• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.142.2-142.2
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• 2015

Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.88-88
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• 2003

Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.5
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• pp.8-17
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• 2016

While greenhouses have been utilized as a sustainable alternative to traditional soil farming, they are often powered by diesel boilers that necessitate vast amounts of non-renewable energy and emit toxic fumes. Thus, geothermal heat pumps have been proposed as a more energy-efficient substitution for diesel boilers. Currently, most horticultural facilities in the United States use shallow geothermal systems, and are often equipped with horizontal underground heat exchangers as well as heat pump equipment. These shallow geothermal systems require a large drilling site and heat pump to function, which results in high maintenance costs. The heat pump itself consumes a large amount of power, which degrades system performance. Conversely, high temperatures can be attained within a single borehole in deep geothermal vertical closing systems without using a heat pump. This setup can dramatically reduce the power consumption and improve system performance. In this study, we have modeled a circulation simulator after the circulation systems in deep geothermal facilities to analyze a 2000-meter borehole in Naju-Sanpo-myeon. The simulator is operated by manipulating various putative parameters affecting system performance to analyze the system's coefficient of performance.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.6
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• pp.692-696
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• 2017

The shape of press components is becoming increasingly complex due to customer demands, process shortening and cost savings. In addition, the stability of the pressing process frequently varies during mass production due to the influence of many factors. In order to ensure the process stability, it is necessary to establish a process in which reproducibility is realized in tolerance, which is sufficient for advance study of shape, material, press, mold and lubrication. However, unforeseen changes in process parameters cause disruptions in production line shutdowns and production planning. In this paper, we introduce a method to monitor a real time process by applying a sensor to a press mold. A non-contact type sensor for measuring the flow of a sheet material and an example of an experiment using the optical sensor which is highly applicable to mass production are presented. An optical sensor was installed in a cylindrical drawing mold to test its potential application while changing the material, blank holder force, and drawing ratio. We also quantitatively determined that the flow of other sheet materials was quantified locally using a square drawing die and that the measured value was always smaller than the drawing depth due to the material elongation. Finally, we propose a field that can be used by attaching the sensor to the press mold. We hope that the consequent cost reduction will contribute to increasing global mold competitiveness.

• Journal of Yeungnam Medical Science
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• v.4 no.1
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• pp.1-15
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• 1987

Magnetic Resonance (M.R.) is rapidly emerging technique that provides high quality images and potentially provides much more diagnostic information than do conventional imaging modalities. M.R.I. is conceptually quite different from currently used imaging methods. The complex nature of M.R.I. allows a great deal of flexibility in image product ion and available information, and key points are as follows. 1. M.R.I. offers a non-invasive technique with which to gene rate in vivo human images without ionizing radiation and with no known adverse biological effects. 2. Imaging mechanism of M.R.I. is quite different from conventional imaging modality and for more accurate diagnostic application, It is necessary for physician to understand imaging mechanism of M.R.I. 3. M.R. makes available basic chemical parameters that may provide to be useful for diagnostic medical imaging and more specific pathophysiologic information which are not available by alternate techniques. 4. M.R. can be produced by number of different methods. This flexibility allows the imaging technique to be applicated for particular clinical purpose. Multiplanar and three dimensional imaging may extend the imaging process beyond the single section available with current CT. 5. Future directions include efforts to; a. Further development of hard ware b. More fasternning scan time c. Respiratory and cardiac gated imaging d. Imaging of additional nuclei except hydrogen e. Further development of contrast media f. M.R. in vivo spectroscopy g. Real time M.R. imaging.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.114.1-114.1
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• 2011

Bioenergy production from lignocellulosic biomass and agriculture wastes have been attracted because of its sustainable and non-edible source. Especially, canola is considered as one of the best feedstock for renewable fuel production. Oil extracted canola and its agriculture residues are reuseable for bioethanol production. However, a pretreatment step is required before enzymatic hydrolysis to disrupt recalcitrant lignocellulosic matrix. To increase the sugar conversion, more efficient pretreatment process was necessary for removal of saccharification barriers such as lignin. Alkaline pretreatment makes the lignocellulose swollen through solvation and induces more porous structure for enzyme access. In our previous work, aqueous ammonia (1~20%) was utilized for alkaline reagent to increase the crystallinity of canola residues pretreatment. In this study, significant factors for efficient soaking in aqueous ammonia pretreatment on canola residues was optimized by using the response surface method (RSM). Based on the fundamental experiments, the real values of factors at the center (0) were determined as follows; $70^{\circ}C$ of temperature, 17.5% of ammonia concentration and 18 h of reaction time in the experiment design using central composition design (CCD). A statistical model predicted that the highest removal yield of lignin was 54% at the following optimized reaction conditions: $72.68^{\circ}C$ of temperature, 18.30% of ammonia concentration and 18.30 h of reaction time. Finally, maximum theoretical yields of soaking in aqueous ammonia pretreatment were 42.23% of glucose and 22.68% of xylose.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.38A no.1
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• pp.68-78
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• 2013

In this paper, we propose an early spectrum sensing(ESS) as an advance preparation for radio-access trial, which enables multi-mode terminals to access the most appropriate radio-access system in a cloud-conceptual base station system where multiple radio access technologies(RATs) coexist. Prior to a random access to one of RATs, a multi-mode terminal conducts a spectrum sensing over entire frequency bands of whole RATs, then select the RAT with the lowest sensing power, that is likely to have the most available spectrum. Thus, an access failure caused by that the selected RAT has no available radio spectrum could be avoidable in advance. In computer simulation, we consider as various RATs as possible. First, circuit and packet systems are taken into consideration. In addition, the packet systems are classified according to the feasibility of carrier aggregation(CA). In case of terminal, three modes are considered with circuit-only, packet-only, and multi-mode. Subsequently, packet traffic is classified into real-time and non-real-time traffic with three different tolerable delay levels. The simulation includes a call process starting with a call generation and ending up with a resource allocation reflecting individual user's QoS requirements and evaluates the proposed scheme in terms of the successful access probability, system access time, system balancing factor and packet loss probability.

• Korean Journal of Cognitive Science
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• v.27 no.3
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• pp.441-467
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• 2016

This fMRI study is aim to investigate effects of competitive environment in cognitive empathic process in human brain. Empathy is known as a crucial factor for human's adaptive behavior in aspects of social cognition and it is almost automatic process, on the other hand competitive situation is psychologically devastated environment to win someone for getting rewards. We hypnotized that reading and understanding of other person's mind are a specific characteristic related to survival evolutionarily, however competition would have an effect on the empathic cognitive process because of mechanisms of competition. To manipulate the competitive atmosphere, one researcher took a role of competitor against participants and they were instructed to get monetary rewards when their performance was better than a competitor. 21 participants(9 males and 12 females) performed to judge the emotional valence of the empathic task consisted of illustrated images with various situation could be experienced in real world as on $1^{st}$ person perspective in both competitive and non-competitive condition, and did same performance with objects stimulus in control condition. In order to examine the competition effects on empathic process,, hemodynamic response were obtained during fMRI session and the imaging data were analyzed to identify brain regions where responses to each condition across the two consecutive runs. Participants' reaction time in competitive condition was faster statistically significant than non-competitive one. Activation for competitive condition increased in the following areas: ACC, mPFC, SMG, thalamus extended caudate and Nacc, parahippocampal gyrus, and for non-competitive condition increased paracingulate gyrus, temporal pole, vmPFC, superior occipital gyrus. As a result of regression analysis using empathic scores as covariance, the rSMG, IFG, fusiform gyrus, thalamus, putamen were correlated with higher empathic levels, and TPJ were correlated with lower empathic scores. We suggest that these observations could mean competitive environment have an effect on neural base of cognitive empathic process.

• Information Systems Review
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• v.10 no.2
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• pp.71-96
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• 2008

Interactive Video Service(IVS) is a new type of media service that enables users to interact with others in the process of casting and watching videos in a system. 'Timing flexibility', which divides IVS into real-time IVS and non-real-time IVS, is one of the significant factors of interactivity. The objective of this study is to identify critical factors of interactivity in IVS and to compare their effects in terms of timing flexibility. To achieve the objective, prior literature has been reviewed to establish a theoretical framework, and twelve active users of IVS have been interviewed to develop research model of IVS. Finally, an online survey has been conducted to verify the research model. The results indicate that Technical Factor, Communication Factor, and Contents Factor of IVS are found to be the important interaction factors in IVS; and their impacts on the intention to use IVS were found to be affected by timing flexibility. This paper ends with theoretical and practical implications of study results.

• Journal of Internet Computing and Services
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• v.15 no.1
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• pp.171-178
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• 2014

This paper presents dynamic modelling of a virtual object in augmented reality environments when external forces are applied to the object in real-time fashion. In order to simulate a natural behavior of the object we employ the theory of Newtonian physics to construct motion equation of the object according to the varying external forces applied to the AR object. In dynamic modelling process, the physical interaction is taken placed between the augmented object and the physical object such as a haptic input device and the external forces are transferred to the object. The intrinsic properties of the augmented object are either rigid or elastically deformable (non-rigid) model. In case of the rigid object, the dynamic motion of the object is simulated when the augmented object is collided with by the haptic stick by considering linear momentum or angular momentum. In the case of the non-rigid object, the physics-based simulation approach is adopted since the elastically deformable models respond in a natural way to the external or internal forces and constraints. Depending on the characteristics of force caused by a user through a haptic interface and model's intrinsic properties, the virtual elastic object in AR is deformed naturally. In the simulation, we exploit standard mass-spring damper differential equation so called Newton's second law of motion to model deformable objects. From the experiments, we can successfully visualize the behavior of a virtual objects in AR based on the theorem of physics when the haptic device interact with the rigid or non-rigid virtual object.