대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2000년도 추계학술대회논문집A
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- Pages.736-742
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- 2000
나노초 야그 레이저 어블레이션에 의한 실리콘의 폭발적 제거 현상
Explosive mass-removal processes during high power nanosecond Nd-YAG laser ablation of silicon
- 정성호 ;
- ;
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- Jeong, S.H. (Kwangju Institute of Science and Technology, Department of Mechatronics) ;
- Yoo, J.H. (Lawrence Berkeley National Laboratory) ;
- Grief, R. (University of California at Berkeley) ;
- Russo, R.E. (Lawrence Berkeley National Laboratory)
- 발행 : 2000.11.02
초록
Mass removed from crystalline silicon samples during high power single-pulse laser ablation was studied by measuring the resulting crater morphology with a white light interferometric microscope. The volume and depth of the craters show a strong nonlinear change as the laser irradiance increases across a threshold value, that is, approximately