• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.407-408
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• 2006

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.11a
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• pp.18-22
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• 2000

An experimental study was carried out to investigate the effect of nano-contact condition on the nano-adhesion phenomena. SPM(scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. DLC(diamond-like carbon) and W-DLC (tungsten-incorporated diamond-like carbon) were coated on (100) silicon wafer by PACVD(plasma assisted chemical vapor deposition). Pull-off forces of Pure Si-wafer, DLC and W-DLC were measured with SPM(scanning probe microscope). Also, the same series of tests were carried out with the tips with different radius of curvature. Results showed that DLC and W-DLC showed much lower pull-off force than Si-wafer and Pull-off force increased with the tip radius.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.173-174
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• 2006

• Journal of the Korean Chemical Society
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• v.48 no.6
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• pp.663-666
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• 2004

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2005.11a
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• pp.158-159
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• 2005

• Journal of Powder Materials
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• v.20 no.4
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• pp.297-301
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• 2013

Mirror surface machining for large area flattening in the display field has a problem such as a tool wear and a increase in machining time due to large area machining. It should be studied to decrease machining time and tool wear. In this paper, multi-tool machining method using a PCD tool and a SCD tool was applied in order to decrease machining time and tool wear. Machining characteristics (cutting force, machined surface and surface roughness) of PCD tool and SCD tool were evaluated in order to apply PCD tool to flattening machining. Based on basic experiments, the PCD/SCD multi-tool method and the SCD single-tool method were compared through surface roughness and machining time for appllying large area mold machining.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.425-425
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• 2011

The photocatalytic decomposition of toluene gas was investigated with $TiO_2$ on nano-diamond powder (NDP) under UV irradiation. Atomic layer deposition (ALD) was used for the growth of $TiO_2$ on the NDP. The structure and surface properties of catalysts were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS) and Transmission Electron Microscopy (TEM). The photocatalytic activity for the toluene decomposition was evaluated by measuring the concentration change of toluene and $CO_2$ gas with gas chromatography (GC)-flame ionization detector (FID) system. The photocatalytic activities of $TiO_2$/NDP catalysts were compared with that of P-25. The rate of initial photocatalytic decomposition of toluene for the $TiO_2$/NDP catalysts was relatively lower when compared to P-25. The photocatalytic activity of P-25 was rapidly decreased with time, whereas, the deactivation of $TiO_2$/NDP catalysts was less pronounced. Therefore, as the reaction time increased, the photocatalytic activity of $TiO_2$/NDP catalysts became higher than that of P-25. The intermediates such as benzaldehyde or benzoic acid, etc were more easily adhered to the active site on the P-25 surface during reaction, resulting in easier deactivation of P-25. These results could be confirmed using FT-IR spectroscopy. We suggest that the NDP used as substrate can reduce the deactivation of $TiO_2$ on the surface.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.2
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• pp.86-92
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• 2013

$SF_6/O_2$ inductively coupled plasmas were employed to texture Si surface as a pretreatment for nanocrystalline diamond film growth. It was found that the $SF_6/O_2$ plasma texturing provided a very wide process window where normalized roughness values in the range of 2~16 could be obtained. Significantly improved nucleation densities of ${\sim}6.5{\times}10^{10}cm^{-2}$ compared to conventional mechanical abrasion were achieved after seeding for the textured Si substrate.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.40-44
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• 2002

The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.4
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• pp.369-374
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• 2009

In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.