• 제목/요약/키워드: nanosecond laser

검색결과 93건 처리시간 0.02초

Laser Ablation of Polypropylene Films using Nanosecond, Picosecond, and Femtosecond Laser

  • Sohn, Ik-Bu;Noh, Young-Chul;Kim, Young-Seop;Ko, Do-Kyeong;Lee, Jong-Min;Choi, Young-Jin
    • Journal of the Optical Society of Korea
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    • 제12권1호
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    • pp.38-41
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    • 2008
  • Precise micropatterning of polypropylene film, which is highly transparent in the wavelength range over 250 nm has been demonstrated by 355 nm nano/picosecond laser and 785 nm femtosecond laser. Increments of both the pulse energy and the shot number of pulses lead to cooccurrence of photochemical and thermal effects, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated polypropylene films were imaged by optical microscope and measured by a 3D optical measurement system. And, the ablation depth and width of polypropylene film ablated by femtosecond laser at various pulse energy and pulse number were characterized. Our results demonstrate that a femtosecond pulsed laser is an efficient tool for fabricating micropatterns of polypropylene films, where the micropatterns are specifically tailored in size, location and number easily controlled by laser processing conditions.

UV 레이저 응용 반도체 기판용 임베디드 회로 패턴 가공 (Fabrication of embedded circuit patterns for Ie substrates using UV laser)

  • 손현기;신동식;최지연
    • 한국레이저가공학회지
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    • 제14권1호
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    • pp.14-18
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    • 2011
  • Semiconductor industry demands decrease in line/space dimensions of IC substrates. Particularly for IC substrates for CPU, line/space dimensions below $10{\mu}m/10{\mu}m$ are expected to be used in production since 2014. Conventional production technologies (SAP, etc.) based on photolithography are widely agreed to be reaching capability limits. To address this limitation, the embedded circuit fabrication technology using laser ablation has been recently developed. In this paper, we used a nanosecond UV laser and a picosecond UV laser to fabricate embedded circuit patterns into a buildup film with $SiO_2$ powders for IC substrate. We conducted SEM and EDS analysis to investigate surface quality of the embedded circuit patterns. Experimental results showed that due to higher recoil pressure, picosecond UV laser ablation of the buildup film generated a better surface roughness.

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액막 보조 레이저 세척에서 액체 기화의 역할 (Role of Liquid Vaporization in Liquid-Assisted Laser Cleaning)

  • 이주철;장덕석;김동식
    • 대한기계학회논문집B
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    • 제27권2호
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    • pp.188-196
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    • 2003
  • Liquid-assisted cleaning technology utilizing a nanosecond laser pulse is effective for removing submicron particulates from a variety of solid substrates. In the technique, saturated vapor is condensed on a solid surface to form a thin liquid film and the film is evaporated explosively by laser heating. The present work studies the role of liquid-film evaporation in the cleaning process. First, optical interferometry is employed for in-situ monitoring the displacement of the laser-irradiated sample in the cleaning process. The experiments are performed for estimating the recoil force exerted on the target with and without liquid deposition. Secondly, time-resolved visualization and optical reflectance probing are also conducted for monitoring the phase-change kinetics and plume dynamics in vaporization of thin liquid layers. Discussions are made on the effect of liquid-film thickness and dynamics of plume and acoustic wave. The results confirm that cleaning force is generated when the bubble nuclei initially grow in the strongly superheated liquid.

전기광학적 정궤환을 이용한 광쌍안정소자 (Optical Bistable Device Using Poistive Electro-Optic Feedback)

  • 이창희;김석윤;갑상영;이수영
    • 대한전자공학회논문지
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    • 제25권1호
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    • pp.94-100
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    • 1988
  • To improve the switching time of active optical bistable devices, we propose an active optical bistable device that consists of a diode laser, a transistor, and a photodetector. By implementing the proposed device we realize the optical bistable device with a 5 nanosecond switching time. This is the fastest switching time among the hybrid type optical bistable devices. It is also experimentally demonstrated that the proposed device may be used in an optical disc pick up.

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Dynamics and Transport of Molecules Studied by Transient Grating Method : Methyl Red in Solution

  • 김선희;김성규
    • Bulletin of the Korean Chemical Society
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    • 제17권4호
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    • pp.365-373
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    • 1996
  • Time profile of the transient grating signal induced by a nanosecond pulsed laser excitation of methyl red is investigated in alcohols and toluene at several solvent temperatures. The signal decays biexponentially with well-separated time constants; the faster decay is identified as due to thermal diffusion of the solvents and the slower one as mainly due to translational diffusion of the solute. The measured translational diffusion constants of methyl red in toluene are close to a hydrodynamic prediction with a slip boundary condition while those in alcohols are larger by 30% and increase slightly with the size of alcohols. We compare the results with modified hydrodynamic models.

Michelson 간섭계를 응용한 미세 상변화 현상 계측 (Probing of Microscale Phase-Change Phenomena Based on Michelson Interforometry)

  • 김동식;박희권
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.348-353
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    • 2001
  • Experimental schemes that enable characterization of phase-change phenomena in the micro scale regime is essential for understanding the phase-change kinetics. Particularly, monitoring rapid vaporization on a submicron length scale is an important yet challenging task in a variety of laser-processing applications, including steam laser cleaning and liquid-assisted material ablation. This paper introduces a novel technique based on Michelson interferometry for probing the liquid-vaporization process on a solid surface heated by a KrF excimer laser pulse (${\lambda}=248nm,\;FWHM=24\;ns$) in water. The effective thickness of a microbubble layer has been measured with nanosecond time resolution. The maximum bubble size and growth rate are estimated to be of the order of $0.1{\mu}m\;and\;1\;m/s$, respectively. The results show that the acoustic enhancement in the laser induced vaporization process is caused by bubble expansion in the initial growth stage, not by bubble collapse. This work demonstrates that the interference method is effective for detecting bubble nucleation and microscale vaporization kinetics.

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나노초 야그 레이저 어블레이션에 의한 실리콘의 폭발적 제거 현상 (Explosive mass-removal processes during high power nanosecond Nd-YAG laser ablation of silicon)

  • 정성호
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 추계학술대회논문집A
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    • pp.736-742
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    • 2000
  • Mass removed from crystalline silicon samples during high power single-pulse laser ablation was studied by measuring the resulting crater morphology with a white light interferometric microscope. The volume and depth of the craters show a strong nonlinear change as the laser irradiance increases across a threshold value, that is, approximately $2.2{\times}10^{10}\;W/cm^2$. Time-resolved shadowgraph images of the ablation plume show the ejection of large particulates from the sample for laser irradiance above the threshold, with a time delay of about 300-400 nsec. The thickness of superheated liquid layer near the critical temperature was numerically estimated, considering the transformation of liquid metal into liquid dielectric near the critical state (i.e., induced transparency). The estimated thickness of the superheated layer at a delay time of 200 nsec agreed with the measured crater depths, suggesting that induced transparency promotes the formation of a deep superheated liquid layer which leads to an explosive boiling responsible for the sudden increase of crater volume and depth.

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Michelson 간섭계를 응용한 미세 상변화 현상 계측 (Probing of Microscale Phase-Change Phenomena Based on Michelson Interforometry)

  • 김동식;박희권
    • 대한기계학회논문집B
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    • 제25권8호
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    • pp.1140-1147
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    • 2001
  • Experimental schemes that enable characterization of phase-change phenomena in the microscale regime are essential for understanding the phase-change kinetics. Particularly, monitoring rapid vaporization on a submicron length scale is an important yet challenging task in a variety of laser-processing application, including steam laser cleaning and liquid-assisted material ablation. This paper introduces a novel technique based on Michelson interferometry for probing the liquid-vaporization process on a solid surface heated by a KrF excimer laser pulse(λ=248nm, FWHM=24ns) in water. The effective thickness of a microbubble layer has been measured with nanosecond time resolution. The maximum bubble size and growth rate are estimated to be of the order of 0.1㎛ and 1m/s, respectively. The results show that the acoustic enhancement in the laser induced vaporization process is caused by bubble expansion in the initial growth stage, not by bubble collapse. This work demonstrates that the interference method is effective for detecting bubble nucleation and microscale vaporization kinetics.

순수 알루미나와 탄소나노튜브 강화 알루미나 복합체의 극초단 펄스레이저 가공특성 비교 (Comparison of Ablation Characteristics of Carbon Nanotube reinforced Hybrid Al2O3 by using Ultrashort Pulse Laser)

  • 이준영;윤지욱;강명창;조성학
    • 한국기계가공학회지
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    • 제12권6호
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    • pp.23-29
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    • 2013
  • In this paper, pure $I_{ph}$ and hybrid carbon nanotube reinforced $I_{ph}$ were sintered using the SPS(spark plasma sintering) method for high densification. A nanosecond laser (${\lambda}=1063nm$, ${\tau}P=10ns$) and a femtosecond laser (${\lambda}=1027nm$, ${\tau}P=380fs$) were installed on an optical system for the micromachining test. The ablation characteristics of the pure $I_{ph}$ and CNT/$I_{ph}$ composites, such as thermal effect and ablation depth, were investigated using FE-SEM and a confocal microscope device. Laser machining results for the two mating materials showed improved performances: CNT/$I_{ph}$ composites showed good surface morphology of hole drilling without a melting zone due to the composites' high thermal properties; also, the ablated depth of CNT/$I_{ph}$ was higher than that of pure $I_{ph}$.

Excitation Wavelength Dependence of Laser Ablation Mechanism of Urethane-Urea Copolymer Film Studied by Time-Resolved Absorbance Measurements

  • Tada, Takuji;Asahi, Tsuyoshi;Masuhara, Hiroshi;Tsuchimori, Masaaki;Watanabe, Osamu
    • Journal of Photoscience
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    • 제10권1호
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    • pp.97-104
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    • 2003
  • The excitation wavelength dependence of laser ablation dynamics of an azobenzene-containing urethane-urea copolymer film was investigated by measuring the laser fluence dependence of etch depth, transient absorbance change at each excitation wavelength, and transient absorption spectra. Moreover expansion/contraction dynamics was studied by applying nanosecond time-resolved interferometry. The threshold was determined at several excitation wavelengths from etch depth measurement, while time-integrated absorbance was obtained under excitation conditions. The photon energy required to remove the topmost of surface layer of the film did not .depend on excitation wavelength, and the penetration depth of excitation pulse dominated the etch depth. When the excitation wavelength was longer than 500 nm, permanent swelling was clearly observed but not for shorter wavelength excitation. In the latter case, photoisomerization occurred during excitation and the following photoreduction may play an important role. On the basis of the observations made in this study, a photochemical and photothermal mechanisms can explain mostly the short and long wavelength excitation results, respectively.

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