Characteristics of Ozonizer with Variation of Vaccum in Internal Electrode

고주파전원형 오존발생기의 방전 캡 변화 특성

In this paper, a co-axial type ozonizer varied with discharge gap was designed and manufactured for investigating $\circled1$ discharge characteristics with variation of output voltage power supply, flow rate and gap $\circled2$ ozone generation characteristics with variation of flow rate, gap and discharge power. pure oxygen was used as process gas of the co-axial type ozonizer. In this paper, a double cylindrical type superposed silent discharge type ozonizer which internal electrode can be produced a vacuum has been designed and manufactured. Discharge and ozone generation characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of internal electrode.