• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.555-558
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• 2005

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, The sub-resonance occurred by the disaccord of force center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1273-1276
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• 2005

A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.38.3-38
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• 2001

In the planetary surface exploration , micro-rovers or nano-rovers are very attractive choices for a surface exploration system providing mobility functions and other features required in the surface probe missions at small mass and relatively small cost. This paper surveys and summarizes the requirements for Mars exploration rovers in micro or nano scale and outlines the control concepts for navigation including the obstacle/hazard avoidance and the path planning. In this context, autonomous reaction capabilities are the key elements to control design in conjunction with the remote control schemes to deal with the significant signal propagation delays. Other navigation and control aspects such as the instrument fine positioning and the flip-over of the rovers are also briefly introduced. The current technical limitations of the micro- and nano-rovers are summarized.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.48-53
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• 2005

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.73-76
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• 2005

Carbon nanotubes (CNTs) have attracted an increasing attention due to their superior mechanical properties and potential application in industries. The strength of CNT has been predicted or calculated through several simulation techniques but actual experiments on stress-strain behavior are rare due to its dimensional limit, nanoscale positioning/manipulation, and instrumental resolution. We have attempted to observe straining responses of a multi-walled carbon nanotube (MWNT) by performing an in-situ tensile testing in a scanning electron microscope. The carbon nanotube, having its both ends attached on a cantilever force sensor and Y-shaped support, was elongated by a computer-controlled nanomanipulator. Linear deformation and fracture behaviors of MWNT were successfully observed and its force-displacement curve was also measured from the bending stiffness and displacement of the force sensor and manipulator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.10
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.64-72
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• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.313-317
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• 2005

Precision motor dynamometer is requiring for nano positioning control performance recently. Particularly, linear motor is using rapidly and the dynamometer needs is increasing. In this study, a precision control dynamometer is designed using MR (Magnetic Rheological) damper. The ultra precision motor system including the driver and controller is tested using the MR damper dynamometer. This dynamometer is able to measure torque for rotary motor or traction force with linear positioning accuracy for linear motor system.