• 한국세라믹학회지
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• 제42권5호
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• pp.359-365
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• 2005

Silicon nitride coating films with various ratios of nitrogen to silicon contents were prepared and characterized. The film was coated on silicon substrate by sputtering method with changing nitrogen gas flow rate in a chamber. The nitrogen to silicon ratio was found to have values in a range from 0 to 1.4. Coated film was characterized with scanning electron microscopy, transmission electron microscopy, electron probe microanalysis, nanoindentation scanning probe microscopy, x-ray photon spectrometry, and Raman spectrometry. Silicon nitride phase in all samples showed amorphous nature regardless of N/Si ratio. When N/Si ratio was 1.25, hardness and elastic modulus of silicon nitride film showed maximum with 22 GPa and 210 GPa, respectively. Those values decreased, when N/Si ratio was higher than 1.25. Raman spectrum showed that no silicon phase exist in the film. XPS result showed that the silicon-nitrogen bond was dominant way for atomic bonding in the film. The structure and property was explained with Random Bonding Model(RBM) which was consistent with the microstructure and chemistry analysis for the coating films.

• 한국세라믹학회지
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• 제51권3호
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• pp.201-207
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• 2014

High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas.

• 해양환경안전학회지
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• 제23권5호
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• pp.541-548
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• 2017

본 연구에서는 해양플랜트설비 건조 현장에서 사용되고 있는 기존 고온 오일 플러싱 장비에 대한 성능개선을 위해 기존의 플러싱 장치에 사용되던 오일에 질소가스를 혼합한 고온 오일 플러싱 시스템에 대하여 국제표준화기구 코드(ISO code)를 기준으로 이론적 연구를 수행하였다. 연구를 위해 오일-질소가스 혼합유체 플러싱 시스템 공정을 설계 후 청정성능에 영향을 주는 혼합유체의 혼합비율, 온도, 레이놀즈수 및 액상분율 등에 대한 공정모사 결과도 분석하였다. 그 결과 관 직경과 가스상의 체적분률이 일정한 상태에서 혼합유체의 체적유량이 증가될수록 수평 유압배관 입출구의 액상분율 차이 ${\Delta}{\alpha}_L$ 값은 증가하게 되고 배관길이 방향의 위치에 따라 오일과 질소가스 기포 사이의 상분포가 달라짐을 확인했다. 이러한 상분포의 변화는 오일-질소가스 혼합유체 플러싱 시스템의 청정성능에도 커다란 영향을 줄 것으로 예상된다.

• 상하수도학회지
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• 제23권4호
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• pp.439-446
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• 2009

This study was performed to evaluate SND(simultaneous nitrification and denitrification)efficiency, nitrogen removal efficiency and filtration function of non-woven fabric by using submerging MBR packed with granular sulfur covered with non-woven fabric filter. Synthetic wastewater was used as influent wastewater. Concentration of $NH_4{^+}-N$ in influent was maintained about 40 mg/L and the experiment was performed in four phases according to the flow rate. Nitrogen loading rate divided four phases ranging from $0.04 kg\;NH_4{^+}-N/m^3-day$ to $0.16 kg\;NH_4{^+}-N/m^3-day$. As a result, the maximum $NH_4{^+}-N$ removal rate was accomplished at $0.142 kg\;NH_4{^+}-N/m^3-day$ in nitrogen loading of $0.147 kg\;NH_4{^+}-N/m^3-day$. Nitrification efficiency was higher than 95% in all phases. $NO_3{^-}-N$ loading rate was adjusted ranging from $0.22 kg\;NO_3{^-}-N/m^3-day$ to $0.89 kg\;NO_3{^-}-N/m^3-day$. The maximum $NO_3{^-}-N$ removal rate was accomplished up to $0.71 kg\;NO_3{^-}-N/m^3-day$ in $NO_3{^-}-N$ loading of $0.89 kg\;NO_3{^-}-N/m^3-day$. The maximum $NO_3{^-}-N$ removal efficiency was 95% in $NO_3{^-}-N$ loading of $0.22 kg\;NO_3{^-}-N/m^3-day$. T-N removal rate was 90% and concentration of T-N in effluent was 3.7 mg/L in T-N loading rate of $0.039 kg\;NO_3{^-}-N/m^3-day$. In this study, TMP in reactor with and without non-woven fabric filter were observed to define fouling of hollow-fiber membrane module. Reaching time to standard washing pressure(22 cm Hg) of two reactors were 29 days with non-woven fabric But the reactor without non-woven fabric reached standard washing pressure only after 4 days. Accordingly, non-woven fabric was demonstrated the superiority as a filtration ability. With high nitrogen removal rate and decreasing of fouling of membrane, MBR packed with granular sulfur covered with non-woven fabric filter submerging in activated sludge aeration tank can be used as an advanced treatment process.

• 한국초전도ㆍ저온공학회논문지
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• 제5권1호
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• pp.133-135
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• 2003

Cryogenic systems are requirement for the operation of HTS power cables. In general, HTS power cables require temperature below 77K, a temperature that can be achieved from the liquid nitrogen at latm or sub-cooled LN2 above latm. HTS power cable needs sufficient refrigeration to overcome its low temperature heat loading. This loading typically cones in two forms : (1) heat leaks from the surroundings and (2) internal heat generation. This paper explains the cooling test system of 10m HTS power cable. This system is composed of storage dewar, auto fill system, core cryostat and cold-box. Storage dewar is a LN2 storage tank and auto fill system is a LN2 supply device to the sub-cooler, Core cryostat is a LN2 flow line. Cold box is a control unit of temperature and flow rate. It is composed of control valve, flow meter, sub-cooler and circulation pump, etc..

• 한국자동차공학회논문집
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• 제16권1호
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• pp.127-133
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• 2008

Since the 1960's, exhaust gas recirculation(EGR) has been used effectively in spark ignition(SI) engines to control the exhaust emissions of the oxides of nitrogen(NOx). The most important requirements for the application of EGR systems to conventional SI engines are controllable flow rate and good dynamic response. In order to evaluate the characteristics of the electronic EGR valve, a test bench which is consisted of blower, heater, air flow meter and driving unit for electronic EGR valve was set up to simulate engine operating conditions. During the tests, the valve actuation parameters were controlled and the valve lifts and flow rates were measured to infer the characteristics of EGR valve. The results confirmed the capabilities of mathematical analysis and it seems that the correction for the valve lift and potentiometer output is necessary to achieve precise control of EGR rates.

• 한국초전도저온공학회:학술대회논문집
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• 한국초전도저온공학회 2003년도 학술대회 논문집
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• pp.163-166
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• 2003

Maintaining low temperature is very important in operating HTS cable termination in which Joule heat is generated at current lead. In this study, numerical analysis using FLUENT is performed to find an optimized flow conditions for effective cooling of HTS cable terminal system using subcooled liquid nitrogen (L$N_2$) as refrigerant. The variables considered here are mass flow rate of L$N_2$, location of inlet and diameter of inlet and outlet. Simplified models are investigated under these variables. Based on maximum temperatures in the cryostat, the configuration for effective cooling of HTS cable was determined.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• 대한기계학회논문집B
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• 제36권7호
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• pp.767-774
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• 2012

신형경수로인 APR1400의 안전주입탱크에는 유량조절장치가 설치되어있다. 이러한 유량조절장치는 안전주입탱크 내부의 수위에 따라 유량조절장치 내부에 위치한 와류실의 유동양식이 변하도록 설계되어 있어, 피동적으로 유량이 조절되는 특성을 가지고 있다. 그러나 고유량에서 저유량으로 전환되는 과정에서 유동의 관성에 의해 상부 기체가 방출되는 현상이 존재하여, FD 성능에 영향을 줄 수 있다. 본 논문에서는 전산유체역학 코드인 CFX 코드를 활용하여 안전주입탱크의 유량전환현상시 기체의 방출현상에 대해 이상유체 자유수면모델 적용하여 계산하였다. 이를 통해 안전주입수의 수위 및 상부 충전기체의 거동을 평가하여 FD 성능특성에 미치는 영향을 분석하였다. 그 결과, 유량전환구간에서 자유수면의 높이가 순간적으로 낮아지게 되어, 상부의 기체가 일부 방출되는 것으로 평가되었으나, FD 성능특성에는 큰 영향을 미치지 않는 것으로 평가되었다.

• 한국안광학회지
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• 제3권1호
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• pp.115-120
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• 1998

RF(radio-frequency) magnetron 스퍼터링 장치에 질소가스와 아르곤가스를 동시에 주입하면서 Ti 타켓을 스퍼터링하여 $TiN_x$ 박막을 유리기판위에 제작하였다. 박막제작시 RF power supply 출력을 240W로, 증착기 내부의 온도는 $200^{\circ}C$를 유지하였다. $TiN_x$ 박막은 알곤 가스를 20sccm으로 고정시킨 상태에서 질소를 3sccm부터 9sccm까지 변화시켜가며 증착시켰다. 이때 박막의 화학적 조성과 성분비를 분석하기 위하여 XPS를 사용하였다.