Browse > Article
http://dx.doi.org/10.4191/kcers.2014.51.3.201

Synthesis of High Purity Aluminum Nitride Nanopowder in Ammonia and Nitrogen Atmosphere by RF Induction Thermal Plasma  

Kim, Kyung-In (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Choi, Sung-Churl (Department of Advanced Materials Science and Engineering, Hanyang University)
Kim, Jin-Ho (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Hwang, Kwang-Taek (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Han, Kyu-Sung (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Publication Information
Journal of the Korean Ceramic Society / v.51, no.3, 2014 , pp. 201-207 More about this Journal
Abstract
High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas.
Keywords
Aluminum nitride; Nanopowder; RF induction thermal plasma; Ammonia gas; Nitrogen gas;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 B. H. Li, H. Yang, G. Zou, and S. Yu, "Ultrafine AIN and Al-AlN Powders: Preparation by DC Arc Plasma and Thermal Treatment," J. Advan. Mater., 9 [2] 156-59 (1991).
2 M. L. Panchula and J. Y. Ying, "Nanocrystalline Aluminum Nitride: I, Vapor-Phase Synthesis in a Forced-Flow Reactor," J. Am. Ceram. Soc., 86 [7] 1114-20 (2003).   DOI
3 C. H. Li, L. H. Kao, M. J. Chen, Y. F. Wang, and C. H. Tsai, "Rapid Preparation of Aluminum Nitride Powders by Using Microwave Plasma," J. Allo. Comp., 542 [25] 78-84 (2012).   DOI
4 M. Yamada, T. Yasui, M. Fukumoto, and K. Takahashi, "Nitridation of Aluminum Particles and Formation Process of Aluminum Nitride Coatings by Reactive RF Plasma Spraying," J. Thin Solid Films, 515 [9] 4166-71 (2007).   DOI
5 S. M. Oh and D. W. Park, "Preparation of AlN Fine Powder by Thermal Plasma Processing," Thin Solid Films, 316 [1-2] 189-94 (1998).   DOI   ScienceOn
6 N. S. Kanhe, A. B. Nawale, R. L. Gawade, V. G. Puranik, S. V. Bhoraskar, A. K. Das, and V. L. Mathe, "Understanding the Growth of Micro and Nano-crystalline AlN by Thermal Plasma Process," J. Crys. Grow., 339 [1] 36-45 (2012).   DOI
7 K. Etemadi, "Formation of Aluminum Nitrides in Thermal Plasmas," Plasma Chem. Plasma Process., 11 [1] 41-56 (1991).   DOI
8 H. D. Li, G. T. Zou, H. Wang, H. B. Yang, D. M. Li, M. H. Li, and S. Yu, "Synthesis and Infrared Study of Nanosized Aluminum Nitride Powders Prepared by Direct Current arc Plasma," J. Phys. Chem. B, 102 [44] 8692-95 (1998).   DOI
9 P. C. Kong and Y. C. Lau, "Plasma Synthesis of Ceramic Powders," J. Pure &App. Chem., 62 [9] 1809-16 (1990).
10 J. Guo, X. Fan, R. Dolbec, S. Xue, J. Jurewicz, and M. Boulos, "Development of Nanopowder Synthesis Using Induction Plasma," Plasma Sci. Technol., 12 [2] 188-99 (2010).   DOI
11 R. Dolbec, M. Bolduc, X. Fan, J. Guo, J. Jurewicz, T. Labrot, S. Xue, and M. Boulos, "Nanopowders Synthesis at Industrial-scale Production Using the Inductively Coupled Plasma Technology," NSTI-Nanotech 2008 Proceedings, 1 672-75 (2008).
12 Fact Sage, Software Program, Version 6.2, CRCT-Therm-Fact Inc. & GTT-Technologies, Canada & Germany, 2010.
13 C. Papelis, W. Um, C. E. Russell, and J. B. Chapman, "Measuring the Specific Surface Area of Natural and Manmade Glasses: Effect of Formation Process, Morphology, and Particle Size," Colloids Surf. A, 215 [1-3] 221-239 (2003).   DOI
14 H. Ahn, M. Hur, and S. H. Hong, "Synthesis of Ultrafine Powders for Aluminum Nitride by DC Thermal Plasma," J. Kor. Insti. Sur. Eng., 29 [1] 45-59 (1996).   과학기술학회마을
15 G. A. Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, "The Intrinsic Thermal Conductivity of AlN," J. Phys. Chem. Soli., 48 [7] 641-47 (1987).   DOI   ScienceOn
16 N. Kuramoto, H. Taniguchi, and I. Aso "Translucent AlN Ceramic Substrate," IEEE Trans. Compon. Hybrids Manuf. Technol., 9 386-90 (1986).   DOI
17 T. Okada, M. Toriyama, and S. Kanzaki, "Direct Nitridation of Aluminum Compacts at Low Temperature," J. Mater. Sci., 35 [12] 3105-11 (2000).   DOI   ScienceOn
18 N. Hashimoto, H. Yoden, and S. Deki, "Effect of Milling Treatment on the Particle Size in the Preparation of AIN Powder from Aluminum Polynuclear Complexes," J. Am. Ceram. Soc., 76 [2] 438-42 (1993).   DOI
19 T. Yamakawa, J. Tatami, T. Wakihara, K. Komeya, and T. Meg, "Synthesis of AlN Nanopowder from c-$Al_2O_3$ by Reduction-nitridation in a Mixture of $NH_3-C_3H_8$," J. Am. Ceram. Soc., 89 [1] 171-75 (2006).   DOI
20 S. H. Lee, J. H. Yi, J. H. Kim, Y. N. Ko, Y. J. Hong, and Y. C. Kang, "Preparation of Nanometer AlN Powders by Combining Spray Pyrolysis with Carbothermal Reduction and Nitridation," J. Ceram. Inter., 37 [6] 1967-71 (2011).   DOI
21 B. C. Di Lello, F. J. Moura, and I. G. Solorzano, "Synthesis and Characterization of Nano-scale Aluminum Nitride Produced from Vapor Phase," J. Mater. Scien. Eng., 15 [1-2] 67-69 (2001).   DOI
22 M. C. Wang, M. S. Tsai, and N. C. Wu, "Effect of Heat Treatment on Phase Transformation of Aluminum Nitride Ultrafine Powder Prepared by Chemical Vapor Deposition," J. Crys. Grow., 210 [4] 487-95 (2000).   DOI
23 R. Pool, "Clusters: Strange Morsels of Matter," Science, 248 [4960] 1186-88 (1990).   DOI
24 A. P. Alivisators, "Semiconductor Clusters, Nanocrystals, and Quantum Dots," Science, 271 [5251] 933-37 (1996).   DOI   ScienceOn
25 J. H. Pee, J. C. Park, Y. J. Kim, K. T. Hwang, and S. R. Kim, "Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process," J. Kor. Powder Metall. Inst., 15 [6] 1-7 (2008).   과학기술학회마을   DOI
26 A. V. Virkar, T. B. Jackson, and R. A. Cutler, ''Thermo-dynamic and Kinetic Effects of Oxygen Removal on the Thermal Conductivity of Aluminum Nitride," J. Am. Ceram. Soc., 72 [11] 2031-42 (1989).   DOI