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Dry etch of Ta thin film on MTJ stack in inductively coupled plasma (ICP를 이용한 MTJ stack 위의 Ta 박막의 식각 특성 연구)

  • Kim, Dong-Pyo;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.29-29
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    • 2009
  • 현재 고집적 비휘발성 메모리 소자로는 MRAM (Magnetic Random Access Memory)과 PRAM (Phase Magnetic Random Access Memory)이 활발하게 미국과 일본, 한국 등에서 다양한 연구가 진행되어 오고 있다. 이 중에서 MRAM은 DRAM과 비슷한 10 ns의 빠른 읽기/쓰기 속도와 비휘발성 특성을 가지고 있으며, 전하를 저장할 커패시터가 필요 없고, 두 개의 자성충에 약 10 mA 정도의 전류를 가하면 그때 발생하는 약 10 Oe의 자장을 개개의 비트를 write하고, read 시에는 각 비트의 자기저항을 측정함으로써 데이터를 저장하고 읽을 있으므로, 고집적화가 가능성하다 [1]. 현재 우수한 박막 재료가 개발 되었으나, 고집적 MRAM 소자의 양산에는 해결 하여야 하는 문제점이 있다. 특히 다층 박막으로 구성되어 있으므로 식각 공정의 개발이 필수적이다. 지금까지 MRAM 재료의 식각은 주로 Ion milling, ICP, ECR등의 플라즈마 장치를 되었고, 식각 가스로는 할로겐 기체와 금속카보닐 형성을 위한 Co/$NH_3$$Ch_3OH$ 기체가 이용되고 있다. 그러나 할로겐 계열의 기체를 사용할 경우, 식각 부산물들의 높은 끓는점 때문에 식각 부산물이 박막의 표면에서 열적 탈착에 의하여 제거되지 않기 때문에 높은 에너지를 가지는 이온의 도움에 의한 식각이 필요하다. 또한 Cl 계열의 기체를 사용할 경우, 식각 공정 후, 시료가 대기에 노출되면 대기 중의 수분과 식각 부산물이 결합하여 부식 현상이 발생하게 된다. 그러므로 이를 방지하기 위한 추가 공정이 요구된다. 최근에는 부식 현상이 없고, MTJ 상부에 사용되는 Ta 또는 Ti Hard mask와의 높은 선택비를 가지는 $CH_3OH$ 또는 CO/$NH_3$가 사용되고 있다. 하부 박막에 따른 식각 특성에 연구와 다층의 박막의 식각 공정에 발생에 관한 발표는 거의 없다. MRAM을 양산에 적용하기 위하여서는 Main etch 공정에서 빠른 식각 공정이 필요하고, Over etch 공정에서 하부박막에 대한 높은 선택비가 요구된다. 그러므로 본 논문에서는 식각 변수에 따른 플라즈마 측정과 표면 반응을 비교하여 각 공정의 식각 메커니즘을 규명하고, Main Etch 공정에서는 $Cl_2$/Ar 또는 $BCl_3$/Ar 가스를 이용하여 식각 실험을 수행하고, Over etch 공정에는 낮은 Ta 박막 식각 속도를 가지는 $Ch_4/O_2$/Ar 또는 $Ch_3OH$/Ar 가스를 이용하고자 한다. 플라즈마 내의 식각종과 Ta 박막과의 반응을 XPS와 AES를 이용하여 분석하고, 식각 공정 변수에 따른 식각 속도, 식각 선택비와 식각 프로파일 변화를 SEM을 이용하여 관찰한다.

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Dynamic MR Imaging in Gastric Cancer : Comparison Between Precontrast and Postcontrast Images (위암의 역동적 자기공명영상: 조영증강 전 후 영상의 비교)

  • 홍성환;한준구;장기현;최병인
    • Investigative Magnetic Resonance Imaging
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    • v.1 no.1
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    • pp.130-134
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    • 1997
  • Purpose: To analyze contrast-enhancement pattern of stomach cancer on dynamic MRI and to verify the efficacy of intravenous contrast agent in the evaluation of stomach cancer. Materials and Methods: Twelve patients with proven stomach cancer underwent dynamic MRI. By using l.OT scanner, we obtained precontrast FLASH images, and 30, 60, 90 second delay FLASH images after intravenous contrast injection. All patients ingested one liter of water and had intramuscular injection of Buscopan just before MR study. For quantitative analysis we measured signal to noise ratio (SiN) of stomach cancer on each image, and signal difference to noise ratio (SD/N) between cancer and intraluminal fluid, cancer and the pancreas. For qualitative analysis two radiologists evaluated lesion conspicuity on each image by grading system(grade 0, 1, 2, 3: poor, fair, good, excellent). Results: SiN of stomach cancer increased gradually by time(precontrast, 30, 60, 90 second delay: 38.7, 42.5, 57.4, 65.7). SD/N between cancer and intraluminal fluid significantly increased after contrast enhancement(l.24, 25.01, 39.30, 45.89). SD/Ns between cancer and the pancreas were 10.5, 9.33, 9.99, 10.66, respectively. In qualitative analysis, precontrast images were better than postcontrast images for delineation of stomach cancer. Postcontrast images showed clear endo-Iuminal side of stomach cancer, but outer margin of stomach cancer was more distinct on precontrast images. Conclusion: Precontrast MR images are better than postcontrast MR images in the depiction of stomach cancer. Intravenous contrast agent is not imperative in the evaluation of stomach cancer.

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Aluminum Powder Metallurgy Current Status, Recent Research and Future Directions

  • Schaffer, Graham
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2001.11a
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    • pp.7-7
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    • 2001
  • The increasing interest in light weight materials coupled to the need for cost -effective processing have combined to create a significant opportunity for aluminum P/M. particularly in the automotive industry in order to reduce fuel emissions and improve fuel economy at affordable prices. Additional potential markets for Al PIM parts include hand tools. Where moving parts against gravity represents a challenge; and office machinery, where reciprocating forces are important. Aluminum PIM adds light weight, high compressibility. low sintering temperatures. easy machinability and good corrosion resistance to all advantages of conventional iron bm;ed P/rv1. Current commercial alloys are pre-mixed of either the AI-Si-Mg or AL-Cu-Mg-Si type and contain 1.5% ethylene bis-stearamide as an internal lubricant. The powder is compacted in closed dies at pressure of 200-500Mpa and sintered in nitrogen at temperatures between $580~630^{\circ}C$ in continuous muffle furnace. For some applications no further processing is required. although most applications require one or more secondary operations such as sizing and finishing. These sccondary operations improve the dimension. properties or appearance of the finished part. Aluminum is often considered difficult to sinter because of the presence of a stable surface oxide film. Removal of the oxide in iron and copper based is usually achieved through the use of reducing atmospheres. such as hydrogen or dissociated ammonia. In aluminum. this occurs in the solid st,lte through the partial reduction of the aluminum by magncsium to form spinel. This exposcs the underlying metal and facilitates sintering. It has recently been shown that < 0.2% Mg is all that is required. It is noteworthy that most aluminum pre-mixes contain at least 0.5% Mg. The sintering of aluminum alloys can be further enhanced by selective microalloying. Just 100ppm pf tin chnnges the liquid phase sintering kinetics of the 2xxx alloys to produce a tensile strength of 375Mpa. an increilse of nearly 20% over the unmodified alloy. The ductility is unnffected. A similar but different effect occurs by the addition of 100 ppm of Pb to 7xxx alloys. The lend changes the wetting characteristics of the sintering liquid which serves to increase the tensile strength to 440 Mpa. a 40% increase over unmodified aIloys. Current research is predominantly aimed at the development of metal matrix composites. which have a high specific modulus. good wear resistance and a tailorable coefficient of thermal expnnsion. By controlling particle clustering and by engineering the ceramic/matrix interface in order to enhance sintering. very attractive properties can be achicved in the ns-sintered state. I\t an ils-sintered density ilpproaching 99%. these new experimental alloys hnve a modulus of 130 Gpa and an ultimate tensile strength of 212 Mpa in the T4 temper. In contest. unreinforcecl aluminum has a modulus of just 70 Gpa.

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The Effects of Trunk Stabilization Exercise on the Isometric Muscle Power and Muscle Activation in Chronic Low Back Pain (체간 안정화운동이 만성 요통환자의 근력과 근활성도에 미치는 영향)

  • Kim, Hyoung-Su;Hyong, In-Hyouk;Kim, Eun-Young
    • Korean Journal of Applied Biomechanics
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    • v.18 no.4
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    • pp.115-124
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    • 2008
  • The purpose of this study was to know influenced on the change of Oswestry back pain disability index(OBPDI), isometric muscle power(IMP), muscular activation with chronic low back pain(CLBP) patients after Trunk Stabilization Exercise. Intervention was provided 6 weeks(5 days a week). Muscular activation was measured during IMP(Muscles : transversus abdominis : TA, internal obliqus : IO, external obliqus : EO, rectus abdominis : RA and erector spinae: ES). The results were as follows. 1. OBPDI about the MBE and the SE groups had effective decrease pain and disability. 2. IMP of intervention after the MBE and the SE groups had effective improve muscle power. 3. Muscle activation during IMP of intervention after was : TA, IO, RA had increase in the MBE and the SE groups. EO muscle activation during IMP of intervention after had increase only MBE groups. This shows that the MBE and the SE groups had effective increase because it has effective improve muscle power. Therefore, this study shows £hat trunk stabilization exercise program influenced on the change of OBPDI, IMP, muscular activation with CLBP patients.

Evaluating the Multi-Period Management Efficiency of Domestic Online-Shopping Companies (DEA와 Malmquist 생산성지수를 이용한 우리나라 온라인쇼핑업체의 다기간 경영 효율성 분석)

  • Ma, Jin-Hee;Ja, Yoon-Ho;Ahn, Young-Hyo
    • Journal of Distribution Science
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    • v.13 no.4
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    • pp.45-53
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    • 2015
  • Purpose - Online shopping enables consumers to conveniently purchase products irrespective of the time and place. As a result, several online shopping companies have emerged to cater to this growing market and, therefore, the competition among them has become increasingly intense. This paper evaluates the comparative efficiency of online shopping companies for a multi-year period (2009-2013), in order to help online shopping managers identify major drivers for enhancing management efficiency and the subsequent competitiveness. Research design, data, and methodology - The researchers collected the data from 2009 to 2013 from the distribution yearbook. This paper analyzes the marketability (sales figures), profitability (business profits), and management conditions (net profits) of domestic online shopping enterprises by incorporating information on human resources (number of employees) and material resources (total assets and capital). Therefore, the number of employees, total assets, and capital are selected as input variables, and sales figures, business profits, and net profits as the output variables. In this study, Data Envelopment Analysis (DEA) was used to measure the comparative efficiency of domestic online shopping companies. In addition, the Malmquist Productivity Index was used to evaluate the trend of change of Decision Making Units' (DMUs') efficiency for a multi-year period. Results - First, as of 2013, Interpark (2.415) was found to be the most efficient online shopping enterprise, followed by Aladdin Communications (2.117), Hyundai Home shopping (1.867), Home&Shopping (1.176), NS Home shopping (1.170), Commerce Planet (1.126), CJ O Shopping (1.105), Ebay Korea (1.088), and GS Home Shopping (1.051). Second, this study recognizes how the management efficiency has changed for the period 2009-2013. Third, the lesser the capital and employees, the more are the net profits, and the better is the management efficiency of domestic online shopping companies. Lastly, the productivity of such companies is influenced by endogenous factors rather than exogenous factors such as shifts in business environment and technological advances. Conclusions - DHC Korea influenced various distribution channels to reach customers through the Internet. Consequently, this helped in increasing the awareness about its products, in addition to an increase in sales. These achievements can be attributed to the characteristics of online shopping companies. Although it is easy for these companies to suggest goods for one-off purchases, they however have difficulties in retaining customers. Overcoming this challenge can be one of the ways to benchmark a successful case of an efficient company. For example, an online shopping company can attract customers by developing a corresponding mobile application as a convenient way to shop online. Additionally, they can satisfy customers by quick delivery of purchased products, which is possible by building an effective logistics network. Our study indicates that the productivity of an online shopping company was influenced by endogenous factors driven by improvements in managerial practices rather than exogenous factors. Accordingly, online shopping companies should adopt strategies to improve their operational efficiency rather than sales volume-oriented management.

TCP Performance Study in Vertical Handoff across Heterogeneous Wireless Networks (이질적 무선망 사이의 수직적 핸드오프에서의 TCP 성능 분석)

  • Pack Sangheon;Choi Yanghee
    • Journal of KIISE:Information Networking
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    • v.32 no.1
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    • pp.20-28
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    • 2005
  • TCP(Transmission Control Protocol) is one of the most important Internet protocols, which is widely used in wireless networks as well as wired networks. However, when TCP is deployed for wireless networks, it takes severe performance degradation because TCP was designed for wired network. To overcome this drawback, a number of TCP variants have been proposed in the literature. However, most previous schemes did not consider TCP enhancement over heterogeneous networks. In heterogeneous networks, an mobile node (MN) may move from one access network to another(i.e., vertical handover). In the case of vertical handover, an MN experiences a TCP performance degradation caused by the packet loss and the sudden change of link characteristics between two different access networks. In this work, we investigate the TCP performance degradation occurred in vortical handover across heterogeneous networks. First, we have conducted the measurement study over GPRS-WLAN testbed. In the measurement study. we observed the TCP performance degradation in the case of handover from WLAN to GPRS. In order to study more different TCP behaviors during vertical handover, we performed comprehensive simulations using a network simulator 2(ns-2). Based on measurement and simulation results, we investigated how to improve TCP performance in vertical handover and we concluded that the existing mechanisms cannot be perfect solutions and new mechanisms are strongly required.

Management of Enteral Nutrition in the Pediatric Intensive Care Unit: Prokinetic Effects of Amoxicillin/Clavulanate in Real Life Conditions

  • Chiusolo, Fabrizio;Capriati, Teresa;Erba, Ilaria;Bianchi, Roberto;Atti, Marta Luisa Ciofi degli;Picardo, Sergio;Diamanti, Antonella
    • Pediatric Gastroenterology, Hepatology & Nutrition
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    • v.23 no.6
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    • pp.521-530
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    • 2020
  • Purpose: Malnutrition is a common feature in critically ill children. Enteral nutrition (EN) is the main strategy to nutritionally support critical ill children, but its use can be hindered by the development of intolerance. The study aimed to assess the effectiveness and safety of amoxicillin/clavulanate (A/C) to treat EN intolerance. Methods: We retrospectively evaluated patients admitted to the pediatric intensive care unit from October 2018 to October 2019. We conducted a case-control study: in the first 6 months (October 2018-April 2019) we implemented the nutritional protocol of our Institution with no drug, whereas in the second half (May 2019-October 2019) we employed A/C for 1 week at a dose of 10 mg/kg twice daily. Results: Twelve cases were compared with 12 controls. At the final evaluation, enteral intake was significantly higher than that at baseline in the cases (from 2.1±3.7 to 66.1±27.4% of requirement, p=0.0001 by Wilcoxon matched-pairs signed rank test) but not in the controls (from 0.2±0.8 to 6.0±14.1% of the requirement, p=NS). Final gastric residual volume at the end of the observation was significantly lower in the cases than in the controls (p=0.0398). The drug was well tolerated as shown by the similar safety outcomes in both cases and controls. Conclusion: Malnutrition exposes critically ill children to several complications that affect the severity of disease course, length of stay, and mortality; all may be prevented by early EN. The development of intolerance to EN could be addressed with the use of A/C. Future prospective clinical trials are needed to confirm these conclusions.

Luminescence Properties of InAs/GaAs Quantum Dots Grown by MEE Method (MEE법으로 성장한 InAs/GaAs 양자점의 발광특성)

  • Oh, Jae Won;Byun, Hye Ryoung;Ryu, Mee-Yi;Song, Jin Dong
    • Journal of the Korean Vacuum Society
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    • v.22 no.2
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    • pp.92-97
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    • 2013
  • The luminescence properties of InAs/GaAs quantum dots (QDs) grown by a migration enhanced epitaxy method have been investigated by using photoluminescence (PL) and time-resolved PL measurements. The MEE method supplies materials in a series of alternate depositions with migration enhancing time between each deposition. After In source was supplied for 9.3 s, the growth was interrupted for 5 s. Subsequently, As source was open for 3 (AT3), 4(AT4), 6 (AT6), or 9 s (AT9), and the growth was interrupted for 5 s again. This growth sequence was repeated 3 times for the growth of InAs QDs. The PL peak of the AT3 was 1,140 nm and the PL intensity was very weak compared with that of the other three samples. The PL peak of all samples except the AT3 sample was 1,118 nm, which is blueshifted from 1,140 nm, and the PL intensity was increased compared to that of the AT3. These results can be explained by the increased QD density and the improved QD uniformity. The AT6 sample showed the strongest PL intensity and the narrowest full width at half maximum. The PL decay time of AT6 increased with increasing emission wavelength from 940 to 1,126 nm, reaching a maximum decay time of 1.09 ns at 1,126 nm, and then decreased as the emission wavelength was increased further.

Effects of gintonin on the proliferation, migration, and tube formation of human umbilical-vein endothelial cells: involvement of lysophosphatidic-acid receptors and vascular-endothelial-growth-factor signaling

  • Hwang, Sung-Hee;Lee, Byung-Hwan;Choi, Sun-Hye;Kim, Hyeon-Joong;Won, Kyung Jong;Lee, Hwan Myung;Rhim, Hyewon;Kim, Hyoung-Chun;Nah, Seung-Yeol
    • Journal of Ginseng Research
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    • v.40 no.4
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    • pp.325-333
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    • 2016
  • Background: Ginseng extracts are known to have angiogenic effects. However, to date, only limited information is available on the molecular mechanism underlying the angiogenic effects and the main components of ginseng that exert these effects. Human umbilical-vein endothelial cells (HUVECs) are used as an in vitro model for screening therapeutic agents that promote angiogenesis and wound healing. We recently isolated gintonin, a novel ginseng-derived lysophosphatidic acid (LPA) receptor ligand, from ginseng. LPA plays a key role in angiogenesis and wound healing. Methods: In the present study, we investigated the in vitro effects of gintonin on proliferation, migration, and tube formation of HUVECs, which express endogenous LPA1/3 receptors. Results: Gintonin stimulated proliferation and migration of HUVECs. The LPA1/3 receptor antagonist, Ki16425, short interfering RNA against LPA1 or LPA3 receptor, and the Rho kinase inhibitor, Y-27632, significantly decreased the gintonin-induced proliferation, migration, and tube formation of HUVECs, which indicates the involvement of LPA receptors and Rho kinase activation. Further, gintonin increased the release of vascular endothelial growth factors from HUVECs. The cyclooxygenase-2 inhibitor NS-398, nuclear factor kappa B inhibitor BAY11-7085, and c-Jun N-terminal kinase inhibitor SP600125 blocked the gintonin-induced migration, which shows the involvement of cyclooxygenase-2, nuclear factor kappa B, and c-Jun N-terminal kinase signaling. Conclusion: The gintonin-mediated proliferation, migration, and vascular-endothelial-growth-factor release in HUVECs via LPA-receptor activation may be one of in vitro mechanisms underlying ginsenginduced angiogenic and wound-healing effects.

A CEPHALOMETRIC COMPARATIVE STUDY ON SOFT TISSUE PROFILE BETWEEN NORMAL OCCLUSION AND MALOCCLUSION IN KOREAN ADULTS (한국성인 정상교합자와 부정교합자의 연조직 측모에 관한 두부방사선 계측학적 비교연구)

  • Kang, Hong-Koo;Yoon, Tae-Ho
    • Journal of the Korean Academy of Esthetic Dentistry
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    • v.4 no.1
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    • pp.23-36
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    • 1995
  • The purpose of this artic1e is to compare soft tissue profiles between Korean adults with normal occ1usion and malocclusin and to identify the differences between them. The subjects of this cephalometric study were 40 males with normal occlusion(Group 1), 27 females with normal occlusion(Group 2), 28 adults with Angle's Class II malocclusion(Group 3) and 41 adults with Angle's Class III malocclusion(Group 4). The results of this study were as follows ; 1) People with Angle's Class II malocclusion had tendency to have more labial tipping of lower teeth than people with normal occ1usion. Through NOA angle measurement, it was determined that people with Angle's Class II malocclusion had more protruding midface than people with normal occlusion and people with Angle's Class III malocclusion had retruding midface. 2) Through Powell's esthetic triangle analysis, it was determined that people with Angle's Class II malocclusion had retruding chin and protruding nose. 3) No significant differences between people with normal occlusion and maloclusion could be identified by measuring soft tissue profile angle basis of S-NS plane. 4) There were significant differences between groups with normal occlusion and malocclusion by measuring Facial convexity angle(Significance level 99%). 5) By measuring the distance between each landmark basis of N-Pog plane, People with Angle's Class II malocclusion were identified as having more protruding midface, but there were no significant differences between people with normal occlusion and Angle's Class III malocclusion. 6) By measuring the vertical dimension of the face, it was determined that the lower facial height was higher than the upper facial height in all groups, particularly in group with Angle's Class III malocclusion. 7) By measuring the lips basis of E-line and S-line, it was determined that people with Angle's Class III malocclusion had more, protruding lower lips than people with normal occlusion, while people with normal occlusion, while people with Angle's Class II malocclusion had more protruding upper lips. By measuring the distance between the superior sulcus and inferior sulcus basis of H-line, people with Angle's Class II malocclusion had thicker upper lips than the other's.

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