• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.33-36
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• 2003

Tungsten is widely used as a plug for the multi-level interconnection structures. However, due to the poor adhesive properties of tungsten (W) on $SiO_2$ layer, the Ti/TiN barrier layer is usually deposited onto $SiO_2$ for increasing adhesion ability with W film. Generally, for the W-CMP (chemical mechanical polishing) process, the passivation layer on the tungsten surface during CMP plays an important role. In this paper, the effect of oxidants controlling the polishing selectivity of W/Ti/TiN layer were investigated. The alumina $(Al_2O_3)$ abrasive containing slurry with 5 % $H_2O_2$ as the oxidizer, was studied. As our preliminary experimental results, very low removal rates were observed for the case of no-oxidant slurry. This low removal rate is only due to the mechanical abrasive force. However, for Ti and TiN with 5 % $H_2O_2$ oxidizer, different removal rate was observed. The removal mechanism of Ti during CMP is mainly due to mechanical abrasive, whereas for TiN, it is due to the formation of metastable soluble peroxide complex.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• 상하수도학회지
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• 제24권1호
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• pp.51-62
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• 2010

The high concentration of N in the wastewater from livestock farming generally renders the efficiency of the wastewater treatment. Therefore, removal of N in livestock wastewater is crucial for successful treatment. The current study was conducted to investigate the optimum conditions for partial nitrification under anaerobic condition following nitritation in TPAD-BNR(two-phase anaerobic digestion-biological nitrogen removal) operating system. Sequential operating test to stimulate partial nitrification in reactor showed that partial nitrification occurred at a ratio of 1.24 in $NO_2{^-}$-N:$NH_4{^+}$-N. With this result, a wide range of factors affecting stable nitritation were examined through regression analysis. In the livestock wastewater treatment procedure, the hydraulic retention time (HRT) and pH range for optimum nitrite accumulation in the reactor were 1-1.5 days and 7-8, respectively. It was appeared that accumulation of $NO_2{^-}$-N in the reactor is due to inhibition of the $NO_2{^-}$-N oxidizer by free ammonia (FA) while the effect of free nitrous acid was minimal. Nitrification was not influenced by DO concentration at a range of 2.0-3.0 mg/L and the difference in the growth rate between $NH_4{^+}$-N oxidizer and $NO_2{^-}$-N oxidizer was dependent on the temperature in the reactor.

• Advances in aircraft and spacecraft science
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• 제4권3호
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• pp.281-296
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• 2017

The axial-injection end-burning hybrid rocket proposed twenty years ago by the authors recently recaptured the attention of researchers for its virtues such as no ${\zeta}$ (oxidizer to fuel mass ratio) shift during firing and good throttling characteristics. This paper is the first report verifying these virtues using a laboratory scale motor. There are several requirements for realizing this type of hybrid rocket: 1) high fuel filling rate for obtaining an optimal ${\zeta}$; 2) small port intervals for increasing port merging rate; 3) ports arrayed across the entire fuel section. Because these requirements could not be satisfied by common manufacturing methods, no previous researchers have conducted experiments with this kind of hybrid rocket. Recent advances in high accuracy 3D printing now allow for fuel to be produced that meets these three requirements. The fuel grains used in this study were produced by a high precision light polymerized 3D printer. Each grain consisted of an array of 0.3 mm diameter ports for a fuel filling rate of 98% .The authors conducted several firing tests with various oxidizer mass flow rates and chamber pressures, and analysed the results, including ${\zeta}$ history, using a new reconstruction technique. The results show that ${\zeta}$ remains almost constant throughout tests of varying oxidizer mass flow rates, and that regression rate in the axial direction is a nearly linear function of chamber pressure with a pressure exponent of 0.996.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.693-694
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• 2009

• 한국항공운항학회:학술대회논문집
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• 한국항공운항학회 2006년도 추계학술대회 논문집
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• pp.95-98
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• 2006

• 한국연소학회:학술대회논문집
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• 한국연소학회 2015년도 제51회 KOSCO SYMPOSIUM 초록집
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• pp.121-121
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• 2015

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2005년도 제24회 춘계학술대회논문집
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• pp.151-154
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• 2005

본 연구를 통해 액체 로켓 추진기관의 안전한 시험을 수행하는데 있어 발생할 수 있는 문제점들에 대한 연구를 수행 하였다. 특히 산소시스템 내부에 축적되는 오염물질과 그것들의 시스템 내부 이동에 관하여 심도 있는 연구를 하였다. 추진기관의 산화제 누출로 일어날 수 있는 사고의 확률을 감소시키기 위한 시스템 운영에 대한 몇 가지 방법들을 연구하였고, LOX 내에 오염물질의 축적으로 인한 사고 감소 방법에 대한 연구를 수행하였다. 본 연구를 통해 얻은 method의 일반적인 원리는 추진기관 시험설비의 산소시스템에 적용할 수 있을 뿐 아니라, 기타 추진제에도 적용할 수 있다.

• 한국가스학회지
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• 제10권4호
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• pp.41-46
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• 2006

본 연구를 통해 액체로켓 추진기관의 운용 및 시험을 수행하는데 있어 LOX 시스템 내의 불순물로 인해 발생할 수 있는 문제점들에 대한 연구를 수행하였다. 특히 LOX 시스템 내부에 축적되는 오염물질과 그것들의 시스템 내부이동 및 이에 따른 사고발생 확률에 관하여 심도 있는 연구를 하였다. 추진기관의 산화제 누출로 일어날 수 있는 사고의 확률을 감소시키기 위한 시스템 운영에 대한 몇 가지 방법들을 연구하였고, LOX 시스템 내 오염물질 축적으로 인한 사고발생 저감방법에 대한 연구를 수행하였다. 본 연구를 통해 얻은 실험식의 일반적인 원리는 액체 추진기관의 LOX 시스템에 적용할 수 있을 뿐 아니라, 기타 추진제에도 적용할 수 있다.

• 한국연소학회지
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• 제7권3호
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• pp.9-15
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• 2002

Soot generation by combustion process has been investigated with objective of understanding of chemical reaction responsible for its formation in a coaxial laminar propane jet diffusion flame. For the direct photos, as the coflowing air flow rate is reduced, the area of soot luminous zone increases at first, then becomes smaller and smaller, and even disappears. The aspects of soot deposition can be acquired by using nine $15{\mu}m$ thin SiC fibers are positioned horizontally across the flame. Deposited soots on SiC fibers show the soot inception point and growth and soot oxidation zone in a typical propane diffusion. Soot is not generated anymore in a oxidizer deficient conditions of near-extinction and flame is fully occupied by transparent blue flame. It suggests that nonsooting pyroligneous blue reaction is being dominant in a oxidizer deficient ambience. In comparison with luminosities of SiC fibers and flame itself, indirect evidence is found that the process of soot nucleation and growth is endothermic reaction. It is remarkable that there exists two adjacent regions to have antithesis characteristics; one is exothermic reaction of blue flame and another endothermic reaction zone of soot formation.