diameter means broader sample flow, thus caused light interference and multiple scattering which results in abnormal high peaks in scattered light signal. The ratio of abnormal peaks to regular signal of single particle increased with larger nozzle outlet diameter.

• 전기학회논문지
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• 제56권10호
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• pp.1826-1835
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• 2007

In this paper, we present a new approach for automatic detection and tracking for multiple targets. We combine a highest probability data association(HPDA) algorithm for target detection with a particle filter for multiple target tracking. The proposed approach evaluates the probabilities of one-to-one assignments of measurement-to-track and the measurement with the highest probability is selected to be target- originated, and the measurement is used for probabilistic weight update of particle filtering. The performance of the proposed algorithm for target tracking in clutter is compared with the existing clustering algorithm and the sequential monte carlo method for probability hypothesis density(SMC PHD) algorithm for multi-target detection and tracking. Computer simulation studies demonstrate that the HPDA algorithm is robust in performing automatic detection and tracking for multiple targets even though the environment is hostile in terms of high clutter density and low target detection probability.

• 한국입자에어로졸학회지
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• 제13권1호
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• pp.25-31
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• 2017

This paper offer the characteristics for the detection and classification of biological and non-biological aerosol particles in the air by using laser-induced-fluorescence (LIF) based Bio-aerosol Detection System (BDS). The BDS is mainly consist of an optical chamber, in-outlet nozzle system, 405 nm diode laser, an avalanche photo detector (APD) for scattering signal and photomultiplier tubes (PMT) for fluorescence signals in two different wavelength range ; F1, 510-600 nm and F2, 435-470 nm. The detection characteristics, especially ratio of fluorescence signal intensity were examined using well-known components : polystylene latex (PSL), fluorescence PSL, $2{\mu}m$ of SiO2 micro sphere, dried yeast, NADH, ovalbumin, fungicide powder and standard dust. The results indicated that the 405 nm diode laser-based LIF instrument can be a useful bio-aerosol detection system for unexpected biological threaten alter in real-time to apply for dual-use technology in military and civilian fields.