• 제목/요약/키워드: nonvolatile

검색결과 346건 처리시간 0.042초

RF 스퍼터링법을 이용한 $LiNbO_3/Si$구조의 전기적 및 구조적 특성 (Electrical and Structural Properties of $LiNbO_3/Si$ Structure by RF Sputtering Method)

  • 이상우;김광호;이원종
    • 한국전기전자재료학회논문지
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    • 제11권2호
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    • pp.106-110
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    • 1998
  • The $LiNbO_3$ thin films were prepared directly on Si(100) substrates by conventional RF magnetron spurttering system for nonvolatile memory applications. RTA(Rapid Thermal Annealing) treatment was performed for as-deposited films in an oxygen atmosphere at 600 $^{\circ}C$ for 60 s. The rapid thermal annealed films were changed to poly-crystalline ferroelectric nature from amorphous of as-deposition. The resistivity of the ferroelectric $LiNbO_3$ film was increased from a typical value of $1{\sim}2{\times}10^8{\Omega}{\cdot}cm$ before the annealing to about $1{\times}10^{13}{\Omega}{\cdot}cm$ at 500 kV/cm and reduced the interface state density of the $LiNbO_3/Si$ (100) interface to about $1{\times}10^{11}/cm^2{\cdot}eV$. Ferroelectric hysteresis measurements using a Sawyer-Tower circuit yielded remanent polarization ($P_r$) and coercive field ($E_c$) values of about 1.2 ${\mu}C/cm^2$ and 120 kV/cm, respectively.

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Nonvolatile Flexible Bistable Organic Memory (BOM) Device with Au nanoparticles (NPs) embedded in a Conducting poly N-vinylcarbazole (PVK) Colloids Hybrid

  • Son, Dong-Ick;Kwon, Byoung-Wook;Park, Dong-Hee;Yang, Jeong-Do;Choi, Won-Kook
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.440-440
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    • 2011
  • We report on the non-volatile memory characteristics of a bistable organic memory (BOM) device with Au nanoparticles (NPs) embedded in a conducting poly N-vinylcarbazole (PVK) colloids hybrid layer deposited on flexible polyethylene terephthalate (PET) substrates. Transmission electron microscopy (TEM) images show the Au nanoparticles distributed isotropically around the surface of a PVK colloid. The average induced charge on Au nanoparticles, estimated using the C-V hysteresis curve, was large, as much as 5 holes/NP at a sweeping voltage of ${\pm}3$ V. The maximum ON/OFF ratio of the current bistability in the BOM devices was as large as $1{\times}105$. The cycling endurance tests of the ON/OFF switching exhibited a high endurance of above $1.5{\times}105$ cycles and a high ON/OFF ratio of ~105 could be achieved consistently even after quite a long retention time of more than $1{\times}106$ s.

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낸드 플래시 메모리와 PSRAM을 이용한 비동기용 불휘발성 메모리 모듈 설계 (Design of Asynchronous Non-Volatile Memory Module Using NAND Flash Memory and PSRAM)

  • 김태현;양오;연준상
    • 반도체디스플레이기술학회지
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    • 제19권3호
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    • pp.118-123
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    • 2020
  • In this paper, the design method of asynchronous nonvolatile memory module that can efficiently process and store large amounts of data without loss when the power turned off is proposed and implemented. PSRAM, which takes advantage of DRAM and SRAM, was used for data processing, and NAND flash memory was used for data storage and backup. The problem of a lot of signal interference due to the characteristics of memory devices was solved through PCB design using high-density integration technology. In addition, a boost circuit using the super capacitor of 0.47F was designed to supply sufficient power to the system during the time to back up data when the power is off. As a result, an asynchronous nonvolatile memory module was designed and implemented that guarantees reliability and stability and can semi-permanently store data for about 10 years. The proposed method solved the problem of frequent data loss in industrial sites and presented the possibility of commercialization by providing convenience to users and managers.

깍두기의 발효숙성온도가 유리당, 유기산 및 향기성분에 미치는 영향 (Effect of Fermentation Temperature on Free Sugar, Organic Acid and Volatile Compounds of Kakdugi)

  • 장명숙;김성단;허우덕
    • 한국식품영양과학회지
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    • 제27권1호
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    • pp.16-23
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    • 1998
  • Effect of Fermentation temperature on the changes of chemical components in Kakudgi during fermentation was investigated by measuring free sugar, organic acid and volatile compounds up to 57 days at several temperatures. The mannitol was increased in palatable period in contrast with those of other free sugars. The higher the initial fermentation temperature was and the longer the initial fermentation time at 2$0^{\circ}C$ was, the faster the second increasing period was and the less the initial contents was. Lactic acid was increased 6~31 times from a little amount at the initial period. The higher the initial fermentation temperature was and the more the increasing content was. But malic acid which was abundant(55.1% of total nonvolatile organic acid) in the initial fermentation period was remarkably decreased in the palatable period. The change of the sulfides among the volatile compounds was remarkable. Methyl allyl sulfide which was a little in the initial fermentation period was remarkably increased in the final fermentation period, and the correlation coefficients between the content of methyl allyl sulfide and aroma in sensory evaluation were high. It could be suggested that the fermentation temperature should be set to 4$^{\circ}C$ after fermentating at 2$0^{\circ}C$ for 36 hours in the view point of keeping the Kakdugi taste and quality well because of high content of free sugar and nonvolatile organic acids.

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비휘발성 메모리 적용을 위한 $SiO_2/ZrO_2$ 다층 유전막의 전기적 특성 (Electrical characteristic of stacked $SiO_2/ZrO_2$ for nonvolatile memory application as gate dielectric)

  • 박군호;김관수;오준석;정종완;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.134-135
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    • 2008
  • Ultra-thin $SiO_2/ZrO_2$ dielectrics were deposited by atomic layer chemical vapor deposition (ALCVD) method for non-volatile memory application. Metal-oxide-semiconductor (MOS) capacitors were fabricated by stacking ultra-thin $SiO_2$ and $ZrO_2$ dielectrics. It is found that the tunneling current through the stacked dielectric at the high voltage is lager than that through the conventional silicon oxide barrier. On the other hand, the tunneling leakage current at low voltages is suppressed. Therefore, the use of ultra-thin $SiO_2/ZrO_2$ dielectrics as a tunneling barrier is promising for the future high integrated non-volatile memory.

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비휘발 메모리소자응용을 위한 강유전체 $LiNbO_3$ 박막의 전기적 구조적 특성에 관한 연구 (Electrical and Structural Properties of Ferroelectric $LiNbO_3$ Thin films for Nonvolatile Memory applications)

  • 최유신;정세민;김도영;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.235-238
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    • 1998
  • Ferroelectric $LiNbO_3$ thin films were grown directly on Si(100) substrates by 13.55MHz RF magnetron sputtering system using a ceramic target ($Nb_2O_5/Li_2C0_3$ = 51.4/48.6). Because high temperature process have to avoided to prevent degradation of the interface (insulator/Si), $LiNbO_3$ thin films were deposited below $300^{\circ}C$. After as-deposited films were performed RTA treatments in an oxygen ambient at $600^{\circ}C$ for 60s, electrical measurements performed films before and after anneal treatment. In high field region, the leakage current density of the films after annealing was deceased about 4order and the resistivity of these was increased to about 5\times 10^{11} \Omega \cdot cm$ at 500kV/cm. In accumulation region of C-V curve, we calculated dielectric constant of thin film $LiNbO_3$ as 27.9 which is close to that of bulk value.

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$LiMbO_3$ 강유전체 박막을 이용한 MFS 디바이스의 Retention 및 Fatigue 특성 (Retention and Fatigue Properties of MFS Devices using Ferroelectric $LiMbO_3$ Thin Films)

  • 정순원;김채규;김용성;김진규;이남열;김광호;유병곤;이원재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.17-20
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    • 1999
  • The retention and fatigue properties of ferroelectric LiNbO$_3$ thin films were studied. Metal-ferroelectric-semiconductor(MFS) devices by using rapid thermal annealed LiNbO$_3$/Si structures were successfully fabricated and demonstrated nonvolatile memory operations of the MFS devices. The I$_{D}$-V$_{G}$ characteristics of MFSFET\`s showed a hysteresis loop due to the ferroelectric nature of the LiNbO$_3$ thin film. The ferroelectric capacitors showed practically no polarization degradation up to about 10$^{10}$ switching cycles when subjected to symmetric bipolar voltage pulse (peak-to-peak 6V, 50% duty cycle) in the 500kHz. The retention properties of the LiNbO$_3$ thin films were quite good up to about 10$^{3}$ s . s .

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LiNbO$_3$를 이용한 MFSFET의 제작 및 특성 (Fabrication and Properties of MFSFET′s using LiNbO$_3$ film)

  • 정순원;김채규;이상우;김광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.63-66
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    • 1998
  • Prototype MFSFET′s using ferroelectric oxide LiNbO$_3$ as a gate insulator have been successfully fabricated with the help of 2 sheets of metal masks and demonstrated nonvolatile memory operations of the MFSFET′s. The estimated field-effect electron mobility and transconductance on a linear region of the fabricated FET were 600 $\textrm{cm}^2$/V.s and 0.16 mS/mm, respectively. The drain current of the "on" state was more than 4 orders of magnitude larger than the "off" state current at the same "read" gate voltage of 0.5 V, which means the memory operation of the MFSFET. A write voltage as low as $\pm$3 V, which is applicable to low power integrate circuits, was used for polarization reversal.

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칼코게나이드 다층박막의 상변화 특성에 관한 연구 (A Study on Characteristics of Phase Change in Chalcogenide Multilayered Thin Film)

  • 최혁;김현구;정홍배
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1426-1427
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    • 2006
  • Chalcogenide based phase-change memory has a high capability and potential for the next generation nonvolatile memory device. Fast writing speed, low writing voltage, high sensing margin, low power consume and long cycle of read/write repeatability are also good advantages of nonvolatile phase-change memory. We have been investigated the new material for the phase-change memory. Its composition is consists of chalcogenide $Ge_{1}Se_{1}Te_2$ material. We made this new material to solve problems of conventional phase-change memory which has disadvantage of high power consume and high writing voltage. In the present work, we are manufactured $Ge_{1}Se_{1}Te_{2}/Ge_{2}Sb_{2}Te_{5}/Ge_{1}Se_{1}Te_{2}$ and $Ge_{2}Sb_{2}Te_{5}/Ge_{1}Se_{1}Te_{2}/Ge_{2}Sb_{2}Te_{5}$ sandwich triple layer structure devices are manufactured to investigate its electrical properties. Through the present work, we are willing to ensure a potential of substitutional method to overcome a crystallization problem on PRAM device.

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Ar/$CI_2$ 식각 후 SBT 박막의 표면에 관한 연구 (The Study on the surface of SBT Thin Film after Etching in Ar/$CI_2$ Plasma)

  • 김동표;김창일;이원재;유병곤;김태형;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.363-366
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    • 2000
  • In this study, SrBi$_2$Ta$_2$$O_{9}$ (SBT) thin films were etched at different Cl$_2$gas mixing ratio in Cl$_2$/Ar. The maximum etch rate of SBT was 883 $\AA$/min in Cl$_2$(20%)/Ar(80%). The result indicates that physical sputtering of charged particles is dominant to chemical reaction in etching SBT thin films. To evaluate the changes of morphology and crystallinity on the near surface of etched SBT, atomic force microscopy (AFM) and x-ray diffraction (XRD) were used. The rms values of etched samples in Ar only or Cl$_2$ only plasma were higher than that of as-deposited, Cl$_2$/Ar Plasma. The SBT (105) crystalinity of the etched samples decreased in Af only or Cla only plasma, but maintain constant in ClyAr plasma. This can be illustrated by a decrease of Bi content or nonvolatile etching products (Sr-Cl and Ta-Cl), resulting in the changes of stoichiometry on the etched surface of the SBT thin films. The decrease of Bi content and nonvolatile etch products were revealed by x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS).).

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