• Title/Summary/Keyword: nano-grain

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Highly Doped Nano-crystal Embedded Polymorphous Silicon Thin Film Deposited by Using Neutral Beam Assisted CVD at Room Temperature

  • Jang, Jin-Nyeong;Lee, Dong-Hyeok;So, Hyeon-Uk;Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.154-155
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    • 2012
  • The promise of nano-crystalites (nc) as a technological material, for applications including display backplane, and solar cells, may ultimately depend on tailoring their behavior through doping and crystallinity. Impurities can strongly modify electronic and optical properties of bulk and nc semiconductors. Highly doped dopant also effect structural properties (both grain size, crystal fraction) of nc-Si thin film. As discussed in several literatures, P atoms or radicals have the tendency to reside on the surface of nc. The P-radical segregation on the nano-grain surfaces that called self-purification may reduce the possibility of new nucleation because of the five-coordination of P. In addition, the P doping levels of ${\sim}2{\times}10^{21}\;at/cm^3$ is the solubility limitation of P in Si; the solubility of nc thin film should be smaller. Therefore, the non-activated P tends to segregate on the grain boundaries and the surface of nc. These mechanisms could prevent new nucleation on the existing grain surface. Therefore, most researches shown that highly doped nc-thin film by using conventional PECVD deposition system tended to have low crystallinity, where the formation energy of nucleation should be higher than the nc surface in the intrinsic materials. If the deposition technology that can make highly doped and simultaneously highly crystallized nc at low temperature, it can lead processes of next generation flexible devices. Recently, we are developing a novel CVD technology with a neutral particle beam (NPB) source, named as neutral beam assisted CVD (NBaCVD), which controls the energy of incident neutral particles in the range of 1~300eV in order to enhance the atomic activation and crystalline of thin films at low temperatures. During the formation of the nc-/pm-Si thin films by the NBaCVD with various process conditions, NPB energy directly controlled by the reflector bias and effectively increased crystal fraction (~80%) by uniformly distributed nc grains with 3~10 nm size. In the case of phosphorous doped Si thin films, the doping efficiency also increased as increasing the reflector bias (i.e. increasing NPB energy). At 330V of reflector bias, activation energy of the doped nc-Si thin film reduced as low as 0.001 eV. This means dopants are fully occupied as substitutional site, even though the Si thin film has nano-sized grain structure. And activated dopant concentration is recorded as high as up to 1020 #/$cm^3$ at very low process temperature (< $80^{\circ}C$) process without any post annealing. Theoretical solubility for the higher dopant concentration in Si thin film for order of 1020 #/$cm^3$ can be done only high temperature process or post annealing over $650^{\circ}C$. In general, as decreasing the grain size, the dopant binding energy increases as ratio of 1 of diameter of grain and the dopant hardly be activated. The highly doped nc-Si thin film by low-temperature NBaCVD process had smaller average grain size under 10 nm (measured by GIWAXS, GISAXS and TEM analysis), but achieved very higher activation of phosphorous dopant; NB energy sufficiently transports its energy to doping and crystallization even though without supplying additional thermal energy. TEM image shows that incubation layer does not formed between nc-Si film and SiO2 under later and highly crystallized nc-Si film is constructed with uniformly distributed nano-grains in polymorphous tissues. The nucleation should be start at the first layer on the SiO2 later, but it hardly growth to be cone-shaped micro-size grains. The nc-grain evenly embedded pm-Si thin film can be formatted by competition of the nucleation and the crystal growing, which depend on the NPB energies. In the evaluation of the light soaking degradation of photoconductivity, while conventional intrinsic and n-type doped a-Si thin films appeared typical degradation of photoconductivity, all of the nc-Si thin films processed by the NBaCVD show only a few % of degradation of it. From FTIR and RAMAN spectra, the energetic hydrogen NB atoms passivate nano-grain boundaries during the NBaCVD process because of the high diffusivity and chemical potential of hydrogen atoms.

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The Effect of Phases of Starting Materials on the Grain Size at High Pressure: the Comparison of Grain Size in the Samples Using Glass and Nano Powder as Starting Materials (고압환경에서의 결정 크기에 원시료의 상이 미치는 영향: 비정질 시료와 나노파우더를 이용한 시료의 결정 크기 비교)

  • Eun Jeong Kim;Alessio Zandona;Takehiko Hiraga;Sanae Koizumi;Nobuyoshi Miyajima;Tomoo Katsura;Byung-Dal So
    • Korean Journal of Mineralogy and Petrology
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    • v.36 no.3
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    • pp.213-220
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    • 2023
  • In this study, we report the effect of starting materials on the grain size in a multi-component system at high pressure experiments. We used two different starting materials, glass and nano powders, to synthesize bridgmanite in the reduced conditions in the presence of calcium-ferrite-phase MgAl2O4 to compared the grain size of synthesized samples. After synthesizing the sample at 40 GPa, 2000 K for 20 hrs, the sample from glass showed the grain size of 50-200 nm whereas the one from nano powders has ~500 nm of grains. This difference may come from 1) the temperature of 2000 K which is low enough for glass starting materials to make more crystal nucleis than to grow crystal size or 2) the possible difference in the redox state of starting materials. It is suggested that the using of nano powders is better to synthesize bigger grains in high pressure experiments with multi-component systems rather than using glass starting materials.

Variation of Tensile Strength by Addition of Y2O3 and Effect of Aging Treatment in Ni Base Alloy Fabricated by MA Method (MA법으로 제조된 Ni기 합금에서 Y2O3 첨가에 따른 인장강도변화와 시효처리 효과)

  • Kim, Il-Ho;Lee, Won-Sik;Ko, Se-Hyun;Jang, Jin-Man;Kwun, Sook-In
    • Journal of Powder Materials
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    • v.15 no.1
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    • pp.23-30
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    • 2008
  • Ni-20Cr-20Fe-5Nb alloy with or without $Y_2O_3$ was manufactured by mechanical alloying process and consolidated by spark plasma sintering (SPS). The grain size of the alloy with $Y_2O_3$ was smaller than that of alloy without $Y_2O_3$ which results from the effect of $Y_2O_3$ suppressing grain growth. The tensile strength at room temperature was increased by the addition of $Y_2O_3$ but decreased abruptly at temperature above $600^{\circ}C$. It seems to result from the change of deformation mechanism due to fine grain size, that is, grain boundary sliding is predominant at above $600^{\circ}C$ while internal dislocation movement is predominant at below $600^{\circ}C$. After conventional heat treatment process of solution treatment and aging, a small amount of ${\delta}(Ni_3Nb)$ phase was formed in Ni-20Cr-20Fe-5Nb alloy while a large amount of ${\gamma}"(Ni_3Nb)$ was formed in Inconel 718 in the previous report. This is due to exhaustion of Nb content by the formation of NbC during consolidation.

Photocatalytic Property of Nano-Structured TiO$_2$ Thermal Splayed Coating - Part I: TiO$_2$ Coating - (나노구조 TiO$_2$ 용사코팅의 미세조직 제어 공정기술 개발과 광촉매 특성평가 - Part I: TiO$_2$코팅 -)

  • 이창훈;최한신;이창희;김형준;신동우
    • Journal of Welding and Joining
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    • v.21 no.4
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    • pp.39-45
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    • 2003
  • Nano-TiO$_2$ photocatalytic coatings were deposited on the stainless steel 304(50$\times$70$\times$3mm) by the APS(Atmospheric Plasma Spraying). Photocatlytic reaction was tested in MB(methylene blue) aqueous solution. For applying nano-TiO$_2$ powders by thermal spray, the starting nano-TiO$_2$ powder with 100% anatase crystalline was agglomerated by spray drying. Plasma second gas(H$_2$) flow rate and spraying distance were used as principal process parameters which are known to control heat enthalpy(heat input). The relationship between process parameters and the characteristics of microstructure such as the anatase phase fraction and grain size of the TiO$_2$ coatings were investigated. The photo-decomposition efficiency of TiO$_2$ coatings was evaluated by the kinetics of MB aqueous solution decomposition. It was found that the TiO$_2$ coating with a lower heat input condition had a higher anatase fraction, smaller anatase grain size and a better photo-decomposition efficiency.

Finite Element Analysis of Densification Behavior during Equal Channel Angular Pressing Process of Powders (분말 ECAP 공정 시 치밀화의 유한요소해석)

  • Yoon, Seung-Chae;Quang, Pham;Chun, Byong-Sun;Lee, Hong-Ro;Kim, Hyoung-Seop
    • Journal of Powder Materials
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    • v.13 no.6 s.59
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    • pp.415-420
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    • 2006
  • Nanostructured metallic materials are synthesized by bottom-up processing which starts with powders for assembling bulk materials or top-down processing starting with a bulk solid. A representative bottom-up and top-down paths for bulk nanostructured/ultrafine grained metallic materials are powder consolidation and severe plastic deformation (SPD) methods, respectively. In this study, the bottom-up powder and top-down SPD approaches were combined in order to achieve both full density and grain refinement without grain growth, which were considered as a bottle neck of the bottom-up method using conventional powder metallurgy of compaction and sintering. For the powder consolidation, equal channel angular pressing (ECAP), one of the most promising method in SPD, was used. The ECAP processing associated with stress developments was investigated. ECAP for powder consolidation were numerically analyzed using the finite element method (FEM) in conjunction with pressure and shear stress.

Effect of Ca and Al Additions on the Magnetic Properties of Nanocrytalline Fe-Si-B-Nb-Cu Alloy Powder Cores

  • Moon, Sun Gyu;Kim, Ji Seung;Sohn, Keun Yong;Park, Won-Wook
    • Journal of Magnetics
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    • v.21 no.2
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    • pp.192-196
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    • 2016
  • The Fe-Si-B-Nb-Cu alloys containing Ca and Al were rapidly solidified to thin ribbons by melt-spinning. The ribbons were ball-milled to make powders, and then mixed with 1 wt.% water glass and 1.5 wt.% lubricant. The mixed powders were burn-off, and then compacted to form toroidal-shaped cores, which were heat treated to crystallize the nano-grain structure and to remove residual stress of material. The characteristics of the powder cores were analyzed using a differential scanning calorimetry (DSC) and a B-H meter. The microstructures were observed using transmission electron microscope (TEM). The optimized soft magnetic properties (${\mu}_i$ and $P_{cv}$) of the powder cores were obtained from the Ca and Al containing alloys after annealing at $530^{\circ}C$ for 1 h. The core loss of Fe-Si-B-Nb-Cu-based powder cores was reduced by the addition of Ca element, and the initial permeability increased due to the addition of Al element.

Cold Compaction Behavior of Nano and Micro Aluminum Powder under High Pressure

  • Kim, Dasom;Park, Kwangjae;Kim, Kyungju;Cho, Seungchan;Hirayama, Yusuke;Takagi, Kenta;Kwon, Hansang
    • Composites Research
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    • v.32 no.3
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    • pp.141-147
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    • 2019
  • In this study, micro-sized and nano-sized pure aluminum (Al) powders were compressed by unidirectional pressure at room temperature. Although neither type of Al bulk was heated, they had a high relative density and improved mechanical properties. The microstructural analysis showed a difference in the process of densification according to particle size, and the mechanical properties were measured by the Vickers hardness test and the nano indentation test. The Vickers hardness of micro Al and nano Al fabricated in this study was five to eight times that of ordinary Al. The grain refinement effect was considered to be one of the strengthening factors, and the Hall-Petch equation was introduced to analyze the improved hardness caused by grain size reduction. In addition, the effect of particle size and dispersion of aluminum oxide in the bulk were additionally considered. Based on these results, the present study facilitates the examination of the effect of particle size on the mechanical properties of compacted bulk fabricated by the powder metallurgy method and suggests the possible way to improve the mechanical properties of nano-crystalline powders.

Consolidation and Mechanical Property of Rapidly Solidified Al-20 wt% Si Alloy Powders by Continuous Equal Channel Multi-Angular Pressing (연속 다단 ECAP 공정을 통한 급속응고 Al-20 wt% Si 합금 분말의 고형화 및 특성 평가)

  • Yoon, Seung-Chae;Bok, Cheon-Hee;Seo, Min-Hong;Hong, Soon-Jik;Kim, Hyoung-Seop
    • Journal of Powder Materials
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    • v.15 no.1
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    • pp.31-36
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    • 2008
  • In this study, the bottom-up powder metallurgy and the top-down severe plastic deformation (SPD) techniques for manufacturing bulk nanomaterials were combined in order to achieve both full density and grain refinement without grain growth of rapidly solidified Al-20 wt% Si alloy powders during consolidation processing. Continuous equal channel multi-angular processing (C-ECMAP) was proposed to improve low productivity of conventional ECAP, one of the most promising method in SPD. As a powder consolidation method, C-ECMAP was employed. A wide range of experimental studies were carried out for characterizing mechanical properties and microstructures of the ECMAP processed materials. It was found that effective properties of high strength and full density maintaining nanoscale microstructure are achieved. The proposed SPD processing of powder materials can be a good method to achieve fully density and nanostructured materials.

Microstructural Evolution of Grade 91 Steel upon Heating at 760~1000℃

  • He, Yinsheng;Chang, Jungchel;Lee, Je-Hyun;Shin, Keesam
    • Korean Journal of Materials Research
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    • v.25 no.11
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    • pp.607-611
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    • 2015
  • The microstructural evolution of Grade 91 tempered martensite ferritic steels heat treated at $760{\sim}1000^{\circ}C$ for two hours was investigated using scanning electron microscopy(SEM), energy disperse spectroscopy(EDS), electron backscattered diffraction (EBSD), and transmission electron microscopy(TEM); a microhardness tester was also employed, with a focus on the grain and precipitate evolution process as well as on the main hardening element. It was found that an evolution of tempered martensite to ferrite($760{\sim}850^{\circ}C$), and to fresh martensite($900{\sim}1000^{\circ}C$), occurred with the increase of temperature. Simultaneously, the parabolic evolution characteristics of the low angle grain boundary(LAGB) increased with the increase of the heating temperature(highest fraction of LAGB at $925^{\circ}C$), indicating grain recovery upon intercritical heating. The main precipitate, $M_{23}C_6$, was found to be coarsened slightly at $760{\sim}850^{\circ}C$; it then dissolved at $850{\sim}1000^{\circ}C$. Besides this, $M_3C$ cementite was formed at $900{\sim}1000^{\circ}C$. Finally, the experimental results show that the hardness of the steel depended largely on the matrix structure, rather than on the precipitates, with the fresh martensite showing the highest hardness value.