• Journal of Power System Engineering
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• v.11 no.2
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• pp.64-71
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• 2007

The main purpose of this study is to analyze the characteristics of toluene removal by plasma, photocatalyst, and plasma/photocatalyst system with the major parameters such as flow rate, inlet toluene concentration and applied voltage, etc., experimentally. In the combined plasma/photocatalyst process, rates of toluene conversion are represented as 99% at flow rate 250, 500 mL/min while, below 97% at flow rate 1000 mL/min due to the low residence time(reaction time) at the same applied voltage 4173 voltage and toluene inlet concentration 50 ppm. The intermediate products are detected by GC/MS analysis showing the small amounts of benzoic acid, benzyl alcohol and residual ozone concentration $0.04{\sim}0.05$ ppm generated by plasma process in the present system.

• Journal of the Korean Institute of Gas
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• v.4 no.2 s.10
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• pp.1-6
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• 2000

In this experiment, we made the plasma reactor which adhere needle electrode in order to treat safely an NOx which was included in the gas. Also we experimently investigated characteristics of equipment and inspected efficiency. As a reaction gas, by using mixture gas of $NO/N_2$ and $N_2/O_2$, we setted up initial NO concentration and gas flow rate was set at 2 ${\iota}$/min. As a reaction characteristics of NOx, when discharge input power was high, NO concentration decreased and when the oxygen concentration increased, the NO decomposition was easy and decomposition energy efficiency was high. Also in case that NO concentration increased, NO decomposition energy efficiency was high but decomposition rate was low. The characteristics of ozone, when discharge input power was high, ozone increased and when $NO/N_2$ concentration increased, the ozone decreased.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.3
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• pp.77-80
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• 2003

An innovative ozonizer has been developed using a high frequency, surface discharge and a high purity Ti-Si-AI ceramic catalyst as a dielectric component. Using a type of thin film, a thin cylindrical compound ceramic catalyst layer was adhered to the outside surface of its inner electrode. An alternating current (AC) exciting voltage with frequencies from 0.6 KHz to 1.0 KHz and peak-to-peak voltages of 4-6 ㎸ was applied between the electrodes to produce a stable high-frequency silent discharge. A substantial reduction of the exciting voltage was also enabled by means of a thin Ti-Si-Al ceramic catalyst tube. As a result, the ozonizer can effortlessly obtain the required ozone concentration (50-60 g/$m^2$ for oxygen) and high ozone efficiency consumption power (180 g/kWh for oxygen) with-out the assistance of any particular methods. For purposes of this experiment, oxygen gas temperature was set at 2$0^{\circ}C$, with an inner reactor pressure of 1.6 atm at 600 Hz and a flow rate of 2 l/min.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.14 no.2
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• pp.59-67
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• 2000

In this paper, an ozonizer, which can supply individual and superposed silent discharge using three-phase voltage has been designed and manufactured. The ozonizer consists of 3 electrodes(Central Electrode, Internal Electrode and External Electrode and External electrode) and 2 gaps (gap between Central Electrode and Internal Electrode, gap between Internal Electrode and External Electrode). Ozone is generated according to voltage supplying method to each electrode by individual silent discharge and three-phase superposed discharge. The characteristics of ozone generation were investigated with variation of discharge power and the flow rate of supplied gas (O2). In case of individual silent discharge, the maximum values of ozone concentration, ozone generation and ozone yield were obtained between internal electrode and external electrode, and its values were 2300[ppm], 570[mg/h] and 745[g/kWh] respectively. Each maximum value was 5039[ppm], 1773[mg/h] and 851[g/kWh] respectively, when three-phase superposed silent discharge was employed. Therefore, characteristics of ozone generation with three-phase voltage are improved compared with single-phase voltage because silent discharge is generated continuously.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.12
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• pp.13-19
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• 2004

We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 ［wt%］ ozone concentration at the oxygen gas flow of 0.5［ℓ/min］ oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80［ppm］ at the 10［wt%］ ozone gas concentration, and also had a good result of the PR strip rate of 147［nm/min］. at the 70［ppm］ ozonized water.

• Journal of Environmental Science International
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• v.30 no.5
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• pp.399-406
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• 2021

The dissolution of ionized gas in dielectric barrier plasma, similar to the principle of ozone generation, is a major performance-affecting factor. In this study, the plasma gas dissolving performance of a gas mixing-circulation plasma process was evaluated using an experimental design methodology. The plasma reaction is a function of four parameters [electric current (X₁), gas flow rate (X₂), liquid flow rate (X₃) and reaction time (X₄)] modeled by the Box-Behnken design. RNO (N, N-Dimethyl-4-nitrosoaniline), an indictor of OH radical formation, was evaluated using a quadratic response surface model. The model prediction equation derived for RNO degradation was shown as a second-order polynomial. By pooling the terms with poor explanatory power as error terms and performing ANOVA, results showed high significance, with an adjusted R² value of 0.9386; this indicate that the model adequately satisfies the polynomial fit. For the RNO degradation, the measured value and the predicted values by the model equation agreed relatively well. The optimum current, gas flow rate, liquid flow rate and reaction time were obtained for the highest desirability for RNO degradation at 0.21 A, 2.65 L/min, 0.75 L/min and 6.5 min, respectively.

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• KIEE International Transactions on Electrophysics and Applications
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• v.12C no.4
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• pp.201-207
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• 2002

A Pin-Cylinder discharge type ozonizer was designed and manufactured. The increase or decrease of temperature greatly influences on the characteristics of ozone generation of a discharge type ozonizer. The characteristics of ozone concentration ( $O_{3con}$), ozone generation ($_{3g}$) and ozone yield .ate ($_{3Y}$) of the ozonizer were investigated by varying the gas flow rate (Q), the discharge power ($_{Wd}$ ) and the temperature (T). At T = 20($^{\circ}C$), the values of ( $O_{3con}$) were found as 7800,5300,3000 and 2300(ppm) at Q=1,2,4 and 6(1/min) respectively. The corresponding values of ( $O_{3g}$) were found as 917, l247,1411 and 1623(mg/h) and those of ( $O_{3Y}$) were 93,126,143 and 164(g/kWh) respectively. When the temperature is decreased to -50($^{\circ}C$), the values of ( $O_{3con}$) became 12000,8000,5200 and 3600(ppm) at Q=1,2,4 and 6(1/min) respectively. The corresponding values of 0,9 were obtained as 1411,1882,2446 and 2600(mg/h) and those of ($O_{3Y}$) were 143,190,247 and 2631g/kWh] respectively. Hence as the temperature was decreased from 20 to -50[。C], the efficiencies of ozone generation were increased by 54,51,73 and 60[%] at Q=1,2,4 and 6(1/min) respectively.ctively.

• Journal of Korean Society on Water Environment
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• v.21 no.5
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• pp.528-534
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• 2005

Ozone, a powerful oxidant, is widely used to remove microorganisms, pesticides, taste and odor compounds effectively. Dissolved air flotation (OAF) has been known as an economical process for treating algae and low turbid water quality. An ozoflotation system, combining ozone and OAF processes, has a merit which can operate the ozonation and flotation process simultaneously in a single compartment. This study investigated the application of the ozoflotation process for advanced water treatment by carrying out the pilot-plant experiment. During the test, ozone microbubbles were generated through a OAF pump and many kinds of parameters were evaluated under several conditions, such as raw water flow rate and ozone dose. As a result of the test, the optimum operating conditions of ozoflotation were decided to be 1.2 mg/L ozone dose and about 34 minute Hydraulic retention time (HRT). Finally, it could be demonstrated that the ozoflotation system can effectively improve the drinking water quality.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.795-798
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• 2003

Toxic organics are of great environmental concern primarily because they are toxic to mammals and birds, and are relatively soluble in water to contaminate surface water and groundwater. In this study, the decomposition of phenol, a widely used organic, in aqueous solutions by Boron doped diamond(BDD) electrode was examined. Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped diamond (BDD) were used as anode for generating ozone gas by electrolysis of acid solution. In this work. we have studied ozone generating system using BDD electrode. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable for electrolyte while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte. Decomposition of phenol concentration in the reaction solution by photolytic ozonation( $UV/O_3$) was analyzed by HPLC epuipped with a UV detector.