• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.4
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• pp.320-326
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• 2019

Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.38 no.8
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• pp.650-657
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• 1989

The conversion efficiency of an ozone generator can be significantly improved by modifying the discharge electrode of a helical strip line rod-to-cylinder type ozone generator to a pyramid-project-embossed rod, and by using a pulse corona discharge. Parametric studies have been carried out to obtain optimum values of peak pulse voltage, pulse forming capacitance, feeder cable and ozone generator capacitance, interelectrode spacing and corona tip density of ozone generator, and feed air flow rate and temperature. The generated ozone concentration was very dependent upon the value of pulse forming capacitance, feeder cable and ozone generator capacitance, and corona tip density. Maximum conversion efficiency was obtained with a pulse forming capacitance of about 500pF, 75pF matched feeder cable and ozone generator, and a corona tip density of 16mm. When operated at optimum values, ozone yield of 79, 99, 80 g/KWh for the different interelectrode type ozone generators tested were obtained, which are approximately 30% higher than that of an industrial ozone generator.

• Journal of Environmental Science International
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• v.27 no.3
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• pp.219-225
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• 2018

This study was conducted to investigate the possibility of utilizing various types of nozzles and gas-liquid mixers to increase the dissolution rate of plasma gas containing ozone generated in a dielectric barrier plasma reactor. After selecting the air atomizing nozzle with the highest gas dissolution rate among the 13 types of test equipment, we investigated the influence of the operating factors on the air atomizing nozzle to determine the optimal plasma gas dissolution method. The gas dissolution rate was measured by a simple and indirect method, specifically, the measurement of KLa instead of direct measurement of ozone concentration, which requires a longer analysis time. The results showed that the KLa value of the simple mix of air and water was $0.372min^{-1}$, Which is 1.44 times higher than that ($0.258min^{-1}$) of gas emitted from a normal diffuser. Among the nozzles of the same type, the KLa value was highest for the nozzle having the smallest orifice diameter. Among the 13 types of devices tested, the nozzle with highest KLa value was the M22M nozzle, which is a gas-liquid spray nozzle. The relationship between water circulation flow rate and KLa value in the experimental range was linear. The air supply flow rate and KLa value showed a parabolic-type correlation, while the optimum air supply flow rate for the water circulation flow rate of 1.8 L / min is 1.38 times.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.11
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• pp.977-982
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• 2007

The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2003.11a
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• pp.381-385
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• 2003

In this paper, a co-axial type ozonizer varied with discharge gap was designed and manufactured for investigating $\circled1$ discharge characteristics with variation of output voltage power supply, flow rate and gap $\circled2$ ozone generation characteristics with variation of flow rate, gap and discharge power. pure oxygen was used as process gas of the co-axial type ozonizer. In this paper, a double cylindrical type superposed silent discharge type ozonizer which internal electrode can be produced a vacuum has been designed and manufactured. Discharge and ozone generation characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of internal electrode.

• Journal of Environmental Science International
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• v.21 no.10
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• pp.1181-1186
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• 2012

We studied the ozone concentrations generated by low-temperature dielectric barrier discharge plasma reactor after adding air and phytoplankton to control the ozone concentrations in seawater. We also examined the numbers of bacteria and Vibrio spp. after treatment using the plasma reactor. As the airflow rate was increased, more ozone was removed. Although marked variation in the ozone decrease was observed with and without airflow, the rate of ozone removal did not increase proportionately with the airflow rates. The ozone concentration decreased with increasing organic matter and time. The amount of organic matter seems to be an important factor decreasing the dissolved ozone concentration in liquid. The ozone concentration was 0.07, 0.32, 1.28, and 2.3 mg/L when operating the plasma reactor for 30, 60, 180, and 300 s, respectively; i.e., the ozone concentration increased with the reactor operating time. The initial numbers of bacteria and Vibrio spp. were 800 and 480 CFU/mL, respectively. After operating the plasma reactor at a flow rate of 6 L/min for 30 s, no bacteria or Vibrio spp. were detected. The disinfection effect of this plasma reactor seems to be superior to that of a conventional ozone generator.

• Korean Journal of Soil Science and Fertilizer
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• v.47 no.5
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• pp.362-367
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• 2014

This study was performed to test the applicability of the ozone/hydroxy radical reaction system, which applied advanced oxidation processes, to remove total petroleum hydrocarbon (TPH) from the fine soil in washing water of the soil washing process. Removal efficiency was tested on 40 L of washing water in a pilot reaction tank. Fine soil contaminated with $800mg\;kg^{-1}$ TPH was prepared at 5% and 10% suspended solids. Testing conditions included ozone/hydroxy radical flow rates of 40, 80, and $120L\;min^{-1}$, and processing time of 2 to 12 hours. The removal efficiency of petroleum hydrocarbon from water waster by ozone/hydroxy radical was increased with higher flow rates and lower percentages of suspended solids. Optimal efficiency was achieved at $80L\;min^{-1}$ flow rate for 4 hours for the 5% suspended solids, and $120L\;min^{-1}$ for 6 hours for the 10% suspended solids. These results verified the efficiency of hydroxy radical in removing TPH and the applicability of the ozone/hydroxy radical reaction system in the field.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.585-588
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• 2001

Thin. Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped conducting diamond films were used as anode for generating ozone gas by electrolysis of acidic solution. In this work, we have studied ozone generating system using Boron-doped Diamond electrode. Electrochemical cell and ozone generating system were designed for decreasing the temperature of the system. which was elevated during the reaction. by circulation of electrolyte in the system. In order to determine the ozone generation properties of diamond electrode. experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.585-588
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• 2001

Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped conducting diamond films were used as anode for generating ozone gas by electrolysis of acidic solution. In this work, we have studied ozone generating system using Boron-doped Diamond electrode. Electrochemical cell and ozone generating system were designed for decreasing the temperature of the system, which was elevated during the reaction. by circulation of electrolyte in the system. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable while PbO$_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• KIEE International Transactions on Electrophysics and Applications
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• v.11C no.4
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• pp.113-119
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• 2001

This paper presents a model for a pin-to-cylinder discharge type ozonizer, which utilizes the superposition of surface discharge and corona discharge operation. By changing the gas flow rate, the discharge power and the number of SDO units, the characteristics of ozone concentration ( $O_{3con}$), ozone generation ( $O_{3g}$) and ozone yield ( $O_{3Y}$) were investigated. Using one SDO unit the maximum values of $O_{3con}$, $O_{3g}$ and $O_{3Y}$ were found as 8100[ppm], 1623[mg/h] and 213[g/kWh] respectively. With two SDO units the corresponding values were found as 12800[ppm], 2893[mg/h] and 248[g/kWh] respectively. Hence using two SDO units the efficiency was improved by 16[%].y 16[%].