Dry Etching of Flexible Polycarbonate and PMMA in O2/SF6/CH4 Discharges |
Joo, Y.W.
(School of Nano Engineering/Center for Nano Technology, Inje University)
Park, Y.H. (School of Nano Engineering/Center for Nano Technology, Inje University) Noh, H.S. (School of Nano Engineering/Center for Nano Technology, Inje University) Kim, J.K. (School of Nano Engineering/Center for Nano Technology, Inje University) Lee, J.W. (School of Nano Engineering/Center for Nano Technology, Inje University) |
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