• 제목/요약/키워드: operation status monitoring

검색결과 258건 처리시간 0.031초

PE-CVD 장비의 샤워헤드 표면 온도 모니터링 방법 (Showerhead Surface Temperature Monitoring Method of PE-CVD Equipment)

  • 왕현철;서화일
    • 반도체디스플레이기술학회지
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    • 제19권2호
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    • pp.16-21
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    • 2020
  • How accurately reproducible energy is delivered to the wafer in the process of making thin films using PE-CVD (Plasma enhanced chemical vapor deposition) during the semiconductor process. This is the most important technique, and most of the reaction on the wafer surface is made by thermal energy. In this study, we studied the method of monitoring the change of thermal energy transferred to the wafer surface by monitoring the temperature change according to the change of the thin film formed on the showerhead facing the wafer. Through this research, we could confirm the monitoring of wafer thin-film which is changed due to abnormal operation and accumulation of equipment, and we can expect improvement of semiconductor quality and yield through process reproducibility and equipment status by real-time monitoring of problem of deposition process equipment performance.

신소재 복합재료를 이용한 비굴착 지하매설관 보수-보강공법 (Trenchless Repairing-Reinforcing Process of Underground Pipes with Advanced Composite Materials)

  • 진우석;권재욱;이대길;유애권
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2001년도 추계학술발표대회 논문집
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    • pp.43-48
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    • 2001
  • To overcome the disadvantages of conventional excavation technology, various trenchless (or excavation free, or no-dig) repair-reinforcement technologies have been developed and tried. But trenchless technologies so fat developed have some brawbacks such as high cost and inconvenience of operation. In this study, a repairing-reinforcing process for underground pipes with glass fiber fabric polymer composites using VARTM(Vacuum Assisted Resin Transfer Molding) has been developed. The developed process requires shorter operation time and lower cost with smaller and simpler operating equipments than those of the conventional trenchless technologies. For the reliable operation of the developed method, a simple method to apply pressure and vacuum to the reinforcement was devised and flexible mold technology was tried. Also, resin filling and cure status during RTM process were monitored with a commercial dielectrometry cure monitoring system, LACOMCURE. From the investigation, it has been found that the developed repairing-reinforcing technology with appropriate process variables and on-line cure monitoring has many advantages over conventional methods.

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국내 원전의 금속파편 감시기술 및 설비 현황 (Status of Loose Part Monitoring Technology and Facility in Domestic Nuclear Power Plant)

  • 김태룡;이준신;손석만
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2000년도 춘계학술대회논문집
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    • pp.670-678
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    • 2000
  • Loose parts monitoring system(LPMS) is one of the important monitoring systems for the safe and efficient operation of the nuclear reactor, since it is LPMS that can early detect loose parts which may cause a significant damage in facilities or components of the plant. Nuclear power plants in Korea have recently experienced several loose part alarms due to the metallic impact and it is expected that the frequency of the loose part will be increased along the aging of the plants. In this paper, the status of loose parts monitoring technologies and facilities in Korean nuclear power plants is presented for the establishment of LPMS installation plan in some nuclear reactors which are not yet equipped with LPMS. Sensor specification, location and mounting method for loose parts monitoring were reviewed. As a result, the location and the mounting method of the properly chosen sensor was recommended. Data acquisition algorithms and discriminating rules of loose part impact signals were also reviewed. Actual alarm cases occurred by true impact signal and false impact signal were stated here.

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리니어모터의 제어기 설계 및 운전상태 예측에 관한 연구 (Linear motor controller design and operation status monitoring)

  • 유송민;신관수
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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    • pp.99-104
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    • 2001
  • The neural network method has been introduced to design a controller for linear motor feed system and system operation status was monitored. It is most difficult to achieve controller gain tuning because of the information limit. Regardless of the system structure, conventional control gain could be adjusted minimizing the resulting error for both position and velocity using the proposed method. Slight performance deterioration was observed at the small value of training epoch. Different controller performance for position was observed with respect changed sampling time. Actuated system performance was monitored using neural network signal processing and operational status was predicted with the rate of 80% approximately.

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GIS의 예측 감시.진단 시스템 구현에 대한 연구 (An Implementation of a Monitoring and Diagnostic System for GIS)

  • 김윤서;이혁진;양오
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 하계학술대회 논문집 A
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    • pp.271-273
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    • 2002
  • In this paper, we describe the implementation of a monitoring and diagnostic system for GIS. This system monitors operation status of GIS and transmits data from GIS to host. With this system, an operator can monitor an operating condition and judge the aging of each device, and prevent the failure or breakdown in advance.

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가스절연개폐장치의 감시 및 진단을 위한 시스템 설계 및 구현 (System design and realization of Gas Insulator Switchgear for monitoring and diagnostic)

  • 이혁진;김윤서;양오
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 합동 추계학술대회 논문집 정보 및 제어부문
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    • pp.391-394
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    • 2002
  • In this paper, we describe the implementation of a monitoring and diagnostic system for Gas Insulator Switchgear(GIS). This system monitors operation status of GIS and transmits data from GIS to host. With this system, a operator can monitor a operating condition and judge the aging of each device, and prevent the failure or breakdown in advance.

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국내 작업환경측정기관들의 개인시료 채취기 운용현황 실태 조사 (A Survey on Management Status of Personal Air Sampler in Domestic Provider for Work Environment Monitoring Service)

  • 김기연;조만수;마혜란;이광용;정지연
    • 한국산업보건학회지
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    • 제24권3호
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    • pp.359-364
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    • 2014
  • Objectives: The principal aim of this study is to provide fundamental data for suggesting substantial management plan of personal air sampler by investigating current situation of work environment monitoring service provider. Materials and Methods: The questionnaires regarding a personal air sampler were sent by electronic mail to 150 institutions, except for 22 institutions which are out of business or closed temporarily, among total 172 domestic work environment monitoring service providers designated by Ministry of Employment and Labor based on 2013. The institutions which did not reply to the questionnaire for 30 days were required directly by phone call. Finally 97 institutions gave an answer to the questionnaire and therefore the respondence rate was 65%. Results: The normal operation rate of personal air sampler exceeded 70% in all the types (particle, gas and both combination) in terms of purchased year. Furthermore the personal air sampler purchased recently showed a trend of high operation rate compared to the personal air sampler purchased previously. The distribution patterns of personal air sampler In terms of manufacturers were Gillian>MSA>SKC for particle, Gillian>SKC>AMETEK for gas and Gillian>MSA>Casella for both combination, respectively. As a result, it was found that the personal air sampler manufactured by Gillian company was utilized the most in domestic work environment monitoring service provider regardless of types of personal air sampler. Conclusions: Based on the results obtained from this study, the normal operation rate according to types of personal air sampler was as follows: 94% for personal air sampler for collecting particle only, 93% for personal air sampler for collecting gas only and 89% for collecting both particle and gas. Overall, the numbers of personal air sampler possessed and operated normally in domestic work environment monitoring service provider were 5,458 and 5,062, which indicates the normal operation rate of personal air sampler in total aspect is 93%.

전력설비 동작 상태 감시를 위한 저가형 전력 성분 측정 및 기록 시스템의 개발 (The Development of Low Cost Power Components Measurement and Record System for Monitoring Electrical Equipment Operation Status)

  • 전정채;오훈
    • 한국산학기술학회논문지
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    • 제16권7호
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    • pp.4855-4862
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    • 2015
  • 본 논문에서는 전력설비의 동작 상태를 주기적으로 감시 및 기록함으로써 전기안전사고를 예방하고 사후 원인 분석을 지원하기 위한 저가형 전력 성분 측정 및 기록 시스템을 제안한다. 제안된 시스템에서는 정밀한 전력 성분의 측정과 기록, 원격 측정이 가능하면서도 비용을 줄일 수 있도록 부품을 선정하여 제작하였다. 특히, IEEE 1459-2010에 정의된 전력 성분을 계산하기 위해 MAXIM사의 78M6631을 이용함으로써 저비용 고성능 시스템 구현이 가능하였다. 개발된 시스템은 공인 시험기관에서 사용하고 있는 YOKOGAWA 전력분석기 WT1600 과 같은 표준 장비를 이용하여 측정 성능 시험을 실시하였다. 그 결과 측정 오차가 0.5%이하로 나타났고 6개월 이상 현장에 설치하여 동작 신뢰성과 원격 측정 성능 시험을 실시하여 그 성능을 입증하였다.

열차제어시스템 유지관리 업무 개선을 위한 데이터 기반 WBS 모델 연구 (A Study on the Data-based WBS Model for Train Control System to Improve a Maintenance work)

  • 전조원;김영민;박범
    • 시스템엔지니어링학술지
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    • 제18권1호
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    • pp.99-104
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    • 2022
  • In this paper, to increase the maintenance efficiency of the urban railway train control system and to build a standard data system, we collect as much as possible structured, unstructured, and semi-structured data, and collect data by sensing and monitoring the system status and system status and monitoring. pre-process function data(Identification, purification, integration, transformation) through effective data classification and maintenance activities business classification system was studied. The purpose of this is to define the data matrix model by considering the relationship with the data generated and managed in the O&M stage of the train control system operated by the urban railway together with the WBS model, and to reflect and utilize it in practice.

제어용 계전기의 원격감시시스템 구현 (An Implementation of Remote Monitoring System for Control Relay)

  • 장용훈;남재현
    • 한국정보통신학회논문지
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    • 제20권11호
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    • pp.2100-2106
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    • 2016
  • 자동화시스템은 PLC를 사용하여 생산제품의 제조 공정상태를 감시하고 센서에서 전달되는 센서정보를 처리한다. 본 연구에서는 자동화시스템에 사용되고 있는 제어용 계전기의 상태를 감시하는 원격감시시스템을 제안한다. 제안한 시스템은 제어 릴레이모듈, 원칩프로세서 모듈, 컴퓨터 모니터링시스템과 제어용 계전기의 내역을 입력하고 관리하는 데이터베이스시스템으로 구성한다. 컴퓨터 모니터링시스템은 제어용 계전기의 작동상태와 수명을 모터링할 수 있도록 구성하였고, 데이터베이스는 제어용 계전기의 투입 일자를 입력하고 수정이 가능하게 구성하였으며, 제어용 계전기의 작동상태의 정보를 자동으로 프린트할 수 있도록 구성하였다. 원격감시시스템에서 제어용 계전기의 고장상태를 실시간으로 파악하고, 고장부품을 신속하게 교체하여 정상가동에 소요되는 시간을 최소화할 수 있도록 하였다.