Characteristics of Superposed Discharge type Ozonizer by Variation of Inner Dielectric Vacuum

In this paper, a superposed discharge type ozonizer with an internal dielectric that can be made into a vacuum tube has been designed and fabricated. Ozone generation and discharge characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of inside internal dielectric. Pure oxygen was used as the supply gas of the ozonizer. Ozone concentration and ozone generation are gradually increased when discharge power is increased at the same flow-rate and they are both proportional to the vacuum level. As such, the maximum ozone concentration of 8840 ppm was obtained at vacuum 0.1 Torr and flow-rate 0.5 $\ell$/min.