• Title/Summary/Keyword: p-CuO

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Stability of H2O2 as an Oxidizer for Cu CMP

  • Lee, Do-Won;Kim, Tae-Gun;Kim, Nam-Hoon;Kim, Sang-Yong;Chang, Eui-Goo
    • Transactions on Electrical and Electronic Materials
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    • v.6 no.1
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    • pp.29-32
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    • 2005
  • Chemical mechanical polishing is an essential process in the production of copper-based chips. On this work, the stability of hydrogen peroxide ($H_{2}O_{2}$) as an oxidizer of copper CMP slurry has been investigated. $H_{2}O_{2}$ is known as the most common oxidizer in copper CMP slurry. But $H_{2}O_{2}$ is so unstable that its stabilization is needed using as an oxidizer. As adding KOH as a pH buffering agent, stability of $H_{2}O_{2}$ decreased. However, $H_{2}O_{2}$ stability in slurry went up with putting in small amount of BTA as a film forming agent. There was no difference of $H_{2}O_{2}$ stability between pH buffering agents KOH and TMAH at similar pH value. Addition of $H_{2}O_{2}$ in slurry in advance of bead milling led to better stability than adding after bead milling. Adding phosphoric acid resulted in the higher stability. Using alumina C as an abrasive was good at stabilizing for $H_{2}O_{2}$.

Characteristics of $Cu(In,\;Ga)Se_2$ Thin Film So1ar Cells with Deposition Conditions of PN Junction Interface (PN 접합면의 증착조건에 따른 $Cu(In,\;Ga)Se_2$ 박막 태양전지 특성)

  • Kim, S.K.;Lee, J.C.;Kang, K.H.;Yoon, K.H.;Park, I.J.;Song, J.;Han, S.O.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.331-334
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    • 2003
  • Photovoltaics is considered as one of the most promising new energy technology, because its energy source is omni present, pollution-free and inexhaustive. It is agreed that these solar cells must be thin film type because thin film process is cost-efficive in the fact that it uses much less raw materials and can be continuous. The defect chalcopyrite material $CuIn_3Se_5$ has been identified as playing an essential role in efficient photovoltaic action in $CuInSe_2$-based devicesm It has been reported to be of n-type conductivity, forming a p-n junction with its p-type counterpart $CuInSe_2$. Because the most efficient cells consist of the $Cu(In,Ga)Se_2$ quarternary, knowledge of some physical properties of the Ga-containing defect chalcopyrite $Cu(In,Ga)_3Se_5$ may help us better understand the junction phenomena in such devices.

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Cloning of Dechlorination Genes Specifying Biodegradation of Toxic 4-Chlorobiphenyl (유독성 4-Chlorobiphenyl의 생분해를 위한 탈염소화 유전자의 클로닝)

  • Kim, Chi-Kyung;Chae, Jong-Chan;Han, Jae-Jin
    • Korean Journal of Microbiology
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    • v.32 no.2
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    • pp.126-131
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    • 1994
  • The pchABCD genes in Pseudomonas sp. DJ-12 speciyin degradation o 4-chlorobiphenyl(4CB) were cloned in Eschericia coli. The cloned cells of E. coli CU1 and CU101 showed to produce 2,3-dihydroxybiphenyl (2,3-DHBP) from 4-chlorobiphenyl by dechlorination, as Pseudomonas so. DJ-12 produced 2,3-DHBP from both biphenyl and 4CB. In particular, E. coli CU101 transformed with the recombinant plasmid of pCU101 revealed dechlorination activity to produce 2,3-DHBP from 4CB without production of 4-chlorobenzoic acid. Therefore, the pcbAB genes (2.2 kb in size) cloned from the chromosome of Pseudomonas sp. DJ-12 were found to have dechlorination activity on 4CB to produce 2,3-DHNP.

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Effect of bath type on shape and properties of dendritic Cu powder (전기도금욕 종류가 수지상 구리 분말의 형상 및 물성에 미치는 영향에 관한 연구)

  • Park, Da-Jeong;Park, Chae-Min;Kim, Yang-Do;Lee, Gyu-Hwan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.148-149
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    • 2015
  • 본 연구에서는 전기 도금법을 이용하여 수 마이크로미터(${\mu}m$)에서 수십 마이크로미터 크기의 수지상(dendrite) 구리분말을 제조하였다. 구리 도금욕의 종류($Cu_2P_2O_7$, $CuSO_4$, $CuCl_2$), 인가 전위(E, Volt) 및 기판에 따른 수지상(Dendrite)의 형상적인 특성이 비교되었으며, 형상에 따른 겉보기밀도와 비표면적 측정(BET)이 진행되었다. 수지상의 2차 가지길이와 주축길이의 비(ratio)를 형상의 차이로 분류한 결과 염화구리 도금욕에서 0.14 로서 가장 큰 값을 가지며 겉보기 밀도는 $1.04g/cm^3$로 가장 낮은 값을 보였다.

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Synthesis of new N2O2 tetradentate ligands and the substituent effect on the stability constants of the transition metal complexes (새로운 산소-질소(N2O2)계 네 자리 리간드의 합성과 전이금속 착물 안정도상수에 대한 치환기 효과)

  • Kim, Sun Deuk;Jin, Gyoung Rok
    • Analytical Science and Technology
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    • v.19 no.2
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    • pp.131-141
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    • 2006
  • Hydrobromic acid salt of a $N_2O_2$ tetradentate ligand, N,N'-bis(2-hydroxybenzyl)-ethylene-diamine ($H-BHE{\cdot}2HBr$) was synthesized. $Br-BHE{\cdot}2HBr$, $Cl-BHE{\cdot}2HBr$, $CH_3-BHE{\cdot}2HBr$ and $CH_3O-BHE{\cdot}2HBr$ having Br, Cl, $CH_3$ and $CH_3O$ substituents at 5-position of the phenol group of $H-BHE{\cdot}2HBr$ were also synthesized. $Nap-BHE{\cdot}2HBr$ having naphthalen-2-ol instead of the phenol group was also synthesized. The potentiometry study in aqueous solution revealed that the proton dissociations of the synthesized ligands occurred in four steps and the order of the calculated overall proton dissociation constants (${\log}{\beta}_p$) of each ligand was Br-BHE < Cl-BHE < H-BHE < Nap-BHE < $CH_3$-BHE < $CH_3O$-BHE. The order showed a similar trend to that of Hammett substituent constants(${\sigma}_P$). The order of the stability constants (${\log}K_{ML}$) was CO(II) < Ni(II) < Cu(II) > Zn(II) > Cd(II) > Pb(II). The order in their stability constants (${\log}K_{ML}$) of each transition metal complex agreed well with that of the overall proton dissociation constants (${\log}{\beta}_p$).

Adsorption Characteristics of Cu Ions by Zeolite Na-A Synthesized from Jeju Volcanic Rocks (제주 화산석으로부터 합성한 Na-A 제올라이트에 의한 Cu 이온의 흡착 특성)

  • Ju, Chang-Sik;Lee, Chang-Han;Lee, Min-Gyu
    • Journal of Environmental Science International
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    • v.27 no.5
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    • pp.299-308
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    • 2018
  • The adsorption characteristics of Cu ions were studied using the zeolite Na-A synthesized from Jeju volcanic rocks. The effects of various operating parameters such as initial concentration of Cu ions, contact time, solution pH, and solution temperature were investigated in batch experiments. The adsorption of Cu ions by Na-A zeolite was fitted well by pseudo-second-order kinetics and the Langmuir isotherm model. The maximum adsorption capacity determined using the Langmuir isotherm model was 152.95 mg/g. In addition, the adsorption of Cu ions by zeolite Na-A was primarily controlled by particle diffusion model in comparison with the film diffusion model. As the temperature increased from 303 K to 323 K, ${\Delta}G^o$ decreased from -2.22 kJ/mol to -3.41 kJ/mol, indicating that the adsorption of Cu ions by Na-A zeolite is spontaneous process.

Thermodynamic Properties of the Cell Systems made of the Metal and Its Oxide Electrodes (금속과 그 산화물 전극으로 된 전지 계들의 열역학적 성질)

  • Kwon Sun Roh;Eun Seok Lee;Alla F. Mayorova;Svetlana N. Mudrezova;Yeo, Cheol Hyeon
    • Journal of the Korean Chemical Society
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    • v.37 no.7
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    • pp.635-641
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    • 1993
  • Electrochemical cell, $Pt|air(PO_2=5.3{\times}10^{-3}atm)|Zr_{0.85}Ca_{0.15}O_{1.85}|air(PO_2= 0.21atm)|Pt$, has been designed to characterize the solid electrolyte and the temperature dependence of the electromotive force (EMF) has been measured in a temperature range of 600∼1000${\circ}$C. Solid electrolyte shows pure ionic conduction of the oxygen anion. The Fe-FexO, Co-CoO, Ni-NiO, and Cu2O-CuO electrodes have been prepared by mixing the 1 : 1 mole ratio of each metal and metal oxide and then by heating at 800${\circ}$C for 6 hours. Electrochemical cells, Pt│M(s), $MO(s)|Zr_{0.85}Ca_{0.15}O_{1.85}|air(PO_2=0.21atm)|Pt$, have been designed and the temperature dependence of the EMF has also been measured in the same temperature range. The changes of the thermodynamic state functions for the formation of the metal oxides are calculated from the electromotive forces and their temperature dependences. The material properties of the oxide systems are also discussed with the function changes.

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Growth Characteristics and Chemical Components in Local Collections of Artemisia sp. (수집종(蒐集種) 쑥(Artemisia sp.)의 생육특성(生育特性) 및 성분함량(成分含量))

  • Rho, Tae-Hong;Seo, Gwan-Seok
    • Korean Journal of Medicinal Crop Science
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    • v.1 no.2
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    • pp.171-177
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    • 1993
  • This experiment was conducted to select and rear the adaptable cultivar which isused for various purpose and to build a year-round cultivation using with characters of aerial part and analysis of chemical components in 28 local cultivar of Artemisia princeps Var. The growth of aerial part, which are stem length, stem diameter, no. of branch, node, leaf size and leaf pubescence, in north local cultivars was more vigorous than those of south local caltivars. Fresh weight of "Myeongcheonssuk " was highest in local caltivars, and in view of local area, local cultivars which was collected from Iri Si and Euiseong Gun was shown the highest fresh weight. Local cultivars as mentioned above had a characters with plenty of leaves, nodes and pubescence of leaf is long. In chemical components of leaves in morth cultivar, content of N, MgO, Zn, Cu, Mn was high, while $P_2O_5,\;K_2O$ in middle local cultivars, Fe in south local cultivars. The more content of carbohydrate in leaves was high, the content of $K_{2}O$ had a increasing tendency. In local cultivars which was collected form Iri Si and Euiseong Gun with the highest fresh weight, content of $N,\;P_{2}O_5,\;K_{2}O$ was high, on the other hand content of MgO, Zn, Ca, Mn, Fe, was low in leaves of Artemisia Princeps Var.

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Synthesis and Characterization of The Electrolessly Deposited Co(Re,P) Film for Cu Capping Layer (무전해 도금법으로 제조된 Co(Re,P) capping layer제조 및 특성 평가)

  • Han, Won-Kyu;Kim, So-Jin;Ju, Jeong-Woon;Cho, Jin-Ki;Kim, Jae-Hong;Yeom, Seung-Jin;Kwak, Noh-Jung;Kim, Jin-Woong;Kang, Sung-Goon
    • Korean Journal of Materials Research
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    • v.19 no.2
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    • pp.61-67
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    • 2009
  • Electrolessly deposited Co (Re,P) was investigated as a possible capping layer for Cu wires. 50 nm Co (Re,P) films were deposited on Cu/Ti-coated silicon wafers which acted as a catalytic seed and an adhesion layer, respectively. To obtain the optimized bath composition, electroless deposition was studied through an electrochemical approach via a linear sweep voltammetry analysis. The results of using this method showed that the best deposition conditions were a $CoSO_4$ concentration of 0.082 mol/l, a solution pH of 9, a $KReO_4$ concentration of 0.0003 mol/l and sodium hypophosphite concentration of 0.1 mol/L at $80^{\circ}C$. The thermal stability of the Co (Re,P) layer as a barrier preventing Cu was evaluated using Auger electron spectroscopy and a Scanning calorimeter. The measurement results showed that Re impurities stabilized the h.c.p. phase up to $550^{\circ}C$ and that the Co (Re,P) film efficiently blocked Cu diffusion under an annealing temperature of $400^{\circ}C$ for 1hr. The good barrier properties that were observed can be explained by the nano-sized grains along with the blocking effect of the impurities at the fast diffusion path of the grain boundaries. The transformation temperature from the amorphous to crystal structure is increased by doping the Re.

Fabrication of high-$J_c$ $YBa_2Cu_3O_{7-{\delta}}$ thin films on (100) $SrTiO_3$ single crystal substrates by a modified TFA-MOD method (수정된 TFA-MOD법에 의한 (100) $SrTiO_3$ 단결정 기판 위 고 임계전류 밀도 $YBa_2Cu_3O_{7-{\delta}}$ 박막 제조)

  • Wee, Sung-Hun;Shin, Keo-Myung;Song, Kyu-Jung;Hong, Gye-Won;Moon, Seung-Hyun;Park, Chan;Yoo, Sang-Im
    • Progress in Superconductivity and Cryogenics
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    • v.6 no.1
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    • pp.12-17
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    • 2004
  • High critical current density. $J_c$ over $1MA/cm^2$ at 77 K in a self field was successfully achieved from the YBCO film prepared on (100) $SrTiO_3$ single-crystal substrates by the TFA-MOD process. Unlike a normal TFA-MOD process, we prepared the TFA precursor solution by dissolving YBCO powder into the trifluoroacetic acid. A significant amount of the second phases, including $BaF_2$, was observed in the films fired at $700-725^{\circ}C$ for 2 h under $P(O_2)=10^{-3}$ atm and $P(H_2O)=4.2%$, most probably due to an insufficient reaction time, and hence $T_c$ was greatly degraded. However the films fired at $750-800^{\circ}C$ for 2 h were composed of strongly c-axis oriented YBCO grams without any second phases. and exhibited the $T_c$ values of 89.5 ~ 91 K with a sharp transition. With increasing the firing temperature from 750 to $800^{\circ}C$ average grain size of YBCO was increased and grain connectivity was enhanced. The highest $J_c$ value of $1.1MA/cm^2$ was obtained from the YBCO film fired at $800^{\circ}C$.