• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2004년도 학술대회 논문집
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• pp.339-342
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• 2004

It is research about special quality of ozone gas concentration and dissolved ozone concentration that show according to change of flow rate when liquefied ozone gas in water. If increase flow rate of ozone gas, ozone concentration increases being proportional and amount to fixed flow rate, dissolved ozone concentration was measured low. When ozone concentration How rate 1000 [ppm], dissolved ozone concentration smelted to flow rate 1.5[Q] for 28 [min] is $0.1740{\sim}0.8020[mg/l]$. Could know that half-life is most short by 3 minutes 8 seconds in flow rate 1.5 [Q]. And ozone smelted 20 minutes later after half-life measurement became disjointing all.

• 한국환경보건학회지
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• 제22권1호
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• pp.57-64
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• 1996

The main objectives of this research program were to study the ozonation characteristics of phenol wastewater in the continuous packed colamn reactor(PCR) and the bubble column reactor (BCR) using ozone and to provide the fundamentals of ozonizing the phenol wastewater. Among various influencing factors that affect on phenol decomposition through the oxidation by ozone, contacting method, and ozone flow rate were chosen as reaction parameters. The results were obtained from two different types of contacting methods where the countercurrent flow was more efficient than the cocurrent flow in both the phenol removal efficiency and the ozone utilization efficiency. Furthermore, PCR showed the phenol removal efficiency 1.6 to 3% higher than that of BCR in both contacting methods, as well as the ozone utilization efficiency, suggesting that the countercurrent flow is more efficient than the cocurrent flow. The phenol removal efficiency and the ozone utilization efficiency were reduced in both reactors as the influent ozone flow rate increased. Upon varing flow rate from 0.5l/min to 2.0 l/min by 0.5 l/min, the phenol removal efficiency was reduced approximately from 8.5% to 10.5% and the ozone utilization efficiency was reduced approximately from 6% to 8% in both reactors. The performance of PCR was superior to that of BCR in the aspects of phenol removal and ozone utilization efficiency.

• KIEE International Transactions on Electrophysics and Applications
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• 제3C권6호
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• pp.230-235
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• 2003

In this paper, a superposed discharge type ozonizer with an internal dielectric that can be made into a vacuum tube has been designed and fabricated. Ozone generation and discharge characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of inside internal dielectric. Pure oxygen was used as the supply gas of the ozonizer. Ozone concentration and ozone generation are gradually increased when discharge power is increased at the same flow-rate and they are both proportional to the vacuum level. As such, the maximum ozone concentration of 8840 ppm was obtained at vacuum 0.1 Torr and flow-rate 0.5 $\ell$/min.

• 한국환경보건학회지
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• 제23권2호
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• pp.57-63
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• 1997

This study was carried out to find the adverse health effects of ozone by papers, the potential indoor sources of ozone by papers, and then the removal mechanism of ozone by experiments. The exposure of individuals to excessive levels of ozone both in the industrial and ambient environment is a continuing public health concern. Ozone indoors may play a role in generating secondary pollutants that may have adverse health effects. The removal efficiency of ozone was studied by (1) the effect of concentration on breakthrough time, (2) the effect of flow rate on breakthrough time, (3) the effect of adsorbent's weight on breakthrough time, (4) the effect of temperature on breakthrough time, (5) the application of Langmuir's isotherm equation in using activated carbon. The followings are the conclusions that were derived from this study. 1. In the effect of concentration on breakthrough time, the adsorption capacity of activated carbon was inversely proportional to ozone concentratuion (0.1, 0.2, 0.3 ppm). 2. In the effect of flow rate on breakthrough time, the service life of activated carbon was inversely proportional to flow rate (2, 8, 14l/min). 3. The difference in removal efficiency of ozone between weights(100 mg and 150 mg) was seen. And when weight of activated carbon was 100 mg and 150 mg, pressure loss was 4-5mmHg and 6-7mmHg, respectively. It is required to study relations among flow rate and adsorbent's weight and ventilation quantity, too. 4. Generally, Langmuir's equation, one of the oldest and most used frequently isotherm equation, applies to chemisorption. In case of ozone, when the weight of activated carbon was 70 mg and temperature 40, slope(1/a) was $6.25\times 10^{-1}$ and intercept(1/ab) was $1.9\times 10^{-4}$ (average r=0.94).

• Elastomers and Composites
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• 제37권1호
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• pp.49-56
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• 2002

UV 조사시간과 오존유량을 변화시키면서 폴리프로필렌을 UV/오존 산화하였으며 이의 표면특성을 접촉각과 XPS를 이용하여 살펴보았다. 산화된 표면의 노화거동을 공기, 물, 에틸렌 글리콜 하에서 살펴보았으며, 또한 lap shear 실험을 통하여 접착력을 관찰하였다. 극성표면 에너지와 접착력은 UV/오존 처리시간과 오존유량이 증가함에 따라 증가함을 알 수 있었다. 물에서 노화실험을 한 경우 극성표면 에너지의 변화가 없었으나, 공기 하에서 실시한 경우 2-3일 이내에 급격히 감소하여 처리하지 않은 폴리프로필렌의 값에 근접하였다.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2008년도 춘계학술대회 논문집
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• pp.379-380
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• 2008

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, glass and ceramic plate tyre ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone vield characteristics are improved.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권12호
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2007년도 추계학술대회 논문집
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• pp.203-207
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• 2007

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, plate type ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone yield characteristics are improved.

• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.13-17
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• 2005

The behavior of ozone in $NH_4OH$ was investigated to evaluate the solution as a cleaning chemical of the silicon wafer. The solubility of ozone in DI(Deionized) water increased as the oxygen flow-rate decreased and ozone generator power increased. Ozone in DI water showed solubility of 100 ppm or higher at room temperature. Ozone concentration was stabilized at the range of ${\pm}2ppm$ by controlling oxygen flow rate and ozone generator power. On the contrary, the solubility of ozone in $NH_4OH$ was very low and strongly depended on the concentration of $NH_4OH$ and pH. The redox potential of ozone was saturated within 10 minutes in DI water and decreased rapidly with the addition of $NH_4OH$. The behavior of ozone in $NH_4OH$ is well explained by redox potential calculation.

• 한국환경보건학회지
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• 제23권4호
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• pp.127-132
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• 1997

The characteristics of the ozone treatments of phenol were studied in a laboratory scale wastewater treatment system. The ozone treatment of wastewater was carried out in a batch-type reactor. The initial pH of wastewater(7-10), volumetric flow rate(1-2l/min) and ozone concentration(20~30 mg/l) of aerating gas were considereal as experimental variables in the ozone treatment. Phenol was decomposed easily by the ozone in a batch treatment, where the rate determining step was the COD removal that is decomposition of intermediates formed by the ozonation of phenol. Phenol decomposition and COD removal could be expressed by the first order reaction for the phenol concentration and COD, respectively. Rate constants of phenol decomposition and COD removal increased with the initial pH, volumetric flow rate and ozone concentration of aeration gas. Under the present experimental condition, their relationships could be given by for the phenol decomposition $k'=4.46\times 10^{-9}[pH]_o ^{3.94}[O_3]^{1.42}Q_{O3}^{1.57}$ for the COD removal $k=2.46\times 10^{-10}[pH]_o ^{5.19}[O_3]^{1.15}Q_{O3}^{1.19}$