• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 전력전자학술대회 논문집
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• pp.296-297
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• 2001

In this paper, the minimization of particle wit introduction of face to face to face type in cleaning. Easy input and change of parameter Monitoring function of process data in process function of 3 moving axis. Return Tank for Chem cal solution

• 한국입자에어로졸학회지
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• 제5권4호
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• pp.159-170
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• 2009

A depth filter medium was newly designed in order to achieve high collection of dust and low pressure drop in this work. Multilayer depth filter media consist of an upstream layer of highly porous structure which allows particles to pass through and to follow by one or more downstream layers to hold the particles inside the media. For each filter media, flat sheet and pleated module were made of newly developed depth filter media and filter media of commercial products. Commercial depth filter cartridge for gas turbine air intake cleaning were used as reference for filtration area and pleat geometry of pleated modules. This work attempts to evaluate and compare the newly developed depth filter medium and two commercial filter media in terms of filtration parameters such as air permeability, initial pressure drop, particle retention and pressure drop variation with dust loading. According to the close examination the newly developed depth filter showed better performance compared to the commercial depth filter media.

• 설비공학논문집
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• 제15권9호
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• pp.733-737
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• 2003

The purpose of this study is to analyze the particle removal characteristics of a commercial air cleaner based on the electrostatic precipitator. The air cleaner consists of a positive corona precharger to precharge particles and a collector to remove the charged particles. The test for particle removal efficiency is conducted with tobacco smoke particles of 1.27${\mu}{\textrm}{m}$ in mass median diameter. The result of one-pass filtration test shows that the filtration efficiency is more than 90% for the particles larger than 2.5 Um, while the efficiency for the particles of 0.5～1.0${\mu}{\textrm}{m}$ in case of 4.18 CMM is 70%. For the test room of 5,800${\times}$3,400${\times}$2,600㎣, the concentration of tobacco smoke particles decreases up to 30% of initial values within 30 minutes due to natural reduction and up to 90% of initial values within 30 minutes with the air cleaner operation.

• 한국입자에어로졸학회지
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• 제8권4호
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• pp.143-150
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• 2012

Fungal particles have been known to aggravate indoor air quality. To develop fungal particle cleaning devices requires a well-controlled generator of fungal aerosol particles. In this study, a novel fungal aerosol generator was designed and tested for anti-fungal experiment. Cladosporium cladosporioides was selected as test fungal particle. After aerosolization, the number concentration and the size of particles were measured by aerodynamic particle sizer. The number concentration depended on the vibration strength and vibration period of the designed fungal aerosol generator. For the vibration strength of 10volt and the period of 10 sec (5 sec on and 5 sec off), the stable particle generation with concentration of 10#/cm3 was maintained during 35 minutes.

• 반도체디스플레이기술학회지
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• 제7권4호
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• pp.29-33
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• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.

• 한국염색가공학회지
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• 제21권6호
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• pp.1-11
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• 2009

Super-hydrophobic surface, with a water contact angle greater than $150^{\circ}$, has a self cleaning effect termed 'lotus effect'. We introduced super-hydrophobicity onto aramid/rayon mixture fabric with dual-scale structure by assembling silica nano-sol. Mixture fabric was treated with silica nano-sol, fluoric polymer using various parameters such as particle size, concentration. Silica nano-sol size were measured using particle size analyzer. Morphological changes by particle size were observed using field emission scanning electron microscopy(FE-SEM), contact angle measurement equipment. The contact angle of water was about $134.0^{\circ}$, $137.0^{\circ}$, $143.0^{\circ}$, $139.5^{\circ}$ and $139.0^{\circ}$ for mixture fabric coated with 100.2nm, 313.7nm, 558.2nm, 628.5nm and 965.4nm silica nano-sol, compared with about $120.0^{\circ}$ for mixture fabric coated with fluoric polymer. When we mixed particle sizes of 100.2nm and 558.2nm by 7:3 volume ratio, the contact angle of water was about $146.2^{\circ}$. And we mixed particle sizes of 313.7nm and 558.2nm by 7:3 volume ratio, the contact angle of water was about $141.8^{\circ}$. Also we mixed particle sizes of 558.2nm and 965.4nm by 7:3 volume ratio, the best super-hydrophobicity was obtained. In this paper, we fabricated the water-repellent surfaces with various surface structures by using four types of silica nano-sol, and we found that the dual-scale structure was very important for the super-hydrophobicity.

• 한국재료학회지
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• 제18권6호
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• pp.307-312
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• 2008

In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.635-636
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• 2006

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1810-1814
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• 2008

A small L-type megasonic module for nano-pattern cleaning was designed and manufactured. The impedance graph of the quartz waveguide with a piezoelectric actuator was predicted using finite element method (FEM). The peak value of the piezoelectric actuator alone was 3.373 MHz, which was the same as the experimentally measured value of 3.373 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 3.373 MHz, which agreed well with the measured value of 3.362 MHz (0.3% error). The acoustic pressures of a conventional megasonic system (3 MHz) and the developed system under similar conditions were measured and compared. The results showed that the maximum values and standard deviations of the developed system decreased by 29% and 18%, respectively, compared with the conventional type. This suggests that the small L-type would have higher particle removal efficiency with lower possibilities of pattern damages.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.905-909
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• 2003

This paper describes a shower type ultrasonic cleaning system using particle acceleration, developed for better effectiveness in washing out agricultural chemicals from fruits or vegetables, compared to the existing bath type ultrasonic cleaning system. The shower type system consists of a signal generator, a transducer, and a spouting nozzle, mainly. The system has been tested based on the method recommended by Korea Food and Drug Administration. It is found that shower type system shows better performance and cost-effectiveness than the bath type system that is commercially available .