• Title/Summary/Keyword: non-vacuum

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In-situ Deposition Rate Measurement System to Improve the Accuracy of the Film Formation Process (성막 공정 정밀도 향상을 위한 실시간 성막 속도 측정 시스템)

  • Somi Park;Seung-Yo Baek;Hyun-Bin Kim;Jonghee Lee;Jae-Hyun Lee
    • Applied Chemistry for Engineering
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    • v.34 no.4
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    • pp.383-387
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    • 2023
  • The quartz crystal microbalance (QCM), commonly used in high vacuum deposition, becomes difficult to use when a thick film is deposited on the quartz, affecting the crystal's inherent vibration. In this study, a non-destructive optical measurement method was developed to measure the film's deposition rate during the in-situ film deposition process. By measuring the scattered laser intensity caused by the dimer in the parylene gas passing through the gas flow path, it was successfully confirmed that the ratio of the dimer in the parylene gas increases as the pyrolysis temperature decreases. Additionally, it was noted that the film's thickness and haze increase as the pyrolysis temperature decreases by confirming the characteristics of the visible parylene films. Through the research results, we aim to utilize the stable in-situ film deposition rate measurement system to control the precise film deposition rate of parylene films.

Fundamental Study on a Distillation Separation of a LiCl-KCl Eutectic Salt from Rare Earth Precipitates (희토류 침전물로부터 LiCl-KCl 공융염의 증류 분리에 관한 기초연구)

  • Yang, Hee-Chul;Eun, Hee-Chul;Kim, In-Tae
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.8 no.1
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    • pp.65-70
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    • 2010
  • The distillation rate on LiCl-KCl eutectic salt under different vacuums from 0.5-50 mmHg was first investigated by using both a non-isothermal and a isothermal thermogravimetric (TG) analysis. Based on the non-isothermal TG data, distillation rate equations as a function of the temperature could be derived. Calculated flux by these model flux equations was in agreement with the distillation rate obtained from isothermal TG analysis. A distillation rate of $10^{-4}-10^{-5}$ mole $cm^{-2}sec^{-1}$ is obtainable at temperatures less than 1300K and vacuums of 0.5-50 mmHg. About a 99% salt distillation efficiency was obtained after an hour at a temperature above 1150 K under 50 mmHg in a small scale distillation test system. An increase in the vaporizing surface area is relatively effective for removing residual salt in the remaining particles, when compared to that for the vaporizing time. Over 99.95% of total distillation efficiency was obtained for a 1-h distillation operation by increasing the inner surface area from $4.52cm^2$ to $12.56cm^2$.

Effect of Irradiation Temperature on Physicochemical and Sensory Properties of Tarakjuk (Milk Porridge) (방사선 조사 온도가 타락죽의 이화학적 및 관능적 품질 특성에 미치는 영향)

  • Han, In-Jun;Song, Beom-Seok;Lee, Ju-Woon;Kim, Jae-Hun;Choi, Kap-Sung;Park, Jeong-Ro;Chun, Soon-Sil
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.40 no.9
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    • pp.1307-1313
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    • 2011
  • This study was conducted to evaluate the effects of irradiation temperature on the physicochemical and sensory properties of Tarakjuk, milk porridge. Tarakjuk was gamma-irradiated at different temperatures of $25^{\circ}C$ (in room), $4^{\circ}C$ (in ice), and $-20^{\circ}C$ (in dry ice) at a dose of 10 kGy, and then autoclaved at $120^{\circ}C$ for 15 min for comparison. pH and Hunter's color value of Tarakjuk were not changed by irradiation regardless of the temperature. However, the TBA (2-thiobarbituric acid) value decreased as irradiation temperature was decreased. The viscosity of Tarakjuk irradiated in dry ice was significantly higher than that irradiated at room temperature and in ice (p<0.05). For the sensory evaluation, there were no significant differences in overall acceptability between non-treated Tarakjuk and that irradiated in dry ice. Flavor pattern analysis using an electronic nose with a SAW (surface acoustic wave) sensor determined that the main peaks at retention times 3.88 and 7.34 sec were related with off-flavor induced by irradiation and unique flavor of Tarakjuk, respectively. These results indicated that irradiation at freezing temperature improved quality deterioration of Tarakjuk by gamma irradiation. However, sensory quality of Tarakjuk irradiated at freezing temperature was still lower than that of non-irradiated Tarakjuk. Therefore, further research is needed to improve the quality of Tarakjuk using combined treatment such as addition of antioxidants and vacuum packaging method.

A Study on STR Analysis According to the Method of Developing Latent Fngerprints Deposited on Non-Porous Surfaces in the Marine Environment (해양환경 내 비다공성 표면에 유류된 잠재지문 현출방법에 따른 STR 분석 연구)

  • Kim, Jin-Sun;Kim, Sea-In;Yoon, Hyun-Kyoung;Choo, Min-kyu
    • The Journal of the Korea Contents Association
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    • v.22 no.10
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    • pp.733-741
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    • 2022
  • Among the various evidence found in maritime crimes, fingerprints and DNA are very important in that they can identify a suspect. In this study, 5 types of non-porous surfaces (plastic, stainless, glass, ceramic, FRP), which are often found as evidence in the actual marine environment, were selected, and latent and blood fingerprints were passed down and immersed at the Donghae Maritime Police Station's exclusive pier for about 7 days. After that, DNA extraction, quantification, and STR profile were analyzed after fingerprint developing CA fumming method and 4 powder methods (Swedish black powder, Concentrated black powder, Supranano red powder, Dazzle orange powder). Among the fingerprint developing methods, when Supranano red powder was applied, a relatively high amount of DNA was found. As a result of STR profile analysis, an average of 16.8 to 9 loci were secured, and all 20 were confirmed in glass and ceramic materials. As a result of the study, it was possible to secure the STR profile by extracting and quantifying DNA after applying the fingerprint developing method to virtual evidence immersed for about 7 days, and further research is needed to secure the STR profile by analyzing DNA after applying various fingerprint developing methods such as VMD and SPR.

An Empirical Study on the Improvement of In Situ Soil Remediation Using Plasma Blasting, Pneumatic Fracturing and Vacuum Suction (플라즈마 블라스팅, 공압파쇄, 진공추출이 활용된 지중 토양정화공법의 정화 개선 효과에 대한 실증연구)

  • Jae-Yong Song;Geun-Chun Lee;Cha-Won Kang;Eun-Sup Kim;Hyun-Shic Jang;Bo-An Jang;Yu-Chul Park
    • The Journal of Engineering Geology
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    • v.33 no.1
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    • pp.85-103
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    • 2023
  • The in-situ remediation of a solidified stratum containing a large amount of fine-texture material like clay or organic matter in contaminated soil faces limitations such as increased remediation cost resulting from decreased purification efficiency. Even if the soil conditions are good, remediation generally requires a long time to complete because of non-uniform soil properties and low permeability. This study assessed the remediation effect and evaluated the field applicability of a methodology that combines pneumatic fracturing, vacuum extraction, and plasma blasting (the PPV method) to improve the limitations facing existing underground remediation methods. For comparison, underground remediation was performed over 80 days using the experimental PPV method and chemical oxidation (the control method). The control group showed no decrease in the degree of contamination due to the poor delivery of the soil remediation agent, whereas the PPV method clearly reduced the degree of contamination during the remediation period. Remediation effect, as assessed by the reduction of the highest TPH (Total Petroleum Hydrocarbons) concentration by distance from the injection well, was uncleared in the control group, whereas the PPV method showed a remediation effect of 62.6% within a 1 m radius of the injection well radius, 90.1% within 1.1~2.0 m, and 92.1% within 2.1~3.0 m. When evaluating the remediation efficiency by considering the average rate of TPH concentration reduction by distance from the injection well, the control group was not clear; in contrast, the PPV method showed 53.6% remediation effect within 1 m of the injection well, 82.4% within 1.1~2.0 m, and 68.7% within 2.1~3.0 m. Both ways of considering purification efficiency (based on changes in TPH maximum and average contamination concentration) found the PPV method to increase the remediation effect by 149.0~184.8% compared with the control group; its average increase in remediation effect was ~167%. The time taken to reduce contamination by 80% of the initial concentration was evaluated by deriving a correlation equation through analysis of the TPH concentration: the PPV method could reduce the purification time by 184.4% compared with chemical oxidation. However, the present evaluation of a single site cannot be equally applied to all strata, so additional research is necessary to explore more clearly the proposed method's effect.

The Development of Imitated Cheese Using Whole Milk Powder and Fermented Milk (전지분유와 발효유를 이용한 치즈 유사품개발)

  • Jo, Ae-Ri;Noh, Hae-Won;Kim, Kee-Sung;Chung, Keun-Hee;Jeon, Woo-Min
    • Food Science of Animal Resources
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    • v.30 no.1
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    • pp.102-109
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    • 2010
  • Imitated cheese was prepared from whole milk powder and fermented milk and the moisture content, general components, noncasein nitrogen, nonprotein nitrogen and free amino acids were analyzed to determine the optimal ripening conditions needed to produce imitated cheese that was similar to natural cheese. The moisture content of the imitated cheese was 40.27% one day after being produced. The cheese was ripened using two different methods; at $12^{\circ}C$ with vacuum sealing and at $12^{\circ}C$ and 95% RH with a spray of Penicillium camemberti. The lactose content decreased rapidly from 24.64 to 5.43% at the $4^{th}$ wk of ripening when it was ripened with Penicillium camemberti. The degradation of protein by mold ripening in the imitated cheese was more rapid than that of vacuum sealing. The flavor and body texture were optimal at the $4^{th}$ wk ripening. The noncasein nitrogen and nonprotein nitrogen content increased from 28.10 to 54.05, and from 6.58 to 23.06 mg/mL, respectively, when ripened with P. camemberti. When the cheese was ripened at $12^{\circ}C$, 95% R.H with P. camemberti after 4 wks, all free amino acids increased significantly except asparagines. The total free amino acid and bitter amino acid concentrations increased from 8.40 to 34.87, and from 1.53 to 10.02 nmol/mg, respectively. When the imitated cheese was prepared, the protein degradation and flavor of the cheese was better when ripened with P. camemberti.

Effects of Cooking Method and Temperature on the Lipid Oxidation of Electron-Beam Irradiated Hanwoo Steak. (가열방법 및 온도가 전자선 조사한 한우 steak의 지질산화에 미치는 영향)

  • Park T. S.;Shin T. S.;Lee J. I.;Park G. B.
    • Journal of Life Science
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    • v.15 no.5 s.72
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    • pp.840-846
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    • 2005
  • This study was carried out to investigate the effect of electron beam irradiation and cooking temperature on physico-chemical characteristics and lipid oxidation of beef. A total of six beef carcasses ($280\∼300 kg$) that were quality grade $1^{+}$(marbling score No.7, meat color No.4, maturity No.1, texture No.1) was purchased at the commercial slaughter house. The carcasses were transported and washed using high pressure water, and pasteulized with $ 50\% $ ethyl alcohol in the laboratory. After the carcasses were deboned and trimmed, loin and round were taken out to make steak (1.5cm thickness) or ground beef respectively. Samples were wrap or vacuum packaged and irradiated with 0, 3, 4.5, 6 and 7.5 kGy using electron-beam accelerator at Samsung Heavy Industries Ltd. Co. (in Taejun). Irradiated samples were cooked with different methods(electronic pan and gas oven) and temperatures ($ 60^{\circ}C, 70^{\circ}C and 80^{\circ}C$) and used to measure fatty acid composition, TBARS, cholesterol oxide products and panel test scores. The content of saturated fatty acids increased by increasing heating temperature in oven boiling steak (OBS) and pan boiling steak (PBS), and there was no difference by electron-beam irradiation. Both irradiated and non-irradiated treatment were high as the heating temperature increased in TBARS by heating temperature in PBS (p < 0.05) and the amount of Malonaldehyde (MA), standard of fat deterioration, was increased in OBS (p < 0.05). Non-irradiated and 3, 6 kGy treatment produced about 2 fold amount of MA at $ 60^{\circ}C $ compared with $ 80^{\circ}C $. In comparison with PBS, OBS produced much amount of MA and a bit different from non-irradiated treatment but did not show no tendency. As irradiation levels and heating temperature increased, the amount of cholesterol oxides products was increased and also pan-heating method, direct heating method, significantly increased the degree of oxidation compared with oven-heating method, indirect heating method (p < 0.05).

Effect of Temperature and Gas Permeability of Functional Packing Films on Storability of Fresh-cut Salicornia herbacea Classified by Size (저장온도와 기능성 필름의 기체 투과도가 다양한 크기의 퉁퉁마디 신선편이의 저장성에 미치는 영향)

  • Baek, Jun Pill;Lee, Han Jong;Choi, In-Lee;Jung, Hyun Jin;Son, Jin Sung;Kim, Il Seop;Jeong, Cheon Soon;Kang, Ho-Min
    • Journal of Bio-Environment Control
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    • v.22 no.2
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    • pp.175-181
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    • 2013
  • These studies were identified the effect of four types of non-perforated breathable (NPB) packing film and three sizes on storage ability of fresh-cut for ready to eat packaging at $5^{\circ}C$ for 25 days and $10^{\circ}C$ for 15 days storage in Salicornia herbacea. The fresh weight loss was less than 2% in every films at $5^{\circ}C$ condition after 25 days storage, and the $10^{\circ}C$ also had same result on 15 days storage except 100,000 cc NPB film. Compare with storage after 15 days, storage condition at $5^{\circ}C$ had shown better result under the 1% fresh weight loss rate. The 5,000 cc and $5^{\circ}C$ condition had been shown the characteristics of MA packaging in carbon dioxide and oxygen concentrations. The ethylene concentration in vacuum film was higher 10 to 100 times than in NPB film treatments during storage. But ethylene concentration was not statistically significant differences among size treatments. Every conditions had been measured the anti-oxidant activity by DPPH method after storage at $5^{\circ}C$ for 25 days and $10^{\circ}C$ for 15 days. S. herbacea at $5^{\circ}C$ had been more than twice of activity compare with that at $10^{\circ}C$. 100,000 cc NPB film had been higher contents of anti-oxidant activity at $5^{\circ}C$ and $10^{\circ}C$. As the fresh-cut sizes, 3 cm and 5 cm sizes had changed depending on film types but 10 cm were not effected by the film types in the DPPH activity. When panel test had been tried to measure the visual quality and off-flavor after storage, $5^{\circ}C$ with a filme of 5,000 cc treatment had established higher value than other treated conditions. As these results, it's may be suggested that the $5^{\circ}C$ with 5,000 cc non-perforated breathable film for MA storage in Salicornia herbacea at fresh cut distribution system. Fresh cut size 10 cm with 100,000 cc NPB film also had the good quality for 15 dyas storage at $10^{\circ}C$, and this result can be applied for short term distribution system in Korea.

Dry Etching of Flexible Polycarbonate and PMMA in O2/SF6/CH4 Discharges (O2/SF6/CH4 플라즈마를 이용한 플렉시블 Polycarbonate와 PMMA의 건식 식각)

  • Joo, Y.W.;Park, Y.H.;Noh, H.S.;Kim, J.K.;Lee, J.W.
    • Journal of the Korean Vacuum Society
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    • v.18 no.2
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    • pp.85-91
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    • 2009
  • There has been a rapid progress for flexible polymer-based MEMS(Microelectromechanical Systems) technology. Polycarbonate (PC) and Poly Methyl Methacrylate (PMMA), so-called acrylic, have many advantages for optical, non-toxic and micro-device application. We studied dry etching of PC and PMMA as a function of % gas ratio in the $O_2/SF_6/CH_4$ temary plasma. A photoresist pattern was defined on the polymer samples with a mask using a conventional lithography. Plasma etching was done at 100 W RIE chuck power and 10 sccm total gas flow rate. The etch rates of PMMA were typically 2 times higher than those of PC in the whole experimental range. The result would be related to higher melting point of PC compared to that of PMMA. The highest etch rates of PMMA and PC were found in the $O_2/SF_6$ discharges among $O_2/SF_6$, $O_2/CH_4$ and $SF_6/CH_4$ and $O_2/SF_6/CH_4$ plasma composition (PC: ${\sim}350\;nm/min$ at 5 sccm $O_2/5$ sccm $SF_6$, PMMA: ${\sim}570\;nm/min$ at 2.5 sccm $O_2/7.5$ sccm $SF_6$). PC has smoother surface morphology than PMMA after etching in the $O_2/SF_6/CH_4$ discharges. The surface roughness of PC was in the range of 1.9$\sim$3.88 nm. However, that of PMMA was 17.3$\sim$26.1 nm.

Highly Doped Nano-crystal Embedded Polymorphous Silicon Thin Film Deposited by Using Neutral Beam Assisted CVD at Room Temperature

  • Jang, Jin-Nyeong;Lee, Dong-Hyeok;So, Hyeon-Uk;Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.154-155
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    • 2012
  • The promise of nano-crystalites (nc) as a technological material, for applications including display backplane, and solar cells, may ultimately depend on tailoring their behavior through doping and crystallinity. Impurities can strongly modify electronic and optical properties of bulk and nc semiconductors. Highly doped dopant also effect structural properties (both grain size, crystal fraction) of nc-Si thin film. As discussed in several literatures, P atoms or radicals have the tendency to reside on the surface of nc. The P-radical segregation on the nano-grain surfaces that called self-purification may reduce the possibility of new nucleation because of the five-coordination of P. In addition, the P doping levels of ${\sim}2{\times}10^{21}\;at/cm^3$ is the solubility limitation of P in Si; the solubility of nc thin film should be smaller. Therefore, the non-activated P tends to segregate on the grain boundaries and the surface of nc. These mechanisms could prevent new nucleation on the existing grain surface. Therefore, most researches shown that highly doped nc-thin film by using conventional PECVD deposition system tended to have low crystallinity, where the formation energy of nucleation should be higher than the nc surface in the intrinsic materials. If the deposition technology that can make highly doped and simultaneously highly crystallized nc at low temperature, it can lead processes of next generation flexible devices. Recently, we are developing a novel CVD technology with a neutral particle beam (NPB) source, named as neutral beam assisted CVD (NBaCVD), which controls the energy of incident neutral particles in the range of 1~300eV in order to enhance the atomic activation and crystalline of thin films at low temperatures. During the formation of the nc-/pm-Si thin films by the NBaCVD with various process conditions, NPB energy directly controlled by the reflector bias and effectively increased crystal fraction (~80%) by uniformly distributed nc grains with 3~10 nm size. In the case of phosphorous doped Si thin films, the doping efficiency also increased as increasing the reflector bias (i.e. increasing NPB energy). At 330V of reflector bias, activation energy of the doped nc-Si thin film reduced as low as 0.001 eV. This means dopants are fully occupied as substitutional site, even though the Si thin film has nano-sized grain structure. And activated dopant concentration is recorded as high as up to 1020 #/$cm^3$ at very low process temperature (< $80^{\circ}C$) process without any post annealing. Theoretical solubility for the higher dopant concentration in Si thin film for order of 1020 #/$cm^3$ can be done only high temperature process or post annealing over $650^{\circ}C$. In general, as decreasing the grain size, the dopant binding energy increases as ratio of 1 of diameter of grain and the dopant hardly be activated. The highly doped nc-Si thin film by low-temperature NBaCVD process had smaller average grain size under 10 nm (measured by GIWAXS, GISAXS and TEM analysis), but achieved very higher activation of phosphorous dopant; NB energy sufficiently transports its energy to doping and crystallization even though without supplying additional thermal energy. TEM image shows that incubation layer does not formed between nc-Si film and SiO2 under later and highly crystallized nc-Si film is constructed with uniformly distributed nano-grains in polymorphous tissues. The nucleation should be start at the first layer on the SiO2 later, but it hardly growth to be cone-shaped micro-size grains. The nc-grain evenly embedded pm-Si thin film can be formatted by competition of the nucleation and the crystal growing, which depend on the NPB energies. In the evaluation of the light soaking degradation of photoconductivity, while conventional intrinsic and n-type doped a-Si thin films appeared typical degradation of photoconductivity, all of the nc-Si thin films processed by the NBaCVD show only a few % of degradation of it. From FTIR and RAMAN spectra, the energetic hydrogen NB atoms passivate nano-grain boundaries during the NBaCVD process because of the high diffusivity and chemical potential of hydrogen atoms.

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